JPS62145334U - - Google Patents
Info
- Publication number
- JPS62145334U JPS62145334U JP3447286U JP3447286U JPS62145334U JP S62145334 U JPS62145334 U JP S62145334U JP 3447286 U JP3447286 U JP 3447286U JP 3447286 U JP3447286 U JP 3447286U JP S62145334 U JPS62145334 U JP S62145334U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- workpiece
- processing apparatus
- sent
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3447286U JPS62145334U (ru) | 1986-03-08 | 1986-03-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3447286U JPS62145334U (ru) | 1986-03-08 | 1986-03-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62145334U true JPS62145334U (ru) | 1987-09-12 |
Family
ID=30843058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3447286U Pending JPS62145334U (ru) | 1986-03-08 | 1986-03-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62145334U (ru) |
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1986
- 1986-03-08 JP JP3447286U patent/JPS62145334U/ja active Pending