JPS62141951A - Noncontact double-acting type transferring device - Google Patents

Abstract

PURPOSE:To drive a movable unit axially and rotatably with a compact structure by providing attracting pole and driving pole in first and second motor poles. motor poles. CONSTITUTION:Attracting and driving poles are provided in first and second motor poles 2, 3. A movable unit which has first and second tooth trains 4a, 4b and a forklike arm 4c for transferring an article to be conveyed is held in a noncontacting state by the magnetic force of the attracting pole. The unit is axially driven by the magnetic force of the driving pole of the motor pole 2, and the unit is rotatably driven by the magnetic force of the driving pole of the motor pole 3.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a non-contact double-acting transfer device suitable for use in semiconductor and biotechnology related factories where dust is avoided.

(Prior Art) Magnetic bearings have conventionally been used as a method of supporting a rotating body in a non-contact manner. This magnetic bearing uses magnetic attraction or repulsion to obtain a supporting force for the shaft.

FIG. 15 is a sectional view of such a magnetic bearing type motor. As shown in this figure, a high frequency motor 103 having a magnetic bearing is installed on a base 101 via a buffer 102 that absorbs vibrations. The magnetic bearings include radial bearing units 104 and 10 on both sides of the high frequency motor 103.
4 and a thrust bearing unit 105 is arranged at one end of the rotor 106, and these units magnetically levitate the rotor 106 by electromagnetic force.
An emergency bearing 110 is provided between the outer frame 109 and the rotor 106.

Further, the displacement of the rotor 106 in the radial direction is measured by a radial sensor 107, and the displacement of the rotor 106 in the thrust direction is measured by a thrust sensor 107.
8, and by adjusting the attractive force of the electromagnet of the magnetic bearing, the position of the rotor 10fli is controlled to a predetermined position.

Incidentally, as a prior art related to this type of magnetic bearing, for example, Japanese Patent Application Laid-Open No. 89820/1982 can be cited.

On the other hand, a direct drive type conveyance device using a linear pulse motor (hereinafter referred to as LPM) has been developed.

This kind of prior art is described, for example, in "Linear Motors and Their Applications", edited by the editor and publisher, "IEEJ", pages 124-127.

However, in this transport device, the transport section including the work is 1. , PM It is designed to be separated from the PM and supported by mechanical linear bearings. In other words, the LPM employs a mechanical structure that provides only the thrust necessary to move the transport section.

(Problems to be Solved by the Invention) As described above, in conventional magnetic bearings, in order to support the rotor in a completely non-contact state, active control of displacement or inclination of at least one degree of freedom is required. There is a need. In other words, it is necessary to detect the gear knobs of the rotor and stator and control the attraction force of the electromagnet to keep this constant.

On the other hand, the rotational movement of the rotor is controlled completely independently of the non-contact supporting magnetic bearing mechanism. For example, as shown in FIG. 15, it is often driven by a motor 103, and the motor is usually a high frequency induction motor 1.
03 is used. Rotational power may also be obtained by transmitting external rotation through a coupling, etc., but in any case, the magnetic bearing mechanism and rotational drive mechanism can be separated and are not mechanically integrated. It's just that.

In other words, although the machine is integrated, the magnetic bearing section and the rotational drive section can be clearly separated. In most cases, an induction motor 103 is used to drive the rotor 106 supported by a pair of radial magnetic bearing units 104, 104, and this motor is used to rotate at high speed or at a constant speed. It is used. In other words, rotor control is limited to controlling the rotational speed, and is not used to control the positioning of the rotational angle.

As mentioned above, magnetic bearing type motors are not used for rotational positioning, but if an attempt was made to perform rotational positioning with this induction type motor, since it does not have a rotational positioning function itself, the rotation angle It is necessary to add some kind of sensor to detect this and perform complicated control.

On the other hand, since a conveyance device using LPM has a mechanical bearing, it has the following problems.

(1) Mechanical frictional contact cannot be avoided, and dust is generated from this frictional contact portion.

(2) In a vacuum state, lubricating oil evaporates, polluting the atmosphere and causing the bearing to wear out.

(3) 19 Noise and vibration are generated from the friction contact area.

(4) High precision positioning is difficult because there are mechanical contact parts.

In recent years, there has been a demand for a compact transfer device that does not generate dust in semiconductor or biotechnology-related factories, which are sensitive to dust, but no device has yet been developed that can fully meet this demand. is the current situation.

