JPS6279578U - - Google Patents
Info
- Publication number
- JPS6279578U JPS6279578U JP1985170275U JP17027585U JPS6279578U JP S6279578 U JPS6279578 U JP S6279578U JP 1985170275 U JP1985170275 U JP 1985170275U JP 17027585 U JP17027585 U JP 17027585U JP S6279578 U JPS6279578 U JP S6279578U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- flat substrate
- scattering
- prevention wall
- scattering prevention
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985170275U JPS6279578U (enExample) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985170275U JPS6279578U (enExample) | 1985-11-05 | 1985-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6279578U true JPS6279578U (enExample) | 1987-05-21 |
Family
ID=31104855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985170275U Pending JPS6279578U (enExample) | 1985-11-05 | 1985-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6279578U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS525268A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Rotary coating device |
-
1985
- 1985-11-05 JP JP1985170275U patent/JPS6279578U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS525268A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Rotary coating device |