JPS6215318B2 - - Google Patents

Info

Publication number
JPS6215318B2
JPS6215318B2 JP53051828A JP5182878A JPS6215318B2 JP S6215318 B2 JPS6215318 B2 JP S6215318B2 JP 53051828 A JP53051828 A JP 53051828A JP 5182878 A JP5182878 A JP 5182878A JP S6215318 B2 JPS6215318 B2 JP S6215318B2
Authority
JP
Japan
Prior art keywords
light
workpiece
processing
charged particle
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53051828A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54143743A (en
Inventor
Asaki Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP5182878A priority Critical patent/JPS54143743A/ja
Publication of JPS54143743A publication Critical patent/JPS54143743A/ja
Publication of JPS6215318B2 publication Critical patent/JPS6215318B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP5182878A 1978-04-29 1978-04-29 Adjustment of charge carrier beam working machine Granted JPS54143743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5182878A JPS54143743A (en) 1978-04-29 1978-04-29 Adjustment of charge carrier beam working machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5182878A JPS54143743A (en) 1978-04-29 1978-04-29 Adjustment of charge carrier beam working machine

Publications (2)

Publication Number Publication Date
JPS54143743A JPS54143743A (en) 1979-11-09
JPS6215318B2 true JPS6215318B2 (enrdf_load_stackoverflow) 1987-04-07

Family

ID=12897731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5182878A Granted JPS54143743A (en) 1978-04-29 1978-04-29 Adjustment of charge carrier beam working machine

Country Status (1)

Country Link
JP (1) JPS54143743A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102180U (enrdf_load_stackoverflow) * 1990-02-01 1991-10-24

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549904B2 (enrdf_load_stackoverflow) * 1973-03-16 1979-04-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102180U (enrdf_load_stackoverflow) * 1990-02-01 1991-10-24

Also Published As

Publication number Publication date
JPS54143743A (en) 1979-11-09

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