JPS62145680A - Manufacture of sheathed ceramic heater - Google Patents
Manufacture of sheathed ceramic heaterInfo
- Publication number
- JPS62145680A JPS62145680A JP28557885A JP28557885A JPS62145680A JP S62145680 A JPS62145680 A JP S62145680A JP 28557885 A JP28557885 A JP 28557885A JP 28557885 A JP28557885 A JP 28557885A JP S62145680 A JPS62145680 A JP S62145680A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- ceramic heater
- conductive
- manufacture
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はシース型セラミックスヒータの製造方法に係り
、特にヒータ電極部形成に好適なシース型セラミックス
ヒータの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a method of manufacturing a sheath type ceramic heater, and particularly to a method of manufacturing a sheath type ceramic heater suitable for forming a heater electrode portion.
従来、導電体と絶縁性が一体となったセラミックスヒー
タの電極部は、導電体と絶縁体を積層した部分の切断部
を用いていた。しかし、積層体が全体の薄い場合や導電
体層の薄い場合は、電極部の面積が少ないため、電極部
への金属リード接合やメタライズが難しいこと、また、
光分な接合強度が得られない欠点があった。Conventionally, the electrode portion of a ceramic heater in which a conductor and an insulator are integrated has been made by cutting a portion where a conductor and an insulator are laminated. However, if the entire laminate is thin or the conductor layer is thin, the area of the electrode part is small, making it difficult to connect metal leads to the electrode part or metallize it.
There was a drawback that optical bonding strength could not be obtained.
なお、セラミックスヒータの一例が特開昭６０−６６０
１９号公報に示されている。An example of a ceramic heater is disclosed in Japanese Patent Application Laid-Open No. 60-660.
This is shown in Publication No. 19.
本発明の目的は、シース型セラミックスヒータの電極部
形成方法を提供することにある。An object of the present invention is to provide a method for forming an electrode portion of a sheath type ceramic heater.
本発明は、絶縁性セラミックス粉末をグリーンシートに
した場合容易に穴明は加工が可能なこと、また導電性セ
ラミックス粉末をペースト状にした場合、流動性に容む
ことに着目し、絶縁性セラミックスへ電極部用の穴を明
け、そこへ導電性セラミックス粉末のペースト状を流し
込みシース型セラミックスの電極部を形成するものであ
る。The present invention focuses on the fact that when insulating ceramic powder is made into a green sheet, holes can be easily processed, and when conductive ceramic powder is made into a paste form, it can be fluidized. A hole for an electrode part is made in the hole, and a paste of conductive ceramic powder is poured into the hole to form a sheath-type ceramic electrode part.
以下、本発明の方法を用いて実施する一実施例上第１因
、第２図、第３図により説明する。絶縁性セラミックス
粉末をグリーンシート１及び２にして、第１図に示すよ
うにグリーンシート２の面に導電性セラミックス印刷体
３を形成する。クリーンシート１には、電極の所望の位
置へ、レーザク、打抜キパンチ、カッター等で穴を明け
、グリーンシート２へ導電性セラミックス印刷体をはさ
むように重ねる。第２図に示すように導電性セラミック
ス粉末ペーストラ、電極形成用に設けた絶縁性セラミッ
クスのグリーンシート１の穴明は部へ流し込む。導電性
セラミックス粉末はペースト状にすることで、成形体と
した時の欠点であった空孔等発生することなく、まんべ
んなく流れ込ませることができる。このようにして組立
てられたセラミックス粉末体（第２図）は、ホットプレ
ス等によシ焼結し、第３図のごとく、絶縁性セラミック
ス焼結体５へ電極部のみ露出させ、導電性セラミックス
焼結体６を埋設させることが可能となる。絶縁性及び導
電性セラミックスとしては種々考えられるが、絶縁性セ
ラミックスとしてＡｔＮ＋ＢＮ及び導電性セラミックス
としてＳｉＣ＋ＺｒＢ２が好適である。Hereinafter, an example of implementing the method of the present invention will be explained with reference to the first factor, FIG. 2, and FIG. 3. Insulating ceramic powder is used as green sheets 1 and 2, and a conductive ceramic printed body 3 is formed on the surface of the green sheet 2 as shown in FIG. A hole is made in the clean sheet 1 at the desired position of the electrode using a laser cutter, a punch, a cutter, etc., and the conductive ceramic printed body is stacked on the green sheet 2 so as to be sandwiched therebetween. As shown in FIG. 2, a conductive ceramic powder paste is poured into the holes of an insulating ceramic green sheet 1 provided for electrode formation. By making the conductive ceramic powder into a paste form, it can be evenly poured into the powder without forming voids, which is a drawback when it is made into a molded product. The ceramic powder body (Fig. 2) assembled in this way is sintered by hot pressing or the like, and as shown in Fig. 3, only the electrode part is exposed to the insulating ceramic sintered body 5, and the conductive ceramic powder is It becomes possible to embed the sintered body 6. Although various insulating and conductive ceramics are possible, AtN+BN is suitable as the insulating ceramic and SiC+ZrB2 is suitable as the conductive ceramic.
