JPS62157138U - - Google Patents
Info
- Publication number
- JPS62157138U JPS62157138U JP4562386U JP4562386U JPS62157138U JP S62157138 U JPS62157138 U JP S62157138U JP 4562386 U JP4562386 U JP 4562386U JP 4562386 U JP4562386 U JP 4562386U JP S62157138 U JPS62157138 U JP S62157138U
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- sample
- electrode
- gas supply
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001312 dry etching Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986045623U JPH0729631Y2 (ja) | 1986-03-27 | 1986-03-27 | ドライエッチング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986045623U JPH0729631Y2 (ja) | 1986-03-27 | 1986-03-27 | ドライエッチング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62157138U true JPS62157138U (fi) | 1987-10-06 |
JPH0729631Y2 JPH0729631Y2 (ja) | 1995-07-05 |
Family
ID=30864528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986045623U Expired - Lifetime JPH0729631Y2 (ja) | 1986-03-27 | 1986-03-27 | ドライエッチング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0729631Y2 (fi) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60206027A (ja) * | 1984-03-30 | 1985-10-17 | Hitachi Ltd | プラズマ処理装置 |
JPS6127334U (ja) * | 1984-07-24 | 1986-02-18 | 日本電気株式会社 | ドライエツチング装置 |
-
1986
- 1986-03-27 JP JP1986045623U patent/JPH0729631Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60206027A (ja) * | 1984-03-30 | 1985-10-17 | Hitachi Ltd | プラズマ処理装置 |
JPS6127334U (ja) * | 1984-07-24 | 1986-02-18 | 日本電気株式会社 | ドライエツチング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0729631Y2 (ja) | 1995-07-05 |