JPS62163730A - Treatment of exhaust gas - Google Patents

Treatment of exhaust gas

Info

Publication number
JPS62163730A
JPS62163730A JP61003601A JP360186A JPS62163730A JP S62163730 A JPS62163730 A JP S62163730A JP 61003601 A JP61003601 A JP 61003601A JP 360186 A JP360186 A JP 360186A JP S62163730 A JPS62163730 A JP S62163730A
Authority
JP
Japan
Prior art keywords
exhaust gas
volatile organic
regenerated
adsorption
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61003601A
Other languages
Japanese (ja)
Other versions
JPS6348574B2 (en
Inventor
Shigeo Yasutake
安武 重雄
Norio Makita
則夫 槙田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Research Co Ltd
Ebara Infilco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Research Co Ltd, Ebara Infilco Co Ltd filed Critical Ebara Research Co Ltd
Priority to JP61003601A priority Critical patent/JPS62163730A/en
Publication of JPS62163730A publication Critical patent/JPS62163730A/en
Publication of JPS6348574B2 publication Critical patent/JPS6348574B2/ja
Granted legal-status Critical Current

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  • Treating Waste Gases (AREA)
  • Physical Water Treatments (AREA)
  • Removal Of Specific Substances (AREA)

Abstract

PURPOSE:To effectively remove volatile organic compd. and to prevent environmental pollution by subjecting exhaust gas discharged from the stripping of water contg. volatile organic chlorine compd. to adsorption treatment and irradiating both a sterilization beam and an ozone generation beam to regenerated exhaust gas of an adsorbent and thereafter resubjecting the gas to adsorption treatment. CONSTITUTION:Raw water 1 contg. volatile organic chlorine compd. such as trichloroethylene is treated by stripping air 5 in a packed tower 3 and discharged exhaust gas 7 is introduced into an adsorption tower 8 to adsorb volatile organic chlorine compd. contained in exhaust gas 7, and the treatment gas 9 made harmless is discharged to the atmosphere. When an adsorbent is saturated, the stripping air 5 is branched and passed through the adsorption tower 8 as gas 11 for regeneration via a heater 10 to desorb adsorbed components. After introducing the regenerated exhaust gas 12 into an ultraviolet rays irradiation device 13 and irradiating both ultraviolet rays of the sterilization beam and the ozone generation beam to decompose a harmful component such as volatile organic chlorine compd., the regenerated exhaust gas 12' wherein a nondecomposed component partially remains is reintroduced into the regenerated adsorption tower 8 and made harmless.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、トリクロロエチレン、テトラクロロエチレン
等の発ガン性のある揮発性有機塩素化合物を含む上水、
用水、廃水等の処理で行われるストリッピング過程で排
気される排ガスの処理方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is directed to clean water containing carcinogenic volatile organic chlorine compounds such as trichlorethylene and tetrachlorethylene;
The present invention relates to a method for treating exhaust gas exhausted during a stripping process performed in the treatment of water, wastewater, etc.

〔従来の技術〕[Conventional technology]

近年、トリクロロエチレン、テトラクロロエチレン等の
発ガン性のある揮発性有機塩素化合物による環境汚染が
問題となっており、汚染源としては主としてドライクリ
ーニング用脱脂剤や、金属工業、電子産業等の洗浄廃水
に起因するといわれている。
In recent years, environmental pollution caused by carcinogenic volatile organic chlorine compounds such as trichlorethylene and tetrachlorethylene has become a problem, and the main sources of pollution are degreasers for dry cleaning and cleaning wastewater from the metal industry and electronics industry. It is said.

