JPS6214723U - - Google Patents
Info
- Publication number
- JPS6214723U JPS6214723U JP10621585U JP10621585U JPS6214723U JP S6214723 U JPS6214723 U JP S6214723U JP 10621585 U JP10621585 U JP 10621585U JP 10621585 U JP10621585 U JP 10621585U JP S6214723 U JPS6214723 U JP S6214723U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- core tube
- furnace core
- furnace
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10621585U JPH0143857Y2 (cs) | 1985-07-10 | 1985-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10621585U JPH0143857Y2 (cs) | 1985-07-10 | 1985-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6214723U true JPS6214723U (cs) | 1987-01-29 |
| JPH0143857Y2 JPH0143857Y2 (cs) | 1989-12-19 |
Family
ID=30981365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10621585U Expired JPH0143857Y2 (cs) | 1985-07-10 | 1985-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143857Y2 (cs) |
-
1985
- 1985-07-10 JP JP10621585U patent/JPH0143857Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143857Y2 (cs) | 1989-12-19 |