JPS62163369U - - Google Patents

Info

Publication number
JPS62163369U
JPS62163369U JP4868386U JP4868386U JPS62163369U JP S62163369 U JPS62163369 U JP S62163369U JP 4868386 U JP4868386 U JP 4868386U JP 4868386 U JP4868386 U JP 4868386U JP S62163369 U JPS62163369 U JP S62163369U
Authority
JP
Japan
Prior art keywords
bellows
flow path
pump
approximately
sealing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4868386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4868386U priority Critical patent/JPS62163369U/ja
Publication of JPS62163369U publication Critical patent/JPS62163369U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す縦断面図、第
２図は要部拡大断面図である。 １……弁本体、２……真空チヤンバ、３……シ
リンダ、４……ピストン棒、５……弁体、７……
ベローズ、９……軸封金具、１１……中間筒体、
１３……弁口、１５……流体流路、１８……主真
空ポンプ、１９……補助真空ポンプ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 一端がベローズ内部に開口した流体流路を設け
    、該流路の他端をポンプ等に接続し、ベローズの
    内部と外部とを大略同一圧力に設定可能としたこ
    とを特徴とする可動軸のベローズ式シール装置。
JP4868386U 1986-03-31 1986-03-31 Pending JPS62163369U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4868386U JPS62163369U (ja) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4868386U JPS62163369U (ja) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62163369U true JPS62163369U (ja) 1987-10-17

Family

ID=30870444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4868386U Pending JPS62163369U (ja) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62163369U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02209674A (ja) * 1989-02-08 1990-08-21 Ulvac Corp 密封処理装置におけるロッドシール
JP2009127634A (ja) * 2007-11-19 2009-06-11 Mirapuro:Kk ベローズ機構

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113873A (en) * 1979-02-23 1980-09-02 Hitachi Ltd Low pressure device
JPS5915860B2 (ja) * 1977-01-10 1984-04-12 日鉄鉱業株式会社 エアスライドコンベヤをフイ−ダとして有する粉体貯槽の自動定量排出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915860B2 (ja) * 1977-01-10 1984-04-12 日鉄鉱業株式会社 エアスライドコンベヤをフイ−ダとして有する粉体貯槽の自動定量排出装置
JPS55113873A (en) * 1979-02-23 1980-09-02 Hitachi Ltd Low pressure device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02209674A (ja) * 1989-02-08 1990-08-21 Ulvac Corp 密封処理装置におけるロッドシール
JP2009127634A (ja) * 2007-11-19 2009-06-11 Mirapuro:Kk ベローズ機構

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