JPS62142389A - Copper foil for printed circuit and manufacture of the same - Google Patents

Copper foil for printed circuit and manufacture of the same

Info

Publication number
JPS62142389A
JPS62142389A JP60284774A JP28477485A JPS62142389A JP S62142389 A JPS62142389 A JP S62142389A JP 60284774 A JP60284774 A JP 60284774A JP 28477485 A JP28477485 A JP 28477485A JP S62142389 A JPS62142389 A JP S62142389A
Authority
JP
Japan
Prior art keywords
copper foil
nickel
layer
molybdenum
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60284774A
Other languages
Japanese (ja)
Other versions
JPH0426794B2 (en
Inventor
正人 高見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukuda Metal Foil and Powder Co Ltd
Original Assignee
Fukuda Metal Foil and Powder Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukuda Metal Foil and Powder Co Ltd filed Critical Fukuda Metal Foil and Powder Co Ltd
Priority to JP60284774A priority Critical patent/JPS62142389A/en
Publication of JPS62142389A publication Critical patent/JPS62142389A/en
Publication of JPH0426794B2 publication Critical patent/JPH0426794B2/ja
Granted legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Conductive Materials (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 木発廚は印刷回路用銅箔、さらに詳しくは、あらゆるエ
ツチング液に可溶、特にアルカリエツチング液に対して
も可溶であり、エツチングにおいてアンダーカッティン
グを生じず、エツチング後基板面の耐ブラウントランス
ファー性があり、しかも耐薬品性、耐熱性に優れる高密
度配線に適した印刷回路用銅箔に関するものである。
[Detailed Description of the Invention] [Industrial Field of Application] Wood powder is used for copper foil for printed circuits, more specifically, it is soluble in all types of etching solutions, especially soluble in alkaline etching solutions, and is effective in etching. The present invention relates to a copper foil for printed circuits that does not cause undercutting, has brown transfer resistance on the substrate surface after etching, and has excellent chemical resistance and heat resistance, and is suitable for high-density wiring.

〔従来の技術〕[Conventional technology]

印刷回路板は銅箔を合成樹脂含浸基材に積層し、高温加
熱圧着後、回路を印刷して不要部分をエツチング除去し
て製造するいわゆるサブトラクティブ法が主流である。
The mainstream method for producing printed circuit boards is the so-called subtractive method, in which copper foil is laminated on a synthetic resin-impregnated base material, heat-pressed at high temperatures, circuits are printed, and unnecessary portions are removed by etching.

印刷回路板は半導体、電子機器の発展とともに電子部品
の一つとして、その地位を固め、急速に高密度化してい
る。導体幅及び環体間隔は狭小化の一途をたどり、使用
される銅箔に対しても基(オとの接着性はもとより、エ
ツチング性(あらゆるエツチング液に溶けるという汎用
性、及びアンダーカッティングのないこと)、エツチン
グ後の外観(耐ブラウントランスファー性)、絶縁性、
製造工程中あるいは製品となった後の耐薬品性(耐酸性
、耐アルカリ性、耐メツキ液性、耐溶剤性)、耐熱性な
どの要求はますます厳しいものになっている。
With the development of semiconductors and electronic equipment, printed circuit boards have solidified their position as one of the electronic components and are rapidly becoming denser. The conductor width and ring spacing continue to become narrower, and the copper foil used also has improved adhesion to the substrate (O), etching resistance (versatility of being soluble in all etching solutions, and no undercutting). ), appearance after etching (brown transfer resistance), insulation properties,
Requirements for chemical resistance (acid resistance, alkali resistance, plating liquid resistance, solvent resistance), heat resistance, etc. during the manufacturing process or after the product is made are becoming increasingly strict.

ここでいうアンダーカッティングとは回路をエツチング
で形成した時の、特に基板と銅箔の接着面近傍のアンダ
ーカッティングをI旨し、またブラウントランスファー
とはガラスエポキシ基材を用いた印刷回路で生じるエツ
チング基板の着色、変色、汚れをいう。
Undercutting here refers to undercutting when a circuit is formed by etching, especially near the bonding surface between the board and copper foil, and brown transfer refers to the etching that occurs in printed circuits using glass epoxy base materials. Refers to discoloration, discoloration, and dirt on the board.

印刷回路用銅箔は通常、以下のごとく製造される。まず
基本となる銅箔として、銅イオンを含む電解浴中で陰極
電解して得られる電解銅箔、そして他に圧延銅箔があり
、これらの基本銅箔の表面上に樹脂との投錨的接着性を
向上させる為に粒状鋼や樹枝状鋼等を電気分解により設
ける。次ぎにその表面上に、接着する樹脂との非反応の
特性を得る為に、異種金属あるいは銅との合金の被覆バ
リヤーを施すか、あるいはまた種々の防錆処理などが施
こされている。
Copper foil for printed circuits is typically manufactured as follows. First, as basic copper foils, there are electrolytic copper foils obtained by cathodic electrolysis in an electrolytic bath containing copper ions, and rolled copper foils. In order to improve the properties, granular steel, dendritic steel, etc. are provided by electrolysis. Next, in order to obtain a non-reactive property with the adhesive resin, a barrier coating of a different metal or an alloy with copper is applied to the surface, or various anti-corrosion treatments are applied.