水中に含まれるこれら、揮発性有機塩素化合物は、スト
リフピングを行うことによって水中から容易に除去する
ことができるが、ストリッピングで排気される排ガス中
に揮発性有機塩素化合物が移行し、この排ガスを未処理
のまま大気中に放散すると、再び新たな環境汚染の原因
となるところから、吸着剤によって排ガスを吸着処理し
、無害化することが一般的に考えられる。
These volatile organic chlorine compounds contained in water can be easily removed from the water by stripping, but the volatile organic chlorine compounds migrate into the exhaust gas exhausted during stripping, and this exhaust gas is If released into the atmosphere untreated, it may cause new environmental pollution, so it is generally considered that exhaust gases are adsorbed and treated with an adsorbent to render them harmless.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、前記排ガスの吸着処理は、比較的確実な
方法であるが、対象成分濃度が一般に数十■/Nm’以
下と極めて低濃度であるために、吸着容量が数%(WT
)以下と小さく、また再生時に排出される使用済再生剤
中の脱着された成分の処理も必要となり、処理操作は煩
雑であり、全体のランニングコストも高くなる点が問題
であった。
However, although the above-mentioned adsorption treatment of exhaust gas is a relatively reliable method, since the concentration of the target component is generally extremely low, below several tens of cm/Nm', the adsorption capacity is limited to several percent (WT
), and it is also necessary to treat the desorbed components in the used regenerant discharged during regeneration, which makes the treatment operation complicated and increases the overall running cost.

本発明は、鋭意研究した結果完成されたものであって、
揮発性有機塩素化合物を含む水のストリッピングで排気
される排ガスを吸着剤によって低コストでしかも簡便に
無害化処理し、さらに吸着剤の再生時に脱着されて排出
される有害成分をも合理的に除去し、もって環境汚染の
防止をはかることができる方法を提供することを目的と
するものである。
The present invention was completed as a result of intensive research, and
Using an adsorbent, the exhaust gas discharged from water stripping containing volatile organic chlorine compounds can be detoxified easily and at low cost, and the harmful components that are desorbed and emitted when the adsorbent is regenerated can also be rationally treated. The purpose of the present invention is to provide a method that can remove these substances and thereby prevent environmental pollution.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、揮発性有機塩素化合物を含む水をストリフピ
ングして排気される排ガスを、吸着塔に導いて排ガス中
に移行された前記揮発性有機塩素化合物を吸着処理し、
該吸着塔の吸着剤の再生を再生用ガスで行って吸着成分
を脱着し、該再生で排出される再生排ガスに殺菌線とオ
ゾン発生線の両紫外線を照射して再生排ガス中に脱着さ
れた前記揮発性有機化合物を分解したのち、さらにその
ガスを前記吸着塔に導いて吸着処理することを特徴とす
る排ガス処理方法を提供するものである。
The present invention provides exhaust gas exhausted by stripping water containing volatile organic chlorine compounds, which is guided to an adsorption tower to absorb and treat the volatile organic chlorine compounds transferred into the exhaust gas.
The adsorbent in the adsorption tower is regenerated with a regeneration gas to desorb the adsorbed components, and the regenerated exhaust gas discharged during the regeneration is irradiated with both ultraviolet rays of germicidal radiation and ozone generation radiation to desorb the adsorbed components into the regenerated exhaust gas. The present invention provides an exhaust gas treatment method characterized in that after the volatile organic compound is decomposed, the gas is further guided to the adsorption tower and subjected to adsorption treatment.

〔作 用〕[For production]

本発明の作用について、−実施s、 様を示す図面を参
照しながら説明すれば、トリクロロエチレン、テトラク
ロロエチレン等の揮発性有機塩素化合物を含有する原水
1は、ポンプ2によって充填塔3内の上方に導かれて内
部の充填物上に散布され、下方から送風機4によって吹
き込まれるストリッピング空気5等によって水中の揮発
性有機塩素化合物が除去され、処理水6となって流出す
る。このとき、充填塔3から排気される排ガス7中には
、水中から追い出された揮発性有機塩素化合物が含まれ
ており、この排ガス7を吸着剤(粒状、繊維状、ハニカ
ム状等の活性炭、ゼオライト、モレキュラーシーブ等の
天然又は合成の吸着剤を使用することかできる)を充填
した吸着塔8に導いて吸着処理することにより、排ガス
7中の揮発性有機塩素化合物は吸着され、無害化された
処理ガス9となって大気中に放散される。
The operation of the present invention will be described with reference to drawings showing implementation. Raw water 1 containing volatile organic chlorine compounds such as trichlorethylene and tetrachlorethylene is introduced upward into a packed column 3 by a pump 2. Volatile organic chlorine compounds in the water are removed by stripping air 5 and the like blown from below by a blower 4, and the water is discharged as treated water 6. At this time, the exhaust gas 7 exhausted from the packed tower 3 contains volatile organic chlorine compounds expelled from the water, and this exhaust gas 7 is absorbed by an adsorbent (granular, fibrous, honeycomb-like activated carbon, etc.). Volatile organic chlorine compounds in the exhaust gas 7 are adsorbed and rendered harmless by introducing the gas into an adsorption tower 8 filled with a natural or synthetic adsorbent such as zeolite or molecular sieve for adsorption treatment. The processed gas 9 is released into the atmosphere.

