JPS62147453U - - Google Patents
Info
- Publication number
- JPS62147453U JPS62147453U JP1986035615U JP3561586U JPS62147453U JP S62147453 U JPS62147453 U JP S62147453U JP 1986035615 U JP1986035615 U JP 1986035615U JP 3561586 U JP3561586 U JP 3561586U JP S62147453 U JPS62147453 U JP S62147453U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- substrate
- supply port
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986035615U JPS62147453U (xx) | 1986-03-11 | 1986-03-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986035615U JPS62147453U (xx) | 1986-03-11 | 1986-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62147453U true JPS62147453U (xx) | 1987-09-17 |
Family
ID=30845265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986035615U Pending JPS62147453U (xx) | 1986-03-11 | 1986-03-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62147453U (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243198A (ja) * | 1992-02-27 | 1993-09-21 | Nec Corp | 半導体素子剥離洗浄治具 |
-
1986
- 1986-03-11 JP JP1986035615U patent/JPS62147453U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243198A (ja) * | 1992-02-27 | 1993-09-21 | Nec Corp | 半導体素子剥離洗浄治具 |
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