JPS62158449U - - Google Patents
Info
- Publication number
- JPS62158449U JPS62158449U JP1986047300U JP4730086U JPS62158449U JP S62158449 U JPS62158449 U JP S62158449U JP 1986047300 U JP1986047300 U JP 1986047300U JP 4730086 U JP4730086 U JP 4730086U JP S62158449 U JPS62158449 U JP S62158449U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- marks
- pattern
- projection exposure
- reduction projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047300U JPH0132045Y2 (enExample) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047300U JPH0132045Y2 (enExample) | 1986-03-31 | 1986-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62158449U true JPS62158449U (enExample) | 1987-10-08 |
| JPH0132045Y2 JPH0132045Y2 (enExample) | 1989-10-02 |
Family
ID=30867775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986047300U Expired JPH0132045Y2 (enExample) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132045Y2 (enExample) |
-
1986
- 1986-03-31 JP JP1986047300U patent/JPH0132045Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0132045Y2 (enExample) | 1989-10-02 |