例えば特許公報昭51−35711号には銅箔面に亜鉛
、インジウム、黄銅などからなる群より選ばれた層を被
覆すること、特許公報昭53−39376号には2層か
らなる電着銅層を設け、さらに接着すべき基材に対して
化学的活性を有しない金属からなる層、例えば亜鉛、真
鍮、ニッケル、コバルト、クロム、カドミウム、錫、及
び青銅などの層を被覆すること、また公表特許公報昭5
8−500149号には球状または樹枝状の亜鉛を沈着
させ、かつこの層を銅、砒素、ビスマス、真鍮、青銅、
ニッケル、コバルトもしくは亜鉛の一つ以上またはその
合金の被覆をすること、さらに、公開特許公f1356
−155593号にはニッケル鍍金層上にクロメートの
陰極電解処理を施すことなどが提案されている。
For example, Patent Publication No. 51-35711 describes coating a copper foil surface with a layer selected from the group consisting of zinc, indium, brass, etc., and Patent Publication No. 53-39376 discloses a two-layer electrodeposited copper layer. and further coated with a layer of a metal that is not chemically active on the substrate to be bonded, such as zinc, brass, nickel, cobalt, chromium, cadmium, tin, and bronze; Patent Publication Showa 5
No. 8-500149 deposits spherical or dendritic zinc, and this layer is coated with copper, arsenic, bismuth, brass, bronze,
coating with one or more of nickel, cobalt or zinc or an alloy thereof;
No. 155593 proposes applying chromate cathode electrolytic treatment on a nickel plating layer.

しかしながら、従来の被覆バリヤ一層に関しては以下に
示すような問題点がある。
However, there are problems with conventional single-layer coated barriers as shown below.

亜鉛、真鍮、亜鉛−ニッケル等、亜鉛を主とする層を有
する銅箔を印刷回路板に適用した場合、銅箔と基材との
接着面およびその近傍は、耐塩酸性が非常に低く、印刷
回路板製造工程において、酸洗や各種活性処理液中に浸
漬されているうちに、その界面部分の腐食抵抗が弱いた
め、ビール強度の劣化が生じ、特に最近の導体幅の狭い
回路の場合、熱的衝撃あるいは機械的衝撃などにより、
導体の剥離、脱落現象を起こす可能性があるという欠点
がある。また、塩化第二鋼玉・7チングなどでは、やは
りmf/liと基材の接着面が弱いためアンダーカッテ
ィングを生しるという欠点を有している。
When a copper foil with a layer mainly made of zinc, such as zinc, brass, or zinc-nickel, is applied to a printed circuit board, the adhesive surface between the copper foil and the base material and its vicinity have very low hydrochloric acid resistance, and the printing During the circuit board manufacturing process, when the circuit board is pickled or immersed in various activation treatment solutions, the corrosion resistance at the interface is weak, resulting in a deterioration in beer strength, especially in the case of recent circuits with narrow conductor widths. Due to thermal shock or mechanical shock,
There is a drawback that the conductor may peel off or fall off. In addition, chlorinated corundum/7-ching and the like have the disadvantage of causing undercutting because the adhesive surface between mf/li and the base material is weak.

ニッケルは耐薬品性、耐熱性に優れ、−11によく使用
される塩化第二鉄や塩化第二銅のエツチング液には可溶
であるものの、最近よ(使用されるようになったアルカ
リエツチング液には不溶であり、電気絶縁性を損なうエ
ツチング残(スティン)を生しるという重大な欠点を存
している。また、ニッケル鍍金層上にクロメート陰極電
解処理を施すことにより、過硫酸アンモニウムエンチン
グ液に可?容となるものの、アルカリエツチング液には
不溶であってスティンを生じる。
Nickel has excellent chemical and heat resistance, and is soluble in the ferric chloride and cupric chloride etching solutions commonly used for It has the serious disadvantage of being insoluble in liquids and producing etching residue (stain) that impairs electrical insulation.Also, by applying chromate cathode electrolytic treatment on the nickel plating layer, ammonium persulfate etching Although it is soluble in etching solutions, it is insoluble in alkaline etching solutions and causes staining.

