JPS55113873A - Low pressure device - Google Patents

Low pressure device

Info

Publication number
JPS55113873A
JPS55113873A JP1983579A JP1983579A JPS55113873A JP S55113873 A JPS55113873 A JP S55113873A JP 1983579 A JP1983579 A JP 1983579A JP 1983579 A JP1983579 A JP 1983579A JP S55113873 A JPS55113873 A JP S55113873A
Authority
JP
Japan
Prior art keywords
bellows
press
shaft
space
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983579A
Other languages
Japanese (ja)
Other versions
JPH0151543B2 (en
Inventor
Masayuki Shimizu
Kiyoshi Yoshida
Seiichi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1983579A priority Critical patent/JPS55113873A/en
Publication of JPS55113873A publication Critical patent/JPS55113873A/en
Publication of JPH0151543B2 publication Critical patent/JPH0151543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Sealing Devices (AREA)
  • Diaphragms And Bellows (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To eliminate the buckling of a bellows in use so as to extend the lifetime of the bellows, by closing bellows space including a shaft installed in a vessel, and by keeping the space at a press. lying between the outside atmospheric press. and the inside press. CONSTITUTION:A shaft 6 is installed in a vacuum vessel 1 rotatably and vertically movably at the top end 9 of a bellows 3 through an O-ring 10. A flange 14 is set to the bellows 3 space, which includes a shaft 6, through O-rings 12, 13 to form a second closed space 11. The press. in the bellows 3 is decreased by evacuating the closed space 11 through a suction pipe 15 to alleviate the press. difference between the outside press. and the press. in the vessel 1 with the press. in the bellows 3 Hereby, bellows 3 moves smoothly, causing no buckling. As a result, the shaft 6 hardly intermeshes with the bellows 3 and is operated easily.
JP1983579A 1979-02-23 1979-02-23 Low pressure device Granted JPS55113873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983579A JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983579A JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Publications (2)

Publication Number Publication Date
JPS55113873A true JPS55113873A (en) 1980-09-02
JPH0151543B2 JPH0151543B2 (en) 1989-11-06

Family

ID=12010326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983579A Granted JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Country Status (1)

Country Link
JP (1) JPS55113873A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163369U (en) * 1986-03-31 1987-10-17
JPS6380813A (en) * 1986-09-22 1988-04-11 Sumitomo Chem Co Ltd Shaft seal structure of cylindrical pair shank part piercing through partition wall
JPH0250568U (en) * 1988-10-04 1990-04-09
JPH02209674A (en) * 1989-02-08 1990-08-21 Ulvac Corp Rod seal in sealing treatment device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035250U (en) * 1973-07-24 1975-04-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035250U (en) * 1973-07-24 1975-04-15

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163369U (en) * 1986-03-31 1987-10-17
JPS6380813A (en) * 1986-09-22 1988-04-11 Sumitomo Chem Co Ltd Shaft seal structure of cylindrical pair shank part piercing through partition wall
JPH0250568U (en) * 1988-10-04 1990-04-09
JPH02209674A (en) * 1989-02-08 1990-08-21 Ulvac Corp Rod seal in sealing treatment device

Also Published As

Publication number Publication date
JPH0151543B2 (en) 1989-11-06

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