JPS62163946U - - Google Patents
Info
- Publication number
- JPS62163946U JPS62163946U JP5186786U JP5186786U JPS62163946U JP S62163946 U JPS62163946 U JP S62163946U JP 5186786 U JP5186786 U JP 5186786U JP 5186786 U JP5186786 U JP 5186786U JP S62163946 U JPS62163946 U JP S62163946U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chip
- position data
- moving
- outputs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5186786U JPS62163946U (cs) | 1986-04-07 | 1986-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5186786U JPS62163946U (cs) | 1986-04-07 | 1986-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163946U true JPS62163946U (cs) | 1987-10-17 |
Family
ID=30876527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5186786U Pending JPS62163946U (cs) | 1986-04-07 | 1986-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163946U (cs) |
-
1986
- 1986-04-07 JP JP5186786U patent/JPS62163946U/ja active Pending
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