JPS62161938U - - Google Patents

Info

Publication number
JPS62161938U
JPS62161938U JP5082086U JP5082086U JPS62161938U JP S62161938 U JPS62161938 U JP S62161938U JP 5082086 U JP5082086 U JP 5082086U JP 5082086 U JP5082086 U JP 5082086U JP S62161938 U JPS62161938 U JP S62161938U
Authority
JP
Japan
Prior art keywords
air pad
air
sliding
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5082086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525789Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050820U priority Critical patent/JPH0525789Y2/ja
Publication of JPS62161938U publication Critical patent/JPS62161938U/ja
Application granted granted Critical
Publication of JPH0525789Y2 publication Critical patent/JPH0525789Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)
JP1986050820U 1986-04-07 1986-04-07 Expired - Lifetime JPH0525789Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Publications (2)

Publication Number Publication Date
JPS62161938U true JPS62161938U (enrdf_load_stackoverflow) 1987-10-15
JPH0525789Y2 JPH0525789Y2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=30874524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050820U Expired - Lifetime JPH0525789Y2 (enrdf_load_stackoverflow) 1986-04-07 1986-04-07

Country Status (1)

Country Link
JP (1) JPH0525789Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194819A (ja) * 2005-01-17 2006-07-27 Lasertec Corp 検査装置
JP2014059035A (ja) * 2012-09-19 2014-04-03 Takenori Kawazoe 移動機構および高さ測定器
WO2016121967A1 (ja) * 2015-01-30 2016-08-04 株式会社東京精密 三次元座標測定装置
JP2021092590A (ja) * 2021-03-16 2021-06-17 株式会社東京精密 三次元座標測定装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5058454A (enrdf_load_stackoverflow) * 1973-09-21 1975-05-21
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5058454A (enrdf_load_stackoverflow) * 1973-09-21 1975-05-21
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194819A (ja) * 2005-01-17 2006-07-27 Lasertec Corp 検査装置
JP2014059035A (ja) * 2012-09-19 2014-04-03 Takenori Kawazoe 移動機構および高さ測定器
WO2016121967A1 (ja) * 2015-01-30 2016-08-04 株式会社東京精密 三次元座標測定装置
JP6099290B2 (ja) * 2015-01-30 2017-03-22 株式会社東京精密 三次元座標測定装置
US9921049B2 (en) 2015-01-30 2018-03-20 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
US10663283B2 (en) 2015-01-30 2020-05-26 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
US11067382B2 (en) 2015-01-30 2021-07-20 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
JP2021092590A (ja) * 2021-03-16 2021-06-17 株式会社東京精密 三次元座標測定装置

Also Published As

Publication number Publication date
JPH0525789Y2 (enrdf_load_stackoverflow) 1993-06-29

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