本発明によれば、電極部に空孔等の欠陥を発生すること
なく良好な電極が形成でき、かつセラミックス粉末体の
形成が容易なため量産に適するシース型セラミックスの
製造方法全提供することができる。According to the present invention, a good electrode can be formed without generating defects such as holes in the electrode part, and a ceramic powder body can be easily formed, so that it is possible to provide an entire method for manufacturing sheath type ceramics that is suitable for mass production. can.
第１図は本発明の方法を用いた一実施例のグリーンシー
ト積層断面図、第２図は同じくペーストを流し込んだ断
面図、第３図は同じく焼成後断面図である。
１・・・絶縁性セラミックスのグリーンシート、２・・
・絶縁性セラミックスのグリーンシート、３・・・導電
性セラミックス印刷体、４・・・導電性セラミックス粉
末ペースト、５・・・絶縁性セラミツ冬ス焼結体、６・
・・導電性セラミックス焼結体。 ′
）＼・ｌ −″FIG. 1 is a cross-sectional view of a stacked green sheet according to an embodiment using the method of the present invention, FIG. 2 is a cross-sectional view after pouring the paste, and FIG. 3 is a cross-sectional view after firing. 1... Insulating ceramic green sheet, 2...
- Insulating ceramic green sheet, 3... Conductive ceramic printed body, 4... Conductive ceramic powder paste, 5... Insulating ceramic winter sintered body, 6.
...Conductive ceramic sintered body. ′
)\・l −″
Claims (1)
発熱回路を埋設させたシース型セラミックスヒータにお
いて、セラミックスの焼成前に絶縁性セラミックスの一
部もしくは複数部に穴を明け、導電性セラミックスの粉
末をペースト状にしたものを流し込み、焼成させること
を特徴とするシース型セラミックスヒータの製造方法。1. In a sheath type ceramic heater in which a heating circuit made of conductive ceramic is embedded inside the insulating ceramic, a hole is made in one or more parts of the insulating ceramic before firing the ceramic, and conductive ceramic powder is pasted. A method for manufacturing a sheath type ceramic heater, which is characterized by pouring a shaped ceramic heater and firing it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28557885A JPS62145680A (en) | 1985-12-20 | 1985-12-20 | Manufacture of sheathed ceramic heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28557885A JPS62145680A (en) | 1985-12-20 | 1985-12-20 | Manufacture of sheathed ceramic heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62145680A true JPS62145680A (en) | 1987-06-29 |
Family
ID=17693368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28557885A Pending JPS62145680A (en) | 1985-12-20 | 1985-12-20 | Manufacture of sheathed ceramic heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62145680A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04370690A (en) * | 1991-06-19 | 1992-12-24 | Ngk Spark Plug Co Ltd | Ceramic heater |
-
1985
- 1985-12-20 JP JP28557885A patent/JPS62145680A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04370690A (en) * | 1991-06-19 | 1992-12-24 | Ngk Spark Plug Co Ltd | Ceramic heater |
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