JPS62157149U - - Google Patents

Info

Publication number
JPS62157149U
JPS62157149U JP4425986U JP4425986U JPS62157149U JP S62157149 U JPS62157149 U JP S62157149U JP 4425986 U JP4425986 U JP 4425986U JP 4425986 U JP4425986 U JP 4425986U JP S62157149 U JPS62157149 U JP S62157149U
Authority
JP
Japan
Prior art keywords
centering
cup
wafers
centered
dimensions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4425986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129787Y2 (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4425986U priority Critical patent/JPH0129787Y2/ja
Publication of JPS62157149U publication Critical patent/JPS62157149U/ja
Application granted granted Critical
Publication of JPH0129787Y2 publication Critical patent/JPH0129787Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP4425986U 1986-03-26 1986-03-26 Expired JPH0129787Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4425986U JPH0129787Y2 (US06633600-20031014-M00021.png) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4425986U JPH0129787Y2 (US06633600-20031014-M00021.png) 1986-03-26 1986-03-26

Publications (2)

Publication Number Publication Date
JPS62157149U true JPS62157149U (US06633600-20031014-M00021.png) 1987-10-06
JPH0129787Y2 JPH0129787Y2 (US06633600-20031014-M00021.png) 1989-09-11

Family

ID=30861897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4425986U Expired JPH0129787Y2 (US06633600-20031014-M00021.png) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPH0129787Y2 (US06633600-20031014-M00021.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206315A (ja) * 2008-02-28 2009-09-10 Chugai Ro Co Ltd テーブルへの基板搭載装置
JP5279819B2 (ja) * 2008-03-25 2013-09-04 株式会社トクヤマ レンズの心出し装置を備えたコーティング装置及びコーティング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206315A (ja) * 2008-02-28 2009-09-10 Chugai Ro Co Ltd テーブルへの基板搭載装置
JP5279819B2 (ja) * 2008-03-25 2013-09-04 株式会社トクヤマ レンズの心出し装置を備えたコーティング装置及びコーティング方法

Also Published As

Publication number Publication date
JPH0129787Y2 (US06633600-20031014-M00021.png) 1989-09-11

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