このような吸着操作において、吸着塔8の吸着剤は吸着
の進行に伴って吸着能力を失い、飽和に達したときは吸
着成分を脱着する再生を行う。すなわち、例えばストリ
ッピング空気5を分岐して加熱器10によって加熱した
空気を再生用ガス11として、飽和した吸着塔8に供給
し、吸着剤に吸着されている成分を脱着する。このとき
に排出される再生排ガス12には吸着剤の再生時に脱着
された揮発性有機塩素化合物などの有害成分が含有され
るから、この再生排ガス12を紫外線照射装置13に導
入して紫外線を照射する。
In such an adsorption operation, the adsorbent in the adsorption tower 8 loses its adsorption capacity as adsorption progresses, and when it reaches saturation, regeneration is performed to desorb the adsorbed components. That is, for example, the stripping air 5 is branched and air heated by a heater 10 is supplied as the regeneration gas 11 to the saturated adsorption tower 8 to desorb the components adsorbed by the adsorbent. Since the regenerated exhaust gas 12 discharged at this time contains harmful components such as volatile organic chlorine compounds desorbed during the regeneration of the adsorbent, this regenerated exhaust gas 12 is introduced into the ultraviolet irradiation device 13 and irradiated with ultraviolet rays. do.

紫外線照射装置13においては、253.7nmと18
4.9nmを主波長にもつ紫外線を照射して再生排ガス
12中の有害成分を分解する。この場合、253.7n
+*を主波長にもついわゆる殺菌線と称されている紫外
線だけでは効果が少ないので、184.9nmを主波長
にもついわゆるオゾン発生線と称されている紫外線をも
照射することによって有害成分の分解効果が発揮される
。効果的な分解ができる存機物としては、有機ハロゲン
化合物がアリ、特にトリクロロエチレン、テトラクロロ
エチレンに対しては極めて効果的である。これらの紫外
線の照射は、同時に照射してもよく、また別別に照射す
ることもできる。
In the ultraviolet irradiation device 13, 253.7 nm and 18
Harmful components in the regenerated exhaust gas 12 are decomposed by irradiation with ultraviolet light having a main wavelength of 4.9 nm. In this case, 253.7n
Ultraviolet rays, which are so-called germicidal rays with a main wavelength of The decomposition effect is demonstrated. As organic substances that can be effectively decomposed, organic halogen compounds are extremely effective against ants, especially trichlorethylene and tetrachloroethylene. These ultraviolet rays may be irradiated simultaneously or separately.

このように紫外線照射後の再生排ガス12′には一部未
分解成分が残留し、そのまま大気中へ放散することがで
きない。そのため、紫外線照射後の再生排ガス12′を
再び再生法の吸着塔8に導いて、残留する未分解成分を
吸着させ、完全無害化してから大気中へ放散する。
In this way, some undecomposed components remain in the regenerated exhaust gas 12' after being irradiated with ultraviolet rays, and cannot be released into the atmosphere as is. Therefore, the regenerated exhaust gas 12' after being irradiated with ultraviolet rays is again guided to the adsorption tower 8 of the regeneration method, where the remaining undecomposed components are adsorbed, completely rendered harmless, and then released into the atmosphere.

