JPH0313733U - - Google Patents
Info
- Publication number
- JPH0313733U JPH0313733U JP7543789U JP7543789U JPH0313733U JP H0313733 U JPH0313733 U JP H0313733U JP 7543789 U JP7543789 U JP 7543789U JP 7543789 U JP7543789 U JP 7543789U JP H0313733 U JPH0313733 U JP H0313733U
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- etched
- reaction chamber
- excites
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7543789U JPH0313733U (fi) | 1989-06-26 | 1989-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7543789U JPH0313733U (fi) | 1989-06-26 | 1989-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313733U true JPH0313733U (fi) | 1991-02-12 |
Family
ID=31616014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7543789U Pending JPH0313733U (fi) | 1989-06-26 | 1989-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313733U (fi) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011072449A (ja) * | 2009-09-30 | 2011-04-14 | Shigekichi Asanuma | 水はけ食器 |
| JP2017092093A (ja) * | 2015-11-04 | 2017-05-25 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び基板保持部材 |
-
1989
- 1989-06-26 JP JP7543789U patent/JPH0313733U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011072449A (ja) * | 2009-09-30 | 2011-04-14 | Shigekichi Asanuma | 水はけ食器 |
| JP2017092093A (ja) * | 2015-11-04 | 2017-05-25 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び基板保持部材 |