そのイ由、i易、クロム、ビスマスもアルカリエツチン
グ液には不溶であること、コバルトはアルカリエツチン
グ液に可溶であるが耐薬品性に問題があること、インジ
ウムは高価であること、真鍮、青銅鍍金ではシアン浴が
使用されるが公害上問題であること、砒素、カドミウム
なども毒性の点で敬遠されることなど、それぞれ欠点を
有しており、従来より提案されている樹脂に対する非反
応性に着目するだけでは印刷回路板の急速な高密度化や
多様な要求に対して、十分満足出来ない。
The reasons for this are that chromium and bismuth are also insoluble in alkaline etching solutions, cobalt is soluble in alkaline etching solutions but has problems with chemical resistance, indium is expensive, brass, Cyanide baths are used in bronze plating, but they each have their own drawbacks, such as the problem of pollution, and arsenic and cadmium are also avoided due to their toxicity. Merely focusing on performance cannot fully satisfy the rapidly increasing density and diverse demands of printed circuit boards.

〔本発明が解決しようとする問題点〕[Problems to be solved by the present invention]

そこで、印刷回路用銅箔として従来技術の問題点を全て
解決するため、即ち各種エツチング液、特にアルカリエ
ツチング液にも可溶でを害なスティンを生じず、エツチ
ングによるアンダーカッティングもなく、エツチング後
基板面に耐ブラウントランスファー性があり、しかも回
路形成後の耐薬品性、耐熱性に優れるような銅箔のバリ
ヤ一層について種々研究を重ねた結果、本発明を完成し
たものである。
Therefore, in order to solve all the problems of the conventional technology as a copper foil for printed circuits, it is soluble in various etching solutions, especially alkaline etching solutions, does not cause harmful streaks, does not cause undercutting due to etching, and is easy to use after etching. The present invention was completed as a result of various research into a copper foil barrier layer that has Brownian transfer resistance on the substrate surface and also has excellent chemical resistance and heat resistance after circuit formation.

〔問題点を解決するための手段〕[Means for solving problems]

即ち、本発明は銅箔の少なくとも一方の面に、モリブデ
ンを含むニッケル層を存し、必要に応して該ニッケル−
モリブデン層表面上にクロメート処理層を形成させるこ
とを特徴とする印刷回路用銅箔、及び、ニッケル及びモ
リブデンのイオンとクエン酸あるいは酒石酸の一種以上
を含む電解浴を用い、該電解浴中で銅箔を陰極電解しニ
ッケル−モリブデン層を形成させた後、該層上にクロメ
ート処理層を設けることを特徴とする印刷回路用銅箔の
製造方法である。
That is, the present invention has a nickel layer containing molybdenum on at least one surface of the copper foil, and if necessary, the nickel layer contains molybdenum.
A copper foil for printed circuits is characterized in that a chromate treatment layer is formed on the surface of the molybdenum layer, and an electrolytic bath containing nickel and molybdenum ions and one or more of citric acid or tartaric acid is used. This is a method for manufacturing a copper foil for printed circuits, characterized in that after cathodic electrolyzing the foil to form a nickel-molybdenum layer, a chromate treatment layer is provided on the layer.

〔作用〕[Effect]

本発明のモリブデン含有ニッケル層の厚さは0.001
= 0.5.crm(約0.1〜50 mg/dm”)
 、好ましくは0.005〜0.2μm(約0.5〜2
0mg/dm ” )程度が良い。0.001μm以下
の場合本発明のバリヤー効果を十分発揮できず、一方0
.5μm以上の場合は銅箔の純度が下がり、電気伝導度
が低下する。またバリヤ一層のコスト比率が高くなり不
経済である。
The thickness of the molybdenum-containing nickel layer of the present invention is 0.001
= 0.5. crm (approximately 0.1 to 50 mg/dm”)
, preferably 0.005 to 0.2 μm (approximately 0.5 to 2
If it is less than 0.001 μm, the barrier effect of the present invention cannot be fully exhibited;
.. When the thickness is 5 μm or more, the purity of the copper foil decreases and the electrical conductivity decreases. Moreover, the cost ratio of the barrier increases, making it uneconomical.

本発明のニッケル−モリブデン層中モリブデン含有量は
21w(%以上、さらに好ましくは27−t%以上であ
る。21wt%以下の場合、アルカリエツチング液に不
溶であるばかりか、過硫酸アンモニウムエツチング液お
よび塩化第二銅エツチング液に対しても難溶かあるいは
不溶である。塩化第二鉄エツチング液に対しては、全て
可溶であった。またモリブデン含有量が21〜27−t
%の場合、ニッケル−モリブデン層の不均一性があると
き、アルカリエツチングに対して不溶となることがある
ため、27−t%以上がさらに好ましい。
The molybdenum content in the nickel-molybdenum layer of the present invention is 21 w% or more, more preferably 27-t% or more. If it is less than 21 wt%, it is not only insoluble in alkaline etching solutions but also in ammonium persulfate etching solutions and chloride. They are sparingly soluble or insoluble even in cupric etching solutions.They are all soluble in ferric chloride etching solutions.Moreover, the molybdenum content is 21 to 27-t.
%, if the nickel-molybdenum layer is non-uniform, it may become insoluble in alkali etching, so it is more preferably 27-t% or more.