In view of the above circumstances, the present invention magnetically holds the movable body and drives it in the direction of the rotational axis and rotational direction using magnetic force between a compactly configured stator and the movable body. It is an object of the present invention to provide a non-contact double-acting type transfer device which is equipped with an arm for transferring a conveyed object and is directly driven with high precision.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides (a) a core member having a plurality of pole pieces, which is excited by a driving coil wound around the pole pieces; first and second magnetic poles that integrate a driving magnetic pole and an attraction magnetic pole that is excited by an attraction coil that is wound on the core member adjacent to the driving magnetic pole;
a stator having motor magnetic poles arranged such that the polar pieces of the first and second motor magnetic poles are orthogonal to each other;
) a first row of teeth facing each pole piece of the first motor magnetic pole and aligned with a constant pitch perpendicular to the rotation axis; a movable body provided with a second row of teeth aligned at a constant pitch parallel to the axis and having an arm above the movable body; (c) detecting relative displacement between the stator and the movable body; (d) adjusting the gap between the stator and the movable body based on the detected value from the displacement detection means, and adjusting the rotation axis direction and/or the rotation direction in the magnetically held state of the movable body; A control means for driving is provided.

(Function) According to the present invention, the movable body is held in a non-contact state by the magnetic force of the attracting magnetic poles among the first and second motor magnetic poles, and the movable body is held in a non-contact state. A movable body having an arm for transferring an object is driven in the axial direction by the magnetic force of the driving magnetic pole in the first motor magnetic pole, and the second motor magnetic pole is also provided close to the attraction magnetic pole. The movable body is driven in the rotational direction by the magnetic force of the drive magnetic pole inside.

Therefore, it is possible to perform complex operations and does not generate dust from the drive source, making it particularly suitable for transferring objects in semiconductor and biotechnology-related factories where dust is a concern. .

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

In FIGS. 1 to 3, reference numeral 1 denotes a cylindrical stator, which has a first motor magnetic pole 2 and a second motor magnetic pole 3 provided toward the inside at the lower part of the stator. The first motor magnetic poles 2 are provided concentrically at four locations, that is, at intervals of 90 degrees on the circumference. However, as a minimum configuration, it is sufficient to provide three locations. The pole pieces at the tips of the motor magnetic poles are provided at a constant pitch perpendicular to the rotation axis. Further, the second motor magnetic poles 3 are provided at four locations around the center of the first motor magnetic pole. The pole pieces at the tips of the motor magnetic poles 3 are provided parallel to the rotation axis at a constant pitch. However, as a minimum configuration, it is sufficient to provide three locations. On the other hand, a movable body 4 is arranged opposite to the pole pieces at the tips of these motor magnetic poles 3. A first tooth row 4a is provided in a portion of the movable body that faces the first motor magnetic pole 2.

This tooth row is provided at a constant pitch perpendicular to the rotation axis. Further, a second tooth row 4b is provided at a portion of the movable body that faces the second motor magnetic pole 3. This tooth row is arranged parallel to the rotation axis and has a constant pitch. Furthermore,
A hawk-shaped arm 4c is attached to the upper part of this movable body. By excitation of the pole piece of the first motor magnetic pole, the movable body 4 receives a magnetic attraction force and is driven in the direction of the rotation axis (Z-axis). On the other hand, due to the excitation of the pole piece of the second motor magnetic pole, the movable body 4 receives a magnetic attraction force and is driven in the rotational direction. That is, the movable body 4 described above is held by the first motor magnetic pole 2 and the second motor magnetic pole 3 and is driven in the direction of the rotation axis and the rotation direction. Usually, it is driven in the vertical direction and rotational direction, but depending on the installation direction of the rotating shaft, it is also possible to drive it in the horizontal direction and rotational direction.

Here, the structure and operation of the motor magnetic poles are as follows:
This will be explained in detail by taking t(i as an example).

As shown in FIG. 5, a core member 21 is attached to the motor magnetic pole 2.
A suction coil for the movable body 4 is wound around the base of the movable body 4, and a driving coil (driving in the direction of the rotation axis) is wound around the tip of the movable body 4. That is, the movable body 4
An attraction magnetic pole that magnetically attracts and supports the movable body 4 in a non-contact manner and a drive magnetic pole that magnetically drives the movable body 4 in the rotation axis direction are integrated.

That is, it is constructed by stacking ferromagnetic materials such as electromagnetic steel plates punched into continuous concave shapes, and on the outer periphery of each concave part of this core member, attraction coils 26 and 27 are arranged with opposite polarities [Fig. (see (a))].

