JPS62153091U - - Google Patents
Info
- Publication number
- JPS62153091U JPS62153091U JP4009986U JP4009986U JPS62153091U JP S62153091 U JPS62153091 U JP S62153091U JP 4009986 U JP4009986 U JP 4009986U JP 4009986 U JP4009986 U JP 4009986U JP S62153091 U JPS62153091 U JP S62153091U
- Authority
- JP
- Japan
- Prior art keywords
- sponge
- suction device
- attached
- suction
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4009986U JPS62153091U (ru) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4009986U JPS62153091U (ru) | 1986-03-19 | 1986-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62153091U true JPS62153091U (ru) | 1987-09-28 |
Family
ID=30853878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4009986U Pending JPS62153091U (ru) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153091U (ru) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360984A (ja) * | 1989-07-26 | 1991-03-15 | Matsushita Electric Works Ltd | 吸着移動装置 |
| JPH07314370A (ja) * | 1994-05-25 | 1995-12-05 | Ckd Corp | 真空チャック及び真空チャックにおける被吸着物の吸着方法 |
| JP2008251653A (ja) * | 2007-03-29 | 2008-10-16 | Sharp Corp | 低負荷搬送装置 |
| JP2009113159A (ja) * | 2007-11-07 | 2009-05-28 | Seiko Instruments Inc | チャック及び時計の製造方法 |
| JP2011181936A (ja) * | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |
| US8877613B2 (en) | 2002-07-22 | 2014-11-04 | Renesas Electronics Corporation | Method of manufacturing a semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4316175Y1 (ru) * | 1965-07-21 | 1968-07-05 |
-
1986
- 1986-03-19 JP JP4009986U patent/JPS62153091U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4316175Y1 (ru) * | 1965-07-21 | 1968-07-05 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360984A (ja) * | 1989-07-26 | 1991-03-15 | Matsushita Electric Works Ltd | 吸着移動装置 |
| JPH07314370A (ja) * | 1994-05-25 | 1995-12-05 | Ckd Corp | 真空チャック及び真空チャックにおける被吸着物の吸着方法 |
| US8877613B2 (en) | 2002-07-22 | 2014-11-04 | Renesas Electronics Corporation | Method of manufacturing a semiconductor device |
| US9805980B2 (en) | 2002-07-22 | 2017-10-31 | Renesas Electronics Corporation | Method of manufacturing a semiconductor device |
| JP2008251653A (ja) * | 2007-03-29 | 2008-10-16 | Sharp Corp | 低負荷搬送装置 |
| JP2009113159A (ja) * | 2007-11-07 | 2009-05-28 | Seiko Instruments Inc | チャック及び時計の製造方法 |
| JP2011181936A (ja) * | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |