JPS62157969U - - Google Patents

Info

Publication number
JPS62157969U
JPS62157969U JP4428186U JP4428186U JPS62157969U JP S62157969 U JPS62157969 U JP S62157969U JP 4428186 U JP4428186 U JP 4428186U JP 4428186 U JP4428186 U JP 4428186U JP S62157969 U JPS62157969 U JP S62157969U
Authority
JP
Japan
Prior art keywords
plasma cvd
cvd apparatus
pore
substrate holder
generated gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4428186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527493Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986044281U priority Critical patent/JPH0527493Y2/ja
Publication of JPS62157969U publication Critical patent/JPS62157969U/ja
Application granted granted Critical
Publication of JPH0527493Y2 publication Critical patent/JPH0527493Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986044281U 1986-03-25 1986-03-25 Expired - Lifetime JPH0527493Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044281U JPH0527493Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986044281U JPH0527493Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Publications (2)

Publication Number Publication Date
JPS62157969U true JPS62157969U (US20090163788A1-20090625-C00002.png) 1987-10-07
JPH0527493Y2 JPH0527493Y2 (US20090163788A1-20090625-C00002.png) 1993-07-13

Family

ID=30861940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044281U Expired - Lifetime JPH0527493Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Country Status (1)

Country Link
JP (1) JPH0527493Y2 (US20090163788A1-20090625-C00002.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
JPS5948138A (ja) * 1982-07-29 1984-03-19 エクセロ・コ−ポレ−シヨン ポリウレタン反応射出成形系
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマcvd薄膜製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
JPS5948138A (ja) * 1982-07-29 1984-03-19 エクセロ・コ−ポレ−シヨン ポリウレタン反応射出成形系
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマcvd薄膜製造装置

Also Published As

Publication number Publication date
JPH0527493Y2 (US20090163788A1-20090625-C00002.png) 1993-07-13

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