本発明のニッケル−モリブデン層を銅箔表面上に形成さ
せる方法は、公知の電気鍍金法、化学鍍金法、真空蒸着
法、スパッタリング法など各種の方法によって可能であ
るが、工業上実ラインに最適と思われるものは水溶液電
気鍍金法である。その電解浴として、酸性クエン酸浴、
アンモニアアルカリクエン酸浴、アンモニアアルカリ酒
石酸浴などが好ましい。
The nickel-molybdenum layer of the present invention can be formed on the surface of copper foil by various known methods such as electroplating, chemical plating, vacuum evaporation, and sputtering, but the method is most suitable for industrial production lines. What seems to be the aqueous solution electroplating method. As the electrolytic bath, acidic citric acid bath,
An ammonia-alkali citric acid bath, an ammonia-alkali tartaric acid bath, etc. are preferred.

例えばアンモニアアルカリクエン酸浴について述べれば
、ニッケルイオン源として硫酸ニッケル、モリブデンイ
オン源としてモリブデン酸のナトリウム、カリウム、ア
ンモニウム塩、クエン酸としてクエン酸、クエン酸のナ
トリウム、カリウム、アンモニウム塩が好ましい。これ
らにアンモニアを添加してアルカリ性とする。モリブデ
ンは鉄族金属に対して誘導析出型でありニッケルイオン
が存在しないと析出しない。本発明のバリヤ一層では比
較的モリブデンの含有量が多いことを必要とするため、
電解浴中のモリブデンイオン量はニッケルイオン量より
かなり多くした方が良い。モリブデンイオン量は全金属
イオン量に対しておよそ60〜70−t%以上が好まし
い。浴温はアンモニアの飛散防止、またコストの面から
30℃前後が良い。
For example, regarding an ammonia-alkali citric acid bath, nickel sulfate is preferred as the nickel ion source, sodium, potassium, or ammonium salts of molybdate are preferred as the molybdenum ion source, and citric acid or sodium, potassium, or ammonium salts of citric acid are preferred as the citric acid. Ammonia is added to these to make them alkaline. Molybdenum is an induced precipitation type for iron group metals and does not precipitate in the absence of nickel ions. Since the single barrier layer of the present invention requires a relatively high content of molybdenum,
It is better to make the amount of molybdenum ions in the electrolytic bath considerably larger than the amount of nickel ions. The amount of molybdenum ions is preferably approximately 60 to 70-t% or more based on the total amount of metal ions. The bath temperature is preferably around 30°C to prevent ammonia from scattering and to reduce costs.

電流密度は1〜20 A/dm2の広範囲で適用可能で
ある。また陽極は不溶性陽極、ニッケル−モリブデン合
金、あるいはニッケルを使用する。
The current density can be applied over a wide range of 1 to 20 A/dm2. Further, an insoluble anode, a nickel-molybdenum alloy, or nickel is used as the anode.

以上の条件でニッケル−モリブデン層を粗面化された銅
箔に電着させた後、一般によく使用されるクロメート処
理を施すと、基材との接着性が増し、耐ブラウントラン
スファー性も向上し、また防食性も高められる。クロメ
ート処理はクロム酸、重クロム酸塩などの6価のクロム
化合物を含む水/8液中に浸漬するか、あるいは陰極電
解しても良い。
After electrodepositing a nickel-molybdenum layer on a roughened copper foil under the above conditions, applying the commonly used chromate treatment increases adhesion to the substrate and improves brown transfer resistance. , corrosion resistance can also be improved. The chromate treatment may be performed by immersion in a water/8 solution containing a hexavalent chromium compound such as chromic acid or dichromate, or by cathodic electrolysis.

〔実施例〕〔Example〕

以下本発明の実施例を示す。 Examples of the present invention will be shown below.

実施例(1) あらかじめ電解粗面化した35μ電解銅箔を用意し、表
1にも示すように、 硫酸ニッケル(6水塩)       30g/(!モ
リブデン酸ナトリウム(2水塩)70g/lクエン酸三
ナトリウム(2水塩)   50g/βPH(アンモニ
アで調整)      10.5陽極        
      白金としこの浴において銅7nを30℃、
電流宝度8A/dm2、電解時間10秒間陰極電解した
。この銅箔を水洗後乾燥させた。この銅箔をFR−4グ
レートのエポキシ樹脂含浸ガラス基材に積層し、成型し
て銅張積層板の各特性試験を行い、その結果を表2に示
す。またこの銅箔に形成されたニッケル−モリブデン層
の厚さは5.0mH/dm”、モリブデン含有量は原子
吸光分析により求め、38w t%を得た。
Example (1) A 35μ electrolytic copper foil that had been electrolytically roughened in advance was prepared, and as shown in Table 1, nickel sulfate (hexahydrate) 30g/(! Sodium molybdate (dihydrate) 70g/l citric acid Trisodium acid (dihydrate) 50g/βPH (adjusted with ammonia) 10.5 anode
7n of copper at 30°C in a platinum and toshiko bath.
Cathodic electrolysis was performed at a current density of 8 A/dm2 and an electrolysis time of 10 seconds. This copper foil was washed with water and then dried. This copper foil was laminated on an epoxy resin-impregnated glass substrate of FR-4 grade, molded, and various characteristic tests of the copper-clad laminate were conducted, and the results are shown in Table 2. The thickness of the nickel-molybdenum layer formed on this copper foil was 5.0 mH/dm'', and the molybdenum content was determined by atomic absorption spectrometry to be 38 wt%.

