JPS62157840U - - Google Patents
Info
- Publication number
- JPS62157840U JPS62157840U JP4597786U JP4597786U JPS62157840U JP S62157840 U JPS62157840 U JP S62157840U JP 4597786 U JP4597786 U JP 4597786U JP 4597786 U JP4597786 U JP 4597786U JP S62157840 U JPS62157840 U JP S62157840U
- Authority
- JP
- Japan
- Prior art keywords
- metal bellows
- wafer
- suction
- chuck
- suction member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 230000000087 stabilizing effect Effects 0.000 claims description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図の―線による断面図、第３図は第
１図の―線による断面図である。
Ｗ……ウエハ、１……チヤツク本体、６……金
属製ベローズ、８……姿勢安定部材、１０……板
バネ、１１……吸着部材、１３……吸着口。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a cross-sectional view along the line --- in FIG. 1, and FIG. 3 is a cross-sectional view along the --- line in FIG. W: wafer, 1: chuck body, 6: metal bellows, 8: posture stabilizing member, 10: plate spring, 11: suction member, 13: suction port.
Claims (1)
記ラエハ吸着面と垂直に配置された金属製ベロー
ズを介して移送手段に取付けられたチヤツク本体
に連結し、前記金属製ベローズを介して前記吸着
口を真空源に接続したウエハ搬送用真空チヤツク
において、前記吸着部材とチヤツク本体との間に
、前記金属製ベローズを囲み前記吸着部材とチヤ
ツク本体のいずれか一方に固定されると共に他方
に対しては前記金属製ベローズの長手方向に所定
量移動可能にしてかつ所定角度傾動可能に係止さ
れる姿勢安定部材を介在させたことを特徴とする
ウエハ搬送用真空チヤツク。 ２ 吸着部材のウエハ接触部を板バネによつて着
脱自在に取付けたことを特徴とする実用新案登録
請求の範囲第１項記載のウエハ搬送用真空チヤツ
ク。[Claims for Utility Model Registration] 1. A suction member having a suction port on the wafer suction surface is connected to a chuck body attached to a transfer means via a metal bellows arranged perpendicularly to the wafer suction surface, In a vacuum chuck for wafer transfer in which the suction port is connected to a vacuum source via a metal bellows, a chuck is provided between the suction member and the chuck body, surrounding the metal bellows and attaching to either one of the suction member and the chuck body. A vacuum chuck for wafer transfer, characterized in that a posture stabilizing member is interposed between the metal bellows, which is fixed to the other metal bellows, and is movable by a predetermined amount in the longitudinal direction of the metal bellows, and is locked so as to be tiltable at a predetermined angle. . 2. The vacuum chuck for wafer transfer according to claim 1, wherein the wafer contact portion of the suction member is detachably attached by a plate spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4597786U JPS62157840U (en) | 1986-03-28 | 1986-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4597786U JPS62157840U (en) | 1986-03-28 | 1986-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157840U true JPS62157840U (en) | 1987-10-07 |
Family
ID=30865211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4597786U Pending JPS62157840U (en) | 1986-03-28 | 1986-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157840U (en) |
-
1986
- 1986-03-28 JP JP4597786U patent/JPS62157840U/ja active Pending