JPH02125326U - - Google Patents
Info
- Publication number
- JPH02125326U JPH02125326U JP1989033513U JP3351389U JPH02125326U JP H02125326 U JPH02125326 U JP H02125326U JP 1989033513 U JP1989033513 U JP 1989033513U JP 3351389 U JP3351389 U JP 3351389U JP H02125326 U JPH02125326 U JP H02125326U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- suctioned
- chuck
- wafer chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989033513U JPH02125326U (enExample) | 1989-03-23 | 1989-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989033513U JPH02125326U (enExample) | 1989-03-23 | 1989-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125326U true JPH02125326U (enExample) | 1990-10-16 |
Family
ID=31537228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989033513U Pending JPH02125326U (enExample) | 1989-03-23 | 1989-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125326U (enExample) |
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1989
- 1989-03-23 JP JP1989033513U patent/JPH02125326U/ja active Pending