実施例(2) あらかじめ電解粗面化した35μ電解銅箔表面上に実施
例(1)と同じ浴組成、電解条件でニッケル−モリブデ
ン層を形成させ、水洗し次ぎに重クロム酸す) リウム
log/ N水溶液中に10秒間浸漬後、水洗、乾燥さ
せた。この銅箔をFR−4グレードのエポキシ樹脂含浸
ガラス基材に積層し、成型して銅張積層板の各特性試験
を行い、その結果を表2に示す。
Example (2) A nickel-molybdenum layer was formed on the surface of a 35μ electrolytic copper foil, which had been electrolytically roughened in advance, under the same bath composition and electrolytic conditions as in Example (1), washed with water, and then dichromated. /N aqueous solution for 10 seconds, washed with water, and dried. This copper foil was laminated onto a FR-4 grade epoxy resin-impregnated glass base material, molded, and subjected to various characteristic tests of the copper-clad laminate. The results are shown in Table 2.

実施例(3) あらかじめ電解粗面化した35μ電解銅箔を用意し、 硫酸ニッケル(6水塩)       30g/(1モ
リブデン酸ナトリウム(2水塩) 100 g/βクエ
ン酸三ナトリウム(2水塩)   50g/1lPH(
アンモニアで調整)      10.5陽極    
          白金この浴において銅箔を30°
C,電流密度10A/dm2、電解時間10秒間陰極電
解した。この銅箔を水洗後乾燥させた。この銅箔をFR
−4グレードのエポキシ樹脂含浸ガラス基材に積層し、
成型して銅張積層板の各特性試験を行い、その結果を表
2に示す。またこの1iil fiに形成されたニッケ
ル−モリブデン層の厚さは5.4mg/dm” 、モリ
ブデン含有量は原子吸光分析により求め、41wt%を
得た。
Example (3) A 35μ electrolytic copper foil whose surface had been electrolytically roughened in advance was prepared, and nickel sulfate (hexahydrate) 30 g/(mono-sodium molybdate (dihydrate) 100 g/β trisodium citrate (dihydrate) ) 50g/1lPH (
Adjusted with ammonia) 10.5 anode
Copper foil at 30° in this platinum bath
C, cathode electrolysis was performed at a current density of 10 A/dm2 and an electrolysis time of 10 seconds. This copper foil was washed with water and then dried. FR this copper foil
-Laminated on 4 grade epoxy resin impregnated glass substrate,
The molded copper-clad laminate was subjected to various characteristic tests, and the results are shown in Table 2. The thickness of the nickel-molybdenum layer formed on this 1iil fi was 5.4 mg/dm'', and the molybdenum content was determined by atomic absorption spectrometry to be 41 wt%.

実施例(4) あらかじめ電解粗面化した35μ電解銅箔表面上に実施
例(3)と同じ浴組成、電解条件でニッケル−モリブデ
ン層を形成させ、水洗し次ぎに重クロム酸ナトリウムl
og/ 1.水溶液中に10秒間浸漬後、水洗、乾燥さ
せた。この銅箔をFR−4グレードのエポキシ樹脂含浸
ガラス基材に積層し、成型して銅張積層板の各特性試験
を行い、その結果を表2に示す。
Example (4) A nickel-molybdenum layer was formed on the surface of a 35μ electrolytic copper foil, which had been electrolytically roughened in advance, under the same bath composition and electrolytic conditions as in Example (3), washed with water, and then treated with sodium dichromate l.
og/1. After being immersed in an aqueous solution for 10 seconds, it was washed with water and dried. This copper foil was laminated onto a FR-4 grade epoxy resin-impregnated glass base material, molded, and subjected to various characteristic tests of the copper-clad laminate. The results are shown in Table 2.