なお、上記操作において、使用する吸着塔が1塔である
場合には、吸着塔8の再生時にはストリッピング排ガス
7の吸着操作を中断させなくてはならないが、図示例の
ように吸着塔8と別に吸着塔8′ (1塔に限らず複数
基でもよい)を並設させることにより、吸着と再生を交
互に行い、連続的に処理を継続することができるから便
利である。
In the above operation, if only one adsorption tower is used, it is necessary to interrupt the adsorption operation of the stripping exhaust gas 7 when regenerating the adsorption tower 8, but as shown in the example shown in the figure, it is necessary to interrupt the adsorption operation of the stripping exhaust gas 7. Separately, by arranging adsorption towers 8' (not only one tower but a plurality of towers) in parallel, adsorption and regeneration can be performed alternately and the treatment can be continued continuously, which is convenient.

また、上記実施例では、吸着塔内の吸着剤の再生は、再
生用ガスを別個に設けられた加熱器10で加熱したのち
吸着塔に供給する例を示したが、吸着塔に加熱機能を内
蔵した方式とすることもできる。
In addition, in the above embodiment, the regeneration of the adsorbent in the adsorption tower shows an example in which the regeneration gas is heated with a separately provided heater 10 and then supplied to the adsorption tower. A built-in method can also be used.

〔実施例〕〔Example〕

某工場洗浄廃水を空気を使用してストリッピングし、そ
の排ガス7を、図示例のように、2塔並設した吸着塔の
一方の吸着塔8にて処理し、この吸着塔8が飽和したと
きに加熱空気で再生し、排出される再生排ガス12を紫
外線照射後、再生済の他方の吸着塔8′にて処理した。
A certain factory washing wastewater is stripped using air, and the exhaust gas 7 is treated in one adsorption tower 8 of two adsorption towers installed in parallel as shown in the example, and this adsorption tower 8 is saturated. At times, the regenerated exhaust gas 12 was regenerated with heated air, and after being irradiated with ultraviolet rays, it was treated in the other regenerated adsorption tower 8'.

このときの処理条件及び処理結果は次の通りであった。The processing conditions and processing results at this time were as follows.

処理条件 1)ストリッピング気液比:20 2)吸着剤:活性炭素繊維 3)吸着剤通気Sv:30001/h 4)再生空気/ストリフピング空気: 1/30005
)紫外線照射 紫外線照射出力 14W 照射時間    1.6〜4.7 sec波長(同時照
射)   253.7n■(65%)184.9nm 
(15%) その他(20%) 処理結果 なお、前記吸着塔再生時の再生排ガス中のトリクロロエ
チレン、テトラクロロエチレンの各濃度に対する前記紫
外線照射条件による分解効果を第2図及び第3図に示し
た。
Processing conditions 1) Stripping gas-liquid ratio: 20 2) Adsorbent: activated carbon fiber 3) Adsorbent ventilation Sv: 30001/h 4) Regeneration air/stripping air: 1/30005
) Ultraviolet irradiation Ultraviolet irradiation output 14W Irradiation time 1.6-4.7 sec Wavelength (simultaneous irradiation) 253.7n (65%) 184.9nm
(15%) Others (20%) Treatment Results The decomposition effects of the ultraviolet irradiation conditions on the respective concentrations of trichlorethylene and tetrachlorethylene in the regenerated exhaust gas during the adsorption tower regeneration are shown in FIGS. 2 and 3.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、排出されるストリッ
ピング排ガス及びこれを処理する吸着剤の再生排ガス中
の連発性有機塩素化合物をすべて効果的に除去して無害
化し、環境汚染を完全に防止することができるものであ
る。
As described above, according to the present invention, all the continuous organic chlorine compounds in the stripped exhaust gas and the regenerated exhaust gas of the adsorbent that processes it are effectively removed and rendered harmless, thereby completely eliminating environmental pollution. It is something that can be prevented.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施態様を示す系統説明図で、第2
図は再生排ガス中のトリクロロエチレン濃度と紫外線に
よる分解率の関係を示す線図、第3図は再生排ガス中の
テトラクロロエチレン濃度と紫外線による分解率の関係
を示す線図である。 l・・・原水、2・・・ポンプ、3・・・充填塔、4・
・・送風機、5・・・ストリッピング空気、6山処理水
、7・・・排ガス、8.8′・・・吸着塔、9・・・処
理ガス、10・・・加熱器、11・・・再生用ガス、1
2.12’・・・再生排ガス、13・・・紫外線照射装
置。 搏ガス、震度(mQ/Nm3) (テトうクロロエチレン) 排ガス濃度(mvNm3)
FIG. 1 is a system explanatory diagram showing one embodiment of the present invention, and the second
The figure is a diagram showing the relationship between the trichlorethylene concentration in the recycled exhaust gas and the decomposition rate due to ultraviolet rays, and FIG. 3 is a diagram showing the relationship between the tetrachlorethylene concentration in the recycled exhaust gas and the decomposition rate due to ultraviolet rays. l... Raw water, 2... Pump, 3... Packed tower, 4...
...Blower, 5...Stripping air, 6 Mountain treated water, 7...Exhaust gas, 8.8'...Adsorption tower, 9...Processing gas, 10...Heater, 11...・Regeneration gas, 1
2.12'... Regeneration exhaust gas, 13... Ultraviolet irradiation device. Gas, seismic intensity (mQ/Nm3) (tetrichloroethylene) Exhaust gas concentration (mvNm3)