Each tip of this core member consists of a first pole piece, a second pole piece, a third pole piece, and a fourth pole piece, and each pole piece is wound with a driving coil 28, 29, 30, 31, respectively. , the first magnetic pole 22, the second magnetic pole 23, the third magnetic pole 24, the fourth magnetic pole 25 [Fig.
). These magnetic poles 22.23.2
The pitch of the teeth provided at 4.25 is the same as the pitch of the teeth of the movable body, but the pitch of the teeth of the magnetic pole is different.
is 1/2 pitch, the third pole 24 is 1/4 pitch, and
The fourth magnetic pole 25 is arranged so as to be shifted by 3/4 pitch relative to the pitch of the teeth of the movable body.

Next, the operation of this motor magnetic pole will be explained using FIG. 5.

(1) Only the suction coils 26 and 27 should be moved in the direction of the arrow shown (
When a current is passed in the positive direction, a magnetomotive force is generated, and a magnetic flux flows as shown in FIG. 5(a).

(2) Drive coil 2 that excites the first magnetic pole and the second magnetic pole
8. When a current is passed only through 29, a magnetomotive force is generated, and as shown in Fig. 5 (
Magnetic flux flows as shown in b). Furthermore, when current flows in the negative direction, the direction of the magnetomotive force is reversed, and the magnetic flux also flows in the opposite direction. The same can be said of the drive coils 30 and 31 that excite the third magnetic pole and the fourth magnetic pole.

Here, a certain constant current 1c is caused to flow through the attraction coil. That is, if the magnetomotive force shown in FIG. 5(a) is generated and a magnetic flux is caused to flow, and at the same time a positive current 1a is caused to flow through the drive coils 28 and 29, the first! In ff scratch 22, the current I
The magnetomotive force of the current 1a and the magnetomotive force of the current 1a strengthen each other, while the second magnetic scraper 23
Then, the magnetomotive forces of the electric currents a and Ic and the current 1a cancel each other out, and a restoring force is generated that stabilizes the movable body 4 at the position shown in FIG. 5(b). In other words, the movable body 4 tries to stabilize at a position where the protrusions of the teeth of the first magnetic pole 22 and the protrusions of the teeth of the movable body 4 coincide.

Next, when the current Ia is changed to positive and the current 1b is made positive, magnetic flux tends to flow through the third magnetic winding 24, and a propulsive force is generated in the movable body 4 so that it is stabilized at the position shown in FIG. 5(c). , movable body 4
propels only 1/4 pitch.

Next, when the current 1b is made zero and the current 1a is made negative, the magnetomotive force against the second magnetic pole 23 is strengthened and magnetic flux flows, so that it is further propelled by 1/4 pitch. In this way, Ia(
By switching the current of the drive coils 28, 29, 30, and 31 as follows: positive) - Ib (positive) - 1a (negative) - 1b (negative), the movable body 4 can rotate every 1/4 pitch. become.

With this configuration, non-contact support of the movable body and drive of the movable body can be achieved using compact motor magnetic poles.

Further, the second motor magnetic pole has an attraction magnetic pole and a driving magnetic pole similarly to the first motor magnetic pole, and the direction of the tooth row of the pole piece is the same as the direction of the tooth row of the pole piece of the first motor magnetic pole. It goes directly,
The structure is such that the attraction magnetic pole attracts the movable body outward by excitation of the attraction coil, and the drive magnetic pole rotationally drives the movable body by excitation of the drive coil.

Next, the overall configuration of this non-contact double-acting transfer device will be explained using FIG. 4.

First motor magnetic pole Ji2a to 2d and second motor magnetic pole 3
a to 3d, that is, power is supplied to the attraction coil and the drive coil from the power source 10 via the drive circuit 9, and the movable body 4 is driven. The state of the movable body 4 is monitored by inputting output signals from gap detectors 5a to 5d (described later with reference to FIG. 6) into the control device 8, and the movable body 4 is monitored by the drive circuit 9 based on the output signal from the control device 8. The body 4 is controlled to a desired state.

Next, posture control of the movable body will be explained.

In order to detect independent displacements in four degrees of freedom, the detection directions of three of the four gap detectors must be on one plane. The composition is four.

Even if these four gap detection values interfere with each other, displacements with four degrees of freedom that are independent of each other can be determined by the exchange matrix determined from the arrangement relationship.

In addition, when calculating the displacement of 4 degrees of freedom, if there are more than the minimum configuration, it is possible to improve the position accuracy and position linearity by weighting or averaging the output of each gap detector. .

Usually, the four gap detectors are arranged so that they do not interfere, paying attention to the above-mentioned independent conditions.

