JPS62157315A - Manufacture of composite magnetic head - Google Patents

Abstract

PURPOSE:To obtain a highly accurate magnetic gap head at high productivity by installing a groove with a slope on a ferromagnetic oxide substrate so as to regulate an azimuth, coating the groove with a high magnetic permeability material and butting core half bodies so as to slice. CONSTITUTION:A nonmagnetic plate 3 is fitted in a coil hole groove 2 on the ferromagnetic oxide substrate 1, and ground to make it flush with said substrate. A groove 4 with a slope 4a making an azimuth with respect to an upper substrate 1a is cut perpendicular to the groove 2. A ferromagnetic thin film 5 becoming the other core half is coated through a nonmagnetic gap spacer film. After grooves 6 and 7 are cut along the groove 4, the ferromagnetic thin film 5 on the upper substrate 1a is removed by plane grinding. After the track width caused by jointing the ferromagnetic thin film 5 and the magnetic substrate 1 it is regulated by the grooves 6 and 7 after coating the thin film 5, whereby gap accuracy is high. A pair of halves are produced in a similar way, the track positions of the gap are wached and butted. Through glass welding, slicing and grinding, the titled magnetic head is completed.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a composite magnetic head (so-called double azimuth magnetic Rad)
Relating to a manufacturing method.

[Summary of the invention]

In manufacturing a composite magnetic head formed by compositely integrating a pair of magnetic heads having different azimuth angles, the present invention provides an azimuth angle for a ferromagnetic oxide substrate serving as a half of the magnetic core of at least one of the magnetic heads. After creating a magnetic head block by forming a groove with a slope to define the groove and depositing a high magnetic permeability material in the groove using vacuum thin forming technology, the magnetic head block of the other magnetic head is formed. The objective is to produce a highly reliable composite magnetic head with no track deviation of the magnetic gap, with high yield and good productivity, by butting them together and performing a slicing process.

[Conventional technology]

In video tape recorders, improvements in image quality, sound quality, etc. are being made, as well as multi-functionality. For example, devices equipped with special playback functions such as still playback and slow playback are now widely used.

In this case, the function is meaningless unless the screen is reproduced beautifully without any disturbance or noise.In particular, in order to prevent blurring of images that change at high speed, the same recording track is repeatedly scanned for reproduction. Field still playback is common.

By the way, in a normal video tape recorder, for example, 82 magnetic heads are attached with different azimuth angles to prevent leakage from adjacent tracks. It is necessary to provide a special reproduction head adjacent to the B head with the same azimuth angle as the B head. Therefore, it is well known that a so-called double azimuth magnetic head, in which a special playback head is integrated into a normal recording/playback head, has been proposed and put into practical use.

In particular, Fe-A
j! A double azimuth magnetic head using a -3i alloy (Sendust) or an amorphous alloy as a core material is disclosed in, for example, Japanese Patent Laid-Open No. 59-72634 and Japanese Patent Laid-Open No. 59-198.
This method is disclosed in Japanese Patent Application Laid-open No. 518, Japanese Unexamined Patent Publication No. 59-218615, and the like.

[Problem that the invention seeks to solve]

However, in the conventional double azimuth head described above, it is difficult to ensure gap accuracy because the magnetic gap is formed by butting together magnetic thin films with high magnetic permeability, and the trunk width is determined by the thickness of the magnetic thin film. -i has many problems such as poor performance and is not suitable for mass production, and improvements to -i are desired.

The present invention has been proposed in view of the above-mentioned conventional circumstances, and an object of the present invention is to provide a method for manufacturing a composite magnetic head with high magnetic gap accuracy and high reliability. The purpose is to improve productivity, yield, etc.

[Means for solving problems]

In order to achieve the above-mentioned object, the present invention is directed to manufacturing a composite magnetic head formed by compositely integrating a pair of magnetic heads having different azimuth angles. A groove having an inclined surface defining a 7-magnetic angle is formed on the magnetic oxide substrate, and a magnetic head block is created by depositing an intermagnetic material into the groove using a vacuum thin film formation technique. This method is characterized in that the magnetic head block of the other magnetic head is butted against each other and the slicing process is performed.

[Effect]

In the present invention, a groove having a slope for defining the azimuth angle is formed in the strongly Iff oxidized substrate, and a high magnetic permeability material is deposited in the groove, and then the track width is regulated.
A highly reliable composite magnetic head with high magnetic gap accuracy is easily created.