実施例(5)〜0ω あらかじめ電解粗面化した35μ電解銅箔表面上に、ク
エン酸三ナトリウム(2水塩) 50g/β、PH(ア
ンモニアで調整) 10.5、浴温30℃とし、硫酸ニ
ッケル(6水塩)、モリブデン酸ナトリウム(2水塩)
、電流密度、電解時間の組合せを表1の実施例(5)〜
00)の欄に示すように種々変化させ、ニッケル−モリ
ブデン層を形成させた後、水洗し次ぎに重クロム酸ナト
リウムlOg/ j2水溶液中に10秒間浸漬後、水洗
、乾燥させた。この銅箔をFR−4グレードのエポキシ
樹脂含浸ガラス基材に積層し、成型して銅張積層板の各
特性試験を行い、その結果を表2に示す。
Example (5) - 0ω On the surface of a 35μ electrolytic copper foil that had been electrolytically roughened in advance, trisodium citrate (dihydrate) was applied at 50 g/β, pH (adjusted with ammonia) was set at 10.5, and the bath temperature was set at 30°C. Nickel sulfate (hexahydrate), sodium molybdate (dihydrate)
, current density, and electrolysis time according to Examples (5) to Table 1.
After forming a nickel-molybdenum layer by making various changes as shown in column 00), it was washed with water, then immersed in an aqueous solution of sodium dichromate lOg/j2 for 10 seconds, washed with water, and dried. This copper foil was laminated onto a FR-4 grade epoxy resin-impregnated glass base material, molded, and subjected to various characteristic tests of the copper-clad laminate. The results are shown in Table 2.

実施例(11) あらかじめ電解粗面化した35μ電解銅箔を用意し、 硫酸ニッケル(6水塩)       17g/2モリ
ブデン酸ナトリウム(2水塩)30ロノセル塩    
       200g#!PI−1(アンモニアで調
整)      10.5陽極           
   白金この浴において銅箔を30°C1電流密度1
0A/dm”、電解時間20秒間陰極電解した。この銅
箔を水洗後(2燥させた。この銅箔をF R−4グレー
ドのエポキシ樹脂含浸ガラス基材に積層し、成型して銅
張積層板の各特性試験を行い、その結果を表2に示す。
Example (11) Prepare a 35μ electrolytic copper foil that has been electrolytically roughened in advance, and add 17 g of nickel sulfate (hexahydrate)/30 lonocell salt of sodium dimolybdate (dihydrate).
200g #! PI-1 (adjusted with ammonia) 10.5 anode
Platinum copper foil in this bath at 30°C1 current density 1
0A/dm" and cathodic electrolysis for 20 seconds. This copper foil was washed with water (and dried for 2 hours). This copper foil was laminated on an FR-4 grade epoxy resin-impregnated glass substrate, molded, and copper-clad. Various characteristic tests were conducted on the laminate, and the results are shown in Table 2.

またこの銅箔に形成されたニッケル−モリブデン層の厚
さは1.0mg/dm”、モリブデン含有量は原子吸光
分析により求め、58w t%を得た。
The thickness of the nickel-molybdenum layer formed on this copper foil was 1.0 mg/dm'', and the molybdenum content was determined by atomic absorption spectrometry to be 58 wt%.

実施例(12) あらかじめ電解粗面化した35μ電解銅箔表面上に実施
例(11)と同じ浴組成、電解条件でニッケル−モリブ
デン層を形成させ、水洗し次ぎに重クロム酸ナトリウム
10g/ l水溶液中で電流密度0.5A/dm”、5
秒間陰極電解後、水洗、乾燥させた。この銅箔をFR−
4グレードのエポキシ樹脂含浸ガラス基材に積層し、成
型して銅張積層板の各特性試験を行い、その結果を表2
に示す。
Example (12) A nickel-molybdenum layer was formed on the surface of a 35μ electrolytic copper foil, which had been electrolytically roughened in advance, under the same bath composition and electrolytic conditions as in Example (11), washed with water, and then treated with 10 g/l of sodium dichromate. Current density in aqueous solution 0.5A/dm", 5
After second cathodic electrolysis, it was washed with water and dried. This copper foil is FR-
The copper-clad laminates were laminated onto 4 grades of epoxy resin-impregnated glass substrates, molded, and subjected to various characteristic tests, and the results are shown in Table 2.
Shown below.

なお、実施例(11〜(12)の硫酸ニッケル、モリブ
デン酸ナトIJウム(2水塩)、電流密度、電解時間、
N1−Mo N中のMo含有量、クロメート処理層の有
無を表1にまとめて示す。
In addition, nickel sulfate, sodium molybdate (dihydrate), current density, electrolysis time,
N1-Mo The Mo content in N and the presence or absence of a chromate treatment layer are summarized in Table 1.

比較例(1) あらかじめ電解粗面化した35μ電解銅箔を用意し、 硫酸ニッケル(6水塩)       30g/j’ク
エン酸三ナトリウム(2水り   50 g/ IPH
(アンモニアで調整)      10.5陽極   
           白金この浴において銅箔を30
℃、電流密度8A/dm”、電解時間10秒間陰極電解
した。この銅箔を水洗後、重クロム酸ナトリウムLog
/ jl!水溶液中に10秒間浸漬後、水洗、乾燥させ
た。この銅箔をFR−4グレードのエポキシ樹脂含浸ガ
ラス基材に積層し、成型して銅張積層板の各特性試験を
行い、その結果を表2に示す。
Comparative Example (1) Prepare a 35 μ electrolytic copper foil that has been electrolytically roughened in advance, and add nickel sulfate (hexahydrate) 30 g/j' trisodium citrate (2 water 50 g/IPH).
(adjusted with ammonia) 10.5 anode
Copper foil in platinum bath
℃, current density 8A/dm'', and electrolysis time 10 seconds. After washing this copper foil with water, sodium dichromate Log
/ jl! After being immersed in an aqueous solution for 10 seconds, it was washed with water and dried. This copper foil was laminated onto a FR-4 grade epoxy resin-impregnated glass base material, molded, and subjected to various characteristic tests of the copper-clad laminate. The results are shown in Table 2.

