JPS62142843U - - Google Patents
Info
- Publication number
- JPS62142843U JPS62142843U JP3005786U JP3005786U JPS62142843U JP S62142843 U JPS62142843 U JP S62142843U JP 3005786 U JP3005786 U JP 3005786U JP 3005786 U JP3005786 U JP 3005786U JP S62142843 U JPS62142843 U JP S62142843U
- Authority
- JP
- Japan
- Prior art keywords
- isopropyl alcohol
- treatment tank
- contacts
- alcohol
- stainless steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- -1 Polytetrafluoroethylene Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005786U JPS62142843U (enrdf_load_stackoverflow) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005786U JPS62142843U (enrdf_load_stackoverflow) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142843U true JPS62142843U (enrdf_load_stackoverflow) | 1987-09-09 |
Family
ID=30834518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3005786U Pending JPS62142843U (enrdf_load_stackoverflow) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142843U (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59117126A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | ベ−パ乾燥機 |
| JPS6069531A (ja) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | 半導体薄膜の分解装置 |
| JPS62195126A (ja) * | 1986-02-21 | 1987-08-27 | Hitachi Tokyo Electron Co Ltd | 処理装置 |
-
1986
- 1986-03-04 JP JP3005786U patent/JPS62142843U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59117126A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | ベ−パ乾燥機 |
| JPS6069531A (ja) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | 半導体薄膜の分解装置 |
| JPS62195126A (ja) * | 1986-02-21 | 1987-08-27 | Hitachi Tokyo Electron Co Ltd | 処理装置 |