JPS6214728U - - Google Patents

Info

Publication number
JPS6214728U
JPS6214728U JP10532585U JP10532585U JPS6214728U JP S6214728 U JPS6214728 U JP S6214728U JP 10532585 U JP10532585 U JP 10532585U JP 10532585 U JP10532585 U JP 10532585U JP S6214728 U JPS6214728 U JP S6214728U
Authority
JP
Japan
Prior art keywords
probe
substrate structure
tester
wafer prober
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10532585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10532585U priority Critical patent/JPS6214728U/ja
Publication of JPS6214728U publication Critical patent/JPS6214728U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10532585U 1985-07-10 1985-07-10 Pending JPS6214728U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10532585U JPS6214728U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10532585U JPS6214728U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Publications (1)

Publication Number Publication Date
JPS6214728U true JPS6214728U (enrdf_load_stackoverflow) 1987-01-29

Family

ID=30979648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10532585U Pending JPS6214728U (enrdf_load_stackoverflow) 1985-07-10 1985-07-10

Country Status (1)

Country Link
JP (1) JPS6214728U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190350A (ja) * 1987-02-02 1988-08-05 Tokyo Electron Ltd プロ−ブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63190350A (ja) * 1987-02-02 1988-08-05 Tokyo Electron Ltd プロ−ブ装置

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