Further, the track width can be freely set, and even if the film thickness of the high i3m ratio material is thin to some extent, a predetermined track width can be secured, which is excellent in mass productivity.

〔Example〕

The method for manufacturing a composite magnetic head to which the present invention is applied will be described below.
The process order will be explained with reference to the drawings.

To manufacture a composite magnetic head, first, an oxide substrate (1) made of ferromagnetic oxide is prepared, and as shown in FIG. A winding groove (2) that will become a winding hole is cut.

The oxide substrate (1) is made of Mn-Zn ferrite or N
It is formed from a ferromagnetic oxide material such as 1-Zn ferrite.

Next, as shown in FIG. 2, the above volume &i! A nonmagnetic plate (3) is fitted into the winding groove (2) so as to close the groove (2), and as shown in FIG. 3, its upper surface (3a) is aligned with the upper surface of the oxide substrate (1). Polish so that it is flush with (1a).

Therefore, the non-magnetic plate (3) is connected to the winding groove (2).
The winding groove (2) remains as a winding hole.

Next, as shown in FIG. 4, a plurality of azimuth defining grooves (4) are cut into the upper surface of the oxide substrate (1) in a direction perpendicular to the winding grooves (2).

The azimuth defining groove (4) has a slope (4a) inclined at a predetermined angle θ with respect to the upper surface (1a) of the oxide substrate (1).
), and the inclination angle θ of this slope (4a) becomes the azimuth angle of one of the magnetic heads of the composite magnetic head. In this case, the azimuth angles of the pair of magnetic heads can be set simultaneously by making the above-mentioned inclination angle θ twice the predetermined azimuth angle and tilting the slicing angle by the azimuth circumference of the other magnetic head during the slicing process described later. You may also do so. If the above-mentioned inclination angle θ is set to twice the azimuth angle in this way, it becomes unnecessary to set the azimuth in advance to the other magnetic head combined with this magnetic head, and it is possible to create a composite magnetic head that combines various magnetic heads. It becomes possible to manufacture.

After forming the slope (4a) having a predetermined inclination angle θ on the oxide substrate (1) as described above, a nonmagnetic film (not shown) that will become a gap spacer is deposited on the entire surface, and then As shown in FIG. 5, a ferromagnetic metal 111 (5) which will become the other magnetic core of this magnetic head is deposited over the entire surface.

The material of the ferromagnetic metal m1ll(5) is ferromagnetic amorphous alloy 1 so-called amorphous alloy (for example, Fe,
One or more elements of Ni, Co and p, c.

A metal-metalloid amorphous alloy containing one or more elements of B, Si, Co, and Hf as main components.

Metal-mekyl amorphous alloys whose main components are transition elements and rare earth elements such as High magnetic permeability materials such as alloys and Fe-Ni alloys (permalloy) can be used, and the coating methods include vacuum evaporation, sputtering,
Vacuum thin film forming technology such as ion blating method is used.

Next, in order to make the ferromagnetic metal thin film (5) on the slope (4a) have a predetermined track width, the azimuth defining groove (
4), track width regulating grooves (6) and (7) are cut, and the ferromagnetic metal Iff side (5) on the upper surface (1a) of the oxide substrate (1) is removed by surface grinding.

Here, the ferromagnetic metal thin film (5) and the oxide substrate (1)
The trunk width of the magnetic gap caused by joining is regulated by providing track width regulating grooves (6) and (7) after these are joined, so there is no variation due to positional deviation during butting, etc., and accuracy is improved. It is expensive.

According to the above-mentioned process, a magnetic hemlock N) is prepared,
Furthermore, in the same process, the azimuth angle is adjusted to the above magnetic head professional.
Create a 611-air headblock (■) that is the opposite of (1).

And these magnetic head blocks N), (11
) are made to match the track positions of the magnetic gaps, and as shown in FIG. 7, they are brought together and glass fused.

Finally, after slicing (cutting) along the A-A line and the A'-A' line in FIG. complete.

The resulting composite magnetic head is as shown in FIGS. 8 and 9.

