JPS62147332U - - Google Patents
Info
- Publication number
- JPS62147332U JPS62147332U JP3525587U JP3525587U JPS62147332U JP S62147332 U JPS62147332 U JP S62147332U JP 3525587 U JP3525587 U JP 3525587U JP 3525587 U JP3525587 U JP 3525587U JP S62147332 U JPS62147332 U JP S62147332U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holder
- wafer
- container
- loading
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035255U JPS633155Y2 (https=) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035255U JPS633155Y2 (https=) | 1987-03-12 | 1987-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62147332U true JPS62147332U (https=) | 1987-09-17 |
| JPS633155Y2 JPS633155Y2 (https=) | 1988-01-26 |
Family
ID=30844578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987035255U Expired JPS633155Y2 (https=) | 1987-03-12 | 1987-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633155Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (https=) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (https=) * | 1989-09-21 | 1991-05-16 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351187A (en) * | 1976-10-20 | 1978-05-10 | Matsushita Electric Ind Co Ltd | Gas phase chemical evaporation apparatus |
-
1987
- 1987-03-12 JP JP1987035255U patent/JPS633155Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351187A (en) * | 1976-10-20 | 1978-05-10 | Matsushita Electric Ind Co Ltd | Gas phase chemical evaporation apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (https=) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (https=) * | 1989-09-21 | 1991-05-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS633155Y2 (https=) | 1988-01-26 |