JPS62147439U - - Google Patents

Info

Publication number
JPS62147439U
JPS62147439U JP3600386U JP3600386U JPS62147439U JP S62147439 U JPS62147439 U JP S62147439U JP 3600386 U JP3600386 U JP 3600386U JP 3600386 U JP3600386 U JP 3600386U JP S62147439 U JPS62147439 U JP S62147439U
Authority
JP
Japan
Prior art keywords
base plate
top surface
board holder
holes
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3600386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3600386U priority Critical patent/JPS62147439U/ja
Publication of JPS62147439U publication Critical patent/JPS62147439U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Jigs For Machine Tools (AREA)
JP3600386U 1986-03-12 1986-03-12 Pending JPS62147439U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3600386U JPS62147439U (enExample) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3600386U JPS62147439U (enExample) 1986-03-12 1986-03-12

Publications (1)

Publication Number Publication Date
JPS62147439U true JPS62147439U (enExample) 1987-09-17

Family

ID=30846010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3600386U Pending JPS62147439U (enExample) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPS62147439U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101113171B1 (ko) 2010-02-25 2012-02-15 김성진 흡착 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064875A (enExample) * 1973-09-05 1975-06-02
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5064875A (enExample) * 1973-09-05 1975-06-02
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101113171B1 (ko) 2010-02-25 2012-02-15 김성진 흡착 장치

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