That is, each magnetic head is constructed by joining a magnetic core (11) or (12) made of ferromagnetic oxide and a ferrocd metal IM (13) or (14) via a gap spacer, magnetic gap g+
, gz are formed at a predetermined azimuth angle so as to be inclined toward opposite sides of the magnetic gear forming surface.

Also, these magnetic cores (11).

(12) and ferromagnetic metal thin films (13), (14) are formed into track width regulating grooves (15), (16) or track width regulating grooves (17), (1B) so that a predetermined track width is achieved near the magnetic gap. ), and a non-magnetic guard material (l9) ensures a contact width for a magnetic recording medium such as a magnetic tape.

Here, the magnetic core (11) is attached to the oxide substrate (1) of one magnetic node block (+), and the magnetic core (12) is attached to the oxide substrate (1) of the other magnetic node block (I[). )
Similarly, ferromagnetic metal m film (13
) is the ferromagnetic metal thin film (5) of one magnetic node block (1), and the ferromagnetic metal thin II! (14) corresponds to the ferromagnetic metal thin film (5) of the other magnetic node block (n). In addition, track width regulation grooves (15), (1
6), (17) and (18) correspond to the track width regulating grooves (6) and (7).

As described above, according to the present invention, a composite magnetic head in which magnetic heads having different azimuth angles are integrated can be manufactured in a simple process without the difficulty of matching. Also, a magnetic core (11) that constitutes each magnetic head.

(12) and the ferromagnetic metal thin films (13) and (14) are bonded in advance via a gap spacer and then cut to have a predetermined track width, so the track width will vary due to butting. It is possible to form a magnetic gap with high precision.

Further, according to the manufacturing method of the present invention, the magnetic core (11
) and a ferromagnetic metal film (13), and a conventionally known magnetic head can be combined to produce a double azimuth magnetic head.

In this case, as described above, when manufacturing one of the magnetic head blocks (1), the inclination angle of the slope (4a) of the azimuth defining groove (4) for defining the azimuth angle is adjusted to a predetermined azimuth angle. After joining a magnetic head block with a known configuration as a magnetic head block (II), the magnetic head block l) may be sliced diagonally so as to have a predetermined azimuth angle. As a result, a composite magnetic head having predetermined azimuths opposite to each other across the magnetic gap forming surface can be obtained.

For example, as shown in FIG. 10, there is a double azimuth magnetic head that is combined with a magnetic head (ii) in which magnetic cores (21) and (22) made of ferromagnetic oxide are butted against each other via a gap spacer, and a As shown in the figure, a magnetic core part (31) made of ferromagnetic oxide, (
ferromagnetic metal thin film (33) obliquely deposited on 32);
(34) It is possible to produce a double azimuth magnetic head or the like in combination with the magnetic head (iii) in which the magnetic heads (34) are butted against each other via a gap spacer to form a magnetic gap gz. In these double azimuth magnetic heads, the magnetic head (i) is used as a magnetic head for special reproduction, and the magnetic head (ii) or magnetic head (iii) is used as a magnetic head for special reproduction.
By using this as a recording/playback magnetic head, good recording/playback and still playback are possible.

Furthermore, in the step shown in FIG. 5, a ferromagnetic metal thin film is directly deposited on the oxide substrate (1), and a ferromagnetic metal thin film is deposited again on top of this via a gap spacer.
As shown in Fig. 12, ferromagnetic metal thin films (41), (42)
) and the magnetic gap g4. It is also possible to fabricate a composite magnetic nod that constitutes a gs and further improves the magnetic properties.

By the way, in the previous embodiment, after the track width of the magnetic gap of each magnetic head/nod plotter is defined in advance by the track width regulating groove, they are butted against each other to achieve composite integration. If a track position accuracy of 1 is required, it is also possible to set the track widths at the same time after matching the magnetic head blocks.

That is, after butt-joining the magnetic hemlock block (I [[), (TV)) manufactured by the steps up to FIG. 5 of the previous example as shown in FIG. 13, Each magnetic head block (■).

(TV) magnetic recording medium facing surface (III a), (
A track width regulating groove (with a substantially U-shaped cross section) is formed in a direction perpendicular to the joint surface direction so that IVa) becomes a predetermined track width Tw.
51).

(51) is provided, and the track width regulating groove (51) is filled with a non-magnetic material (52).

By slicing this, a double azimuth magnetic head as shown in FIGS. 15 and 16 can be obtained.

