JPS6216276B2 - - Google Patents

Info

Publication number
JPS6216276B2
JPS6216276B2 JP6363083A JP6363083A JPS6216276B2 JP S6216276 B2 JPS6216276 B2 JP S6216276B2 JP 6363083 A JP6363083 A JP 6363083A JP 6363083 A JP6363083 A JP 6363083A JP S6216276 B2 JPS6216276 B2 JP S6216276B2
Authority
JP
Japan
Prior art keywords
etching
etched
etching solution
solution
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6363083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59190366A (ja
Inventor
Sadao Adachi
Seigo Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6363083A priority Critical patent/JPS59190366A/ja
Publication of JPS59190366A publication Critical patent/JPS59190366A/ja
Publication of JPS6216276B2 publication Critical patent/JPS6216276B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP6363083A 1983-04-13 1983-04-13 ３−ｖ族化合物結晶用化学エツチング液 Granted JPS59190366A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6363083A JPS59190366A (ja) 1983-04-13 1983-04-13 ３−ｖ族化合物結晶用化学エツチング液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6363083A JPS59190366A (ja) 1983-04-13 1983-04-13 ３−ｖ族化合物結晶用化学エツチング液

Publications (2)

Publication Number Publication Date
JPS59190366A JPS59190366A (ja) 1984-10-29
JPS6216276B2 true JPS6216276B2 (cg-RX-API-DMAC7.html) 1987-04-11

Family

ID=13234853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6363083A Granted JPS59190366A (ja) 1983-04-13 1983-04-13 ３−ｖ族化合物結晶用化学エツチング液

Country Status (1)

Country Link
JP (1) JPS59190366A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5181924B2 (ja) * 2008-08-21 2013-04-10 ソニー株式会社 半導体発光素子及びその製造方法、並びに、下地に設けられた凸部、下地における凸部形成方法

Also Published As

Publication number Publication date
JPS59190366A (ja) 1984-10-29

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