JPS62152440U - - Google Patents
Info
- Publication number
- JPS62152440U JPS62152440U JP1986039778U JP3977886U JPS62152440U JP S62152440 U JPS62152440 U JP S62152440U JP 1986039778 U JP1986039778 U JP 1986039778U JP 3977886 U JP3977886 U JP 3977886U JP S62152440 U JPS62152440 U JP S62152440U
- Authority
- JP
- Japan
- Prior art keywords
- quartz container
- ultrasonic vibrator
- pure water
- semiconductor substrate
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039778U JPS62152440U (enExample) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039778U JPS62152440U (enExample) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62152440U true JPS62152440U (enExample) | 1987-09-28 |
Family
ID=30853267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986039778U Pending JPS62152440U (enExample) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152440U (enExample) |
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1986
- 1986-03-20 JP JP1986039778U patent/JPS62152440U/ja active Pending