Claims (1)

【特許請求の範囲】 1、揮発性有機塩素化合物を含む水をストリッピングし
て排気される排ガスを、吸着塔に導いて排ガス中に移行
された前記揮発性有機塩素化合物を吸着処理し、該吸着
塔の吸着剤の再生を再生用ガスで行って吸着成分を脱着
し、該再生で排出される再生排ガスに殺菌線とオゾン発
生線の両紫外線を照射して再生排ガス中に脱着された前
記揮発性有機化合物を分解したのち、さらにそのガスを
前記吸着塔に導いて吸着処理することを特徴とする排ガ
ス処理方法。 2、前記吸着塔を複数塔並設し、これらの吸着塔を交互
に使用して処理を連続化したものである特許請求の範囲
第1項記載の排ガス処理方法。
[Claims] 1. Exhaust gas exhausted after stripping water containing volatile organic chlorine compounds is led to an adsorption tower to absorb and treat the volatile organic chlorine compounds transferred into the exhaust gas. The adsorbent in the adsorption tower is regenerated with the regeneration gas to desorb the adsorbed components, and the regenerated exhaust gas discharged during the regeneration is irradiated with both ultraviolet rays, both germicidal and ozone-generating, to remove the adsorbed components that are desorbed into the regenerated exhaust gas. An exhaust gas treatment method characterized in that after decomposing volatile organic compounds, the gas is further guided to the adsorption tower for adsorption treatment. 2. The exhaust gas treatment method according to claim 1, wherein a plurality of adsorption towers are arranged in parallel and the treatment is made continuous by using these adsorption towers alternately.
JP61003601A 1986-01-13 1986-01-13 Treatment of exhaust gas Granted JPS62163730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61003601A JPS62163730A (en) 1986-01-13 1986-01-13 Treatment of exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61003601A JPS62163730A (en) 1986-01-13 1986-01-13 Treatment of exhaust gas

Publications (2)

Publication Number Publication Date
JPS62163730A true JPS62163730A (en) 1987-07-20
JPS6348574B2 JPS6348574B2 (en) 1988-09-29

Family

ID=11562005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61003601A Granted JPS62163730A (en) 1986-01-13 1986-01-13 Treatment of exhaust gas

Country Status (1)