比較例(2) あらかじめ電解粗面化した35μ電解銅箔を用意し、 硫酸亜鉛          200g#!硫酸アンモ
ニウム       25g/IP H3,5 陽極            亜鉛 この浴において銅箔を30℃、電流密度2A/dm”、
電解時間20秒間陰極電解した。この銅箔を水洗後、重
クロム酸ナトリウムLog/ l水溶液中に10秒間浸
漬後、水洗、乾燥させた。この銅箔をFR−4り゛レー
ドのエポキシ樹脂含浸ガラス基材に積層し、成型して銅
張積層板の各特性試験を行い、その結果を表2に示す。
Comparative Example (2) Prepare a 35μ electrolytic copper foil that has been electrolytically roughened in advance, and add 200g of zinc sulfate! Ammonium sulfate 25g/IP H3.5 Anode Zinc Copper foil was heated in this bath at 30℃, current density 2A/dm''
Cathodic electrolysis was performed for 20 seconds. After washing this copper foil with water, it was immersed in a Log/l sodium dichromate aqueous solution for 10 seconds, washed with water, and dried. This copper foil was laminated onto an epoxy resin-impregnated glass base material of FR-4 wire, and the copper clad laminate was molded and subjected to various characteristic tests, and the results are shown in Table 2.

比較例(3) あらかじめ電解粗面化した35μ電解銅箔を重クロム酸
ナトリウムLog/ !l水溶液中に10秒間浸漬後、
水洗、乾燥させた。この銅箔をFR−4グレードのエポ
キシ樹脂含浸ガラス基材に、tiiし、成型して銅張積
層板の各特性試験を行い、その結果を表2に示す。
Comparative Example (3) A 35μ electrolytic copper foil that had been electrolytically roughened in advance was coated with sodium dichromate Log/! l After immersion in the aqueous solution for 10 seconds,
Washed with water and dried. This copper foil was applied to an FR-4 grade epoxy resin-impregnated glass substrate and molded, and various characteristic tests of the copper-clad laminate were conducted, and the results are shown in Table 2.

表1 註) ml  接着力試験は引剥し巾11として(塩化第二鉄
エツチングにより形成)、他の条件はJIS−C−64
81−1976,5,7項による。
Table 1 Note) ml The adhesion test was conducted with a peel width of 11 (formed by ferric chloride etching), and other conditions were JIS-C-64.
81-1976, paragraphs 5 and 7.

*2 11CI浸漬後接着力は20%塩酸水溶液中20
℃、20分間浸漬後の接着力。
*2 Adhesion strength after 11CI immersion is 20% in 20% hydrochloric acid aqueous solution.
Adhesion strength after immersion at ℃ for 20 minutes.

本3 エツチングステイン エツチング液法 ○ニスティンが全く認められないもの ロ:ステインがわずかに観察される ×:強度のスティン 本4 フ゛ラウントランスファー 塩化第二銅エツチング後基板面を160”Clhrオー
ブン加熱し、その外観を目視観察。
Book 3 Etching Stain Etching Liquid Method ○ No stain observed at all B: Stain is slightly observed Visually observe the appearance.

○:良 口:はぼ良 ×:不良 本5 アンダーカット 塩化第二銅エツチングによりJmm巾導体を形成し、剥
離銅箔面を実体顕微鏡観察。
○: Good: Poor ×: Defective Book 5 A conductor with a width of Jmm was formed by undercut cupric chloride etching, and the peeled copper foil surface was observed using a stereoscopic microscope.

○:無 X二人、実用上不可 〔発明の効果〕 以上記述した通り、本発明により得られた印刷回路用銅
箔の特性は極めて優れている。
○: No X, practically impossible [Effects of the invention] As described above, the characteristics of the copper foil for printed circuits obtained by the present invention are extremely excellent.

