JPH01140822U - - Google Patents
Info
- Publication number
- JPH01140822U JPH01140822U JP3727588U JP3727588U JPH01140822U JP H01140822 U JPH01140822 U JP H01140822U JP 3727588 U JP3727588 U JP 3727588U JP 3727588 U JP3727588 U JP 3727588U JP H01140822 U JPH01140822 U JP H01140822U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- dry etching
- peripheral edge
- lower electrode
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3727588U JPH01140822U (ru) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3727588U JPH01140822U (ru) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140822U true JPH01140822U (ru) | 1989-09-27 |
Family
ID=31263856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3727588U Pending JPH01140822U (ru) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140822U (ru) |
-
1988
- 1988-03-22 JP JP3727588U patent/JPH01140822U/ja active Pending