Country Link
JP (1) JPS62163730A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0360941A2 (en) * 1988-09-30 1990-04-04 Ultrox International Decompostion of volatile organic halogenated compounds contained in gases and aqueous solutions
JPH02115096A (en) * 1988-10-24 1990-04-27 Ultrox Internatl Decomposition of volatile organohalogen compound contained in gas and aqueous solution
JPH0470126U (en) * 1990-10-24 1992-06-22
WO2000069477A1 (en) * 1999-04-01 2000-11-23 Kunchong Hi-Tech Co., Ltd. Process for preventing air pollution by using ultraviolet ray
US6358374B1 (en) * 1999-12-17 2002-03-19 Carrier Corporation Integrated photocatalytic and adsorbent technologies for the removal of gaseous contaminants
KR20020033355A (en) * 2000-10-31 2002-05-06 김동현 Activated carbon absorbing apparatus
WO2002036244A1 (en) * 2000-11-06 2002-05-10 Seoul Filtec Engineering Co., Ltd. Method and apparatus for eliminating stench and volatile organic compounds from polluted air
KR20020057852A (en) * 2002-04-20 2002-07-12 한국문화기술연구원(주) A Method for Recovery and Removal of Volatile Organic Compounds, and An Apparatus Using the Method
KR100424507B1 (en) * 2000-05-27 2004-03-26 (주)백년기술 Apparatus for destruction of volatile organic compounds
EP1621245A1 (en) * 2004-07-30 2006-02-01 Brandt Industries Process for treating volatile organic compounds or gases, especially in an air circulation duct
US7144556B2 (en) 2002-04-25 2006-12-05 Canon Kabushiki Kaisha Method and apparatus for decomposition of substance contained in gas
EP1846139A4 (en) * 2005-01-13 2010-03-17 Carrier Corp Gas treatment adsorption-oxidation system
JP2020032381A (en) * 2018-08-31 2020-03-05 ウシオ電機株式会社 Gas treatment apparatus, gas treatment method

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4941957A (en) * 1986-10-22 1990-07-17 Ultrox International Decomposition of volatile ogranic halogenated compounds contained in gases and aqueous solutions
EP0360941A2 (en) * 1988-09-30 1990-04-04 Ultrox International Decompostion of volatile organic halogenated compounds contained in gases and aqueous solutions
JPH02115096A (en) * 1988-10-24 1990-04-27 Ultrox Internatl Decomposition of volatile organohalogen compound contained in gas and aqueous solution
JPH0470126U (en) * 1990-10-24 1992-06-22
WO2000069477A1 (en) * 1999-04-01 2000-11-23 Kunchong Hi-Tech Co., Ltd. Process for preventing air pollution by using ultraviolet ray
US6358374B1 (en) * 1999-12-17 2002-03-19 Carrier Corporation Integrated photocatalytic and adsorbent technologies for the removal of gaseous contaminants
KR100424507B1 (en) * 2000-05-27 2004-03-26 (주)백년기술 Apparatus for destruction of volatile organic compounds
KR20020033355A (en) * 2000-10-31 2002-05-06 김동현 Activated carbon absorbing apparatus
WO2002036244A1 (en) * 2000-11-06 2002-05-10 Seoul Filtec Engineering Co., Ltd. Method and apparatus for eliminating stench and volatile organic compounds from polluted air
KR20020057852A (en) * 2002-04-20 2002-07-12 한국문화기술연구원(주) A Method for Recovery and Removal of Volatile Organic Compounds, and An Apparatus Using the Method
US7144556B2 (en) 2002-04-25 2006-12-05 Canon Kabushiki Kaisha Method and apparatus for decomposition of substance contained in gas
EP1621245A1 (en) * 2004-07-30 2006-02-01 Brandt Industries Process for treating volatile organic compounds or gases, especially in an air circulation duct
FR2873595A1 (en) * 2004-07-30 2006-02-03 Brandt Ind Sas PROCESS FOR THE TREATMENT OF VOLATILE ORGANIC COMPOUNDS OR GAS, IN PARTICULAR FOR A CIRCULATION CIRCULATION OF AN AIR FLOW
EP1846139A4 (en) * 2005-01-13 2010-03-17 Carrier Corp Gas treatment adsorption-oxidation system
JP2020032381A (en) * 2018-08-31 2020-03-05 ウシオ電機株式会社 Gas treatment apparatus, gas treatment method

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