JPS62146591U - - Google Patents
Info
- Publication number
- JPS62146591U JPS62146591U JP3220486U JP3220486U JPS62146591U JP S62146591 U JPS62146591 U JP S62146591U JP 3220486 U JP3220486 U JP 3220486U JP 3220486 U JP3220486 U JP 3220486U JP S62146591 U JPS62146591 U JP S62146591U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- bearing
- positioning
- stage
- corner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 5
- 238000009966 trimming Methods 0.000 claims 1
Description
第１図は本考案の一実施例に係る載物台の側面
図、第２図は本考案の載物台の平面図、第３図は
従来の載物台の側面図である。
１：基台、２：基板、３，４：位置決めコーナ
ー、５，６：スプリング、７，８：クランパ、９
，１０，１１，１２，１３，１４：ベアリング。
FIG. 1 is a side view of a stage according to an embodiment of the present invention, FIG. 2 is a plan view of the stage of the present invention, and FIG. 3 is a side view of a conventional stage. 1: Base, 2: Board, 3, 4: Positioning corner, 5, 6: Spring, 7, 8: Clamper, 9
, 10, 11, 12, 13, 14: Bearing.
Claims (1)
と、該基板の位置決めクランプをする機構を持つ
載物台において、前記基板の位置決めをするベア
リング付きの位置決めコーナーと、この位置決め
コーナーへ前記基板を押し当て前記基板を固定す
るベアリング付クランパの各々の前記ベアリング
の外周にＶ字状の溝を切り込んだことを特徴とす
るレーザトリミング装置の載物台。 A stage having a base on which a substrate to be laser trimmed is placed, a positioning corner with a bearing for positioning the substrate, and a positioning corner with a bearing for positioning the substrate, and pressing the substrate against this positioning corner. A stage for a laser trimming device, characterized in that a V-shaped groove is cut into the outer periphery of each bearing of a clamper with a bearing that fixes the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3220486U JPS62146591U (en) | 1986-03-06 | 1986-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3220486U JPS62146591U (en) | 1986-03-06 | 1986-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62146591U true JPS62146591U (en) | 1987-09-16 |
Family
ID=30838658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3220486U Pending JPS62146591U (en) | 1986-03-06 | 1986-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62146591U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123389U (en) * | 1989-03-23 | 1990-10-11 |
-
1986
- 1986-03-06 JP JP3220486U patent/JPS62146591U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123389U (en) * | 1989-03-23 | 1990-10-11 |
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