In the above-mentioned double azimuth magnetic head, the magnetic cores (61), (62) made of ferromagnetic oxide and the ferromagnetic fully refracting thin films (63), (64) are butted against each other with a normal thickness on the back gear side, and the front gap is The sides are butted together with a thickness equal to the width of the track. Most of the surface in contact with the magnetic recording medium is made of a non-magnetic material (65) such as glass.

In the double azimuth magnetic head manufactured by such a method, the track width of each magnetic head is regulated all at once by cutting the trunk width regulating groove (51), so that there is no difference in the track width position. Therefore, it is possible to obtain a magnetic head with extremely high track position accuracy. In addition, this head guarantees track width up to depth 0 and is less prone to uneven wear, which is advantageous in terms of ensuring contact and spacing loss.

Note that even when such a method is used, it is possible to combine it with a magnetic head having a conventionally known configuration, as in the previous embodiment. For example, as shown in FIG. magnetic core (71).

(72) It is possible to produce a double azimuth magnetic head in combination with a magnetic head in which a magnetic gap is formed by butting together.

〔Effect of the invention〕

As is clear from the above description, in the present invention,
A groove with a slope for defining the azimuth angle is formed in a ferromagnetic oxide substrate, a high magnetic permeability material is deposited in this groove to form a magnetic head, and this is integrated into a composite structure to create a double azimuth magnetic head. Therefore, a highly reliable composite magnetic head can be easily produced without the difficulty that occurs when magnetic heads having azimuths are butted together.

In addition, the ferromagnetic oxide and high magnetic permeability material that make up each magnetic head are joined via a gap spacer and then cut to a predetermined track width, so variations in the gap width due to variations in butting may occur. (This makes it possible to form a magnetic gap with high precision.)

Further, the track width can be freely set, and a predetermined trunk width can be secured even if the film thickness of the high magnetic permeability material is thin to some extent, so it is highly practical in terms of mass production.

Furthermore, by adjusting the track width to a certain level after joining the magnetic head blocks together, there will be no misalignment of the track position between each magnetic head, and reliability will be improved in terms of wear and track width accuracy. A high-performance composite magnetic head can be obtained.

[Brief explanation of drawings]

1 to 7 are schematic perspective views illustrating an example of a method for manufacturing a composite magnetic head according to the present invention according to its steps, in which FIG. 1 is a winding groove cutting step, and FIG. 3 is a non-magnetic temporary fitting process, 3 is a surface grinding process, 4 is an azimuth regulation groove cutting process, 5 is a ferromagnetic metal thin film deposition process, 6 is a track width regulation groove cutting process, Figure 7 shows the magnetic head block joining process. FIG. 8 is an external perspective view showing an example of a composite magnetic head manufactured by the manufacturing method of the present invention, and FIG. 9 is an enlarged plan view showing its surface in contact with a magnetic recording medium. 10 to 12 are enlarged plan views showing other examples of composite magnetic heads manufactured by applying the manufacturing method of the present invention, respectively. 13 and 14 are schematic perspective views showing the manufacturing process when regulating the trunk width after joining the magnetic head blocks, FIG. 13 is the magnetic head block joining process, FIG. 14 is the tiger, The process of cutting the width regulating groove and filling the non-magnetic material are shown respectively. FIG. 15 is an external perspective view showing an example of a composite magnetic head manufactured through the steps shown in FIGS. 13 and 14;
FIG. 16 is an enlarged plan view of the surface in contact with the magnetic recording medium. FIG. 17 is an enlarged plan view showing the magnetic recording medium contacting surface of another example of a composite magnetic head manufactured through the steps shown in FIGS. 13 and 14. 1...Oxide substrate 4...Azimuth regulation groove 4a...Slope 5...Ferromagnetic metal thin film

Claims (1)

[Claims] When manufacturing a composite magnetic head formed by compositely integrating a pair of magnetic heads having different azimuth angles, a ferromagnetic oxide substrate serving as a half of the magnetic core of at least one of the magnetic heads is provided. After forming a groove with a slope to define the azimuth angle and depositing a high magnetic permeability material into the groove using vacuum thin film forming technology to create a magnetic head block, the magnetic head block of the other magnetic head is formed. A method for manufacturing a composite magnetic head, which comprises butting together and performing slicing processing.