JPS62151735U - - Google Patents

Info

Publication number
JPS62151735U
JPS62151735U JP3921386U JP3921386U JPS62151735U JP S62151735 U JPS62151735 U JP S62151735U JP 3921386 U JP3921386 U JP 3921386U JP 3921386 U JP3921386 U JP 3921386U JP S62151735 U JPS62151735 U JP S62151735U
Authority
JP
Japan
Prior art keywords
coating device
rotating part
receiving
flying
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3921386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3921386U priority Critical patent/JPS62151735U/ja
Publication of JPS62151735U publication Critical patent/JPS62151735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3921386U 1986-03-18 1986-03-18 Pending JPS62151735U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3921386U JPS62151735U (enExample) 1986-03-18 1986-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3921386U JPS62151735U (enExample) 1986-03-18 1986-03-18

Publications (1)

Publication Number Publication Date
JPS62151735U true JPS62151735U (enExample) 1987-09-26

Family

ID=30852178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3921386U Pending JPS62151735U (enExample) 1986-03-18 1986-03-18

Country Status (1)

Country Link
JP (1) JPS62151735U (enExample)

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