即ち、塩化第二鉄、塩化第二銅、過硫酸アンモニウム、
アルカリエツチングとあらゆるエツチング液に可溶で汎
用性を持っており、また本発明ニッケル−モリブデン層
は銅とほぼ同速度でエツチング液に溶けるため、アンダ
ーカッティングが生じず、またエツチング後の耐ブラウ
ントランスファー性についても、変色等がほとんどみら
れず、シミの発生もない。さらに塩酸浸漬後接着力はほ
とんど劣化せず、液の浸み込みも全く認められない。ま
た180°C48hrといった高温長時間加熱処理後に
おいてもほとんど劣化しないという極めて優れた特性を
保持しており、薬品や熱の影響により回路が剥がれると
いった心配がない。従って、狭小化の著しいプリント回
路、特に高密度回路においてその性能を発揮すると考え
られる。
Namely, ferric chloride, cupric chloride, ammonium persulfate,
The nickel-molybdenum layer of the present invention is soluble in alkaline etching and all types of etching solutions, making it versatile.Also, since the nickel-molybdenum layer of the present invention dissolves in etching solutions at almost the same rate as copper, undercutting does not occur and brown transfer resistance after etching is achieved. As for the quality, there is almost no discoloration and no stains. Furthermore, the adhesive strength hardly deteriorates after immersion in hydrochloric acid, and no liquid seepage is observed at all. Furthermore, it maintains an extremely excellent property of hardly deteriorating even after heat treatment at a high temperature of 180° C. for 48 hours for a long period of time, and there is no fear that the circuit will peel off due to the effects of chemicals or heat. Therefore, it is thought that its performance will be demonstrated in printed circuits that are becoming significantly smaller, particularly in high-density circuits.

以上、エツチング液に対する制約がなく、エツチングに
よるアンダーカッティングもなく、耐ブラウントランス
ファー性も良く、しかも耐薬品、耐熱性が優れる本発明
印刷回路用銅箔は、一般の印刷回路板はもとより、高密
度、超高密度のマルチレイヤー印刷回路板に適するもの
である。
As mentioned above, the copper foil for printed circuits of the present invention, which has no restrictions on etching solutions, no undercutting due to etching, good brown transfer resistance, and excellent chemical and heat resistance, can be used not only for general printed circuit boards but also for high-density , suitable for ultra-high density multi-layer printed circuit boards.

Claims (3)

【特許請求の範囲】[Claims] (1)銅箔の少なくとも一方の面にモリブデンを含むニ
ッケル層を有することを特徴とする印刷回路用銅箔。
(1) A copper foil for printed circuits, characterized by having a nickel layer containing molybdenum on at least one surface of the copper foil.
(2)ニッケル−モリブデン層表面上にクロメート処理
層を形成させることを特徴とする特許請求の範囲第一項
記載の印刷回路用銅箔。
(2) The copper foil for printed circuits according to claim 1, characterized in that a chromate treatment layer is formed on the surface of the nickel-molybdenum layer.
(3)ニッケル及びモリブデンのイオンとクエン酸ある
いは酒石酸の一種以上を含む電解浴を用い、該電解浴中
で銅箔を陰極電解しニッケル−モリブデン層を形成させ
た後、該層上にクロメート処理層を設けることを特徴と
する印刷回路用銅箔の製造方法。
(3) Using an electrolytic bath containing nickel and molybdenum ions and one or more of citric acid or tartaric acid, cathodically electrolyze the copper foil in the electrolytic bath to form a nickel-molybdenum layer, and then chromate treatment on the layer. A method for producing copper foil for printed circuits, characterized by providing a layer.
JP60284774A 1985-12-17 1985-12-17 Copper foil for printed circuit and manufacture of the same Granted JPS62142389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60284774A JPS62142389A (en) 1985-12-17 1985-12-17 Copper foil for printed circuit and manufacture of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60284774A JPS62142389A (en) 1985-12-17 1985-12-17 Copper foil for printed circuit and manufacture of the same

Publications (2)

Publication Number Publication Date
JPS62142389A true JPS62142389A (en) 1987-06-25
JPH0426794B2 JPH0426794B2 (en) 1992-05-08

Family

ID=17682838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60284774A Granted JPS62142389A (en) 1985-12-17 1985-12-17 Copper foil for printed circuit and manufacture of the same

Country Status (1)

Country Link
JP (1) JPS62142389A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0496393A (en) * 1990-08-14 1992-03-27 Nikko Kyodo Co Ltd Processing method for copper foil for printed circuit
JP2005206915A (en) * 2004-01-26 2005-08-04 Fukuda Metal Foil & Powder Co Ltd Copper foil for printed circuited board, and its production method
KR20200105705A (en) 2018-03-27 2020-09-08 미쓰이금속광업주식회사 Surface-treated copper foil, copper clad laminate, and manufacturing method of printed wiring board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0496393A (en) * 1990-08-14 1992-03-27 Nikko Kyodo Co Ltd Processing method for copper foil for printed circuit
JPH0654829B2 (en) * 1990-08-14 1994-07-20 株式会社ジャパンエナジー Method of treating copper foil for printed circuits
JP2005206915A (en) * 2004-01-26 2005-08-04 Fukuda Metal Foil & Powder Co Ltd Copper foil for printed circuited board, and its production method
KR20200105705A (en) 2018-03-27 2020-09-08 미쓰이금속광업주식회사 Surface-treated copper foil, copper clad laminate, and manufacturing method of printed wiring board

Also Published As

Publication number Publication date
JPH0426794B2 (en) 1992-05-08

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