JPS62160342U - - Google Patents

Info

Publication number
JPS62160342U
JPS62160342U JP4881586U JP4881586U JPS62160342U JP S62160342 U JPS62160342 U JP S62160342U JP 4881586 U JP4881586 U JP 4881586U JP 4881586 U JP4881586 U JP 4881586U JP S62160342 U JPS62160342 U JP S62160342U
Authority
JP
Japan
Prior art keywords
bridge
semiconductor
pressure sensor
capacitor
piezoresistive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4881586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4881586U priority Critical patent/JPS62160342U/ja
Publication of JPS62160342U publication Critical patent/JPS62160342U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP4881586U 1986-03-31 1986-03-31 Pending JPS62160342U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4881586U JPS62160342U (US08063081-20111122-C00115.png) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4881586U JPS62160342U (US08063081-20111122-C00115.png) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62160342U true JPS62160342U (US08063081-20111122-C00115.png) 1987-10-12

Family

ID=30870699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4881586U Pending JPS62160342U (US08063081-20111122-C00115.png) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62160342U (US08063081-20111122-C00115.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002243566A (ja) * 2001-02-19 2002-08-28 Denso Corp 半導体式圧力センサ
JP2006528765A (ja) * 2003-07-22 2006-12-21 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 圧力を測定する方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002243566A (ja) * 2001-02-19 2002-08-28 Denso Corp 半導体式圧力センサ
JP2006528765A (ja) * 2003-07-22 2006-12-21 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 圧力を測定する方法及び装置

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