Therefore, as shown in FIG. 6, the installation of the gap detectors will be described for the case where the number of gap detectors is at least four.

The movable body M can move in the Z-axis direction and the ψ-axis direction of the coordinate axes.

5a to 5d are gap detectors, such as eddy current type, capacitance type, photoelectric type, etc.

Detection of displacements in the four degrees of freedom x, y, θ, and φ is performed by using the coordinate axis as the rotation center of a plane perpendicular to the rotation axis passing through the midpoint of gap detectors 5a and 5b, the midpoint of gap detectors 5C and 5d, and j. Assuming the origin, the displacement of Y is the average of the detected values of 5a and 5b.The displacement of X is the average of the detected values of 5C and 5d.The angular displacement of θ is the average of the detected values of 5a and 5d. Angular displacement of φ, which is the difference between the detected values of 5b divided by the distance between 5a and 5b...The difference between the detected values of 5C and 5d is 5
It can be calculated by dividing by the distance of 0 and 5d.

The attractive force that each motor magnetic pole exerts on the movable object is separated for each coordinate axis, and the displacement of each coordinate axis obtained from the detection value from the gap detector is passed through the control circuit for each coordinate axis and excited by the drive amplifier of each motor magnetic pole. do.

Next, the attitude control system for this movable body will be explained using FIG. 7.

In the figure, 6 is a target detected by each gear detector (reference surface for gap detection), 11 is a coordinate axis displacement separation section, 12 is each coordinate axis control section, 13 is a distribution section, 14 is an exciting coil drive section, and 15 is a This is a coil for attracting the motor magnetic poles.

Here, the output signal from each gap detector is converted into X, Y, θ2 φ signals by the coordinate axis displacement separation unit 11, and the coordinate axis control unit 12 for each coordinate axis, that is, the X-axis control unit 12-1, the Y-axis control section 12-2, θ-axis control section 12-3,
Through the φ-axis control unit 12-4, the distribution unit 13 provides a coil current command value for each magnetic pole, and the excitation coil drive unit 14
controls the coil current so that it matches the coil current command value.

Note that here, the gap detector is configured to detect by providing a target on the outer surface of the movable body M, but it is also possible to make the movable body M into a hollow cylinder, provide a target on the inner surface, and detect the gap detector provided on the inner surface. If it is detected by , as shown in FIG. 6, there is no need to increase the height of the movable body M relative to the stroke.

Further, a microstep voltage (described later) is applied to the drive coil. As for the position of the movable body 4, the origin position is memorized in advance, and the amount of displacement (for example, the rotation angle in the case of the second motor magnetic pole) is determined by the number of pulses applied to the drive coil of the motor magnetic pole from this position. , the position of the movable body 4 can be controlled.

Here, if the number of microstep divisions is m, the movable body can be positioned by minute angles every 2π/N-m (rad).

Furthermore, the movable body can also be controlled as follows.

First, the origin position of the movable body 4 is determined by a photo sensor, a dog switch, etc., and the movable body 4 is supported in a non-contact manner at this position. That is, as shown in FIG. 4, an excitation current is previously applied to the motor magnetic poles via the drive circuit 9 to bring the movable body 4 into a non-contact state.

Next, in the non-contact state, the detected values from each gap detector are imported into the control device 8, and the imported values are compared with the reference value (reference gap value) of each gap detector, and the deviation The drive circuit 9 outputs an output signal such that
The drive circuit 9 adjusts the excitation current value of the attraction coil in each motor magnetic pole.

By performing feedback control in this manner, smooth attitude control of the movable body can be performed.

Next, microstep driving of the movable body will be explained.

Here, the microstep drive is a method in which two-phase currents with a phase difference of 90 degrees are passed through the two windings of the motor magnetic poles to drive the motor as a synchronous motor. A waveform as shown in FIG. 8 is provided.

FIG. 9 is a configuration diagram of the microstep drive system, in which 41 is a ring counter, 42, 43 is a ROM,
44.45 is a D/A converter, 46.47 is a drive amplifier, and the second motor magnetic pole 3 is connected after this drive amplifier 46.47. In addition, here, the suction coil 2
The drive circuit to 6.27 is omitted.

As shown in this figure, when a movement command value is input to the ring counter 41, the waveform data stored in the ROM 42.43, that is, the sine and cosine values are read out, and the D
/A converter 44.45, the analog quantity is input to drive amplifier 46.47, amplified and sent to drive coil 2.
Added on 8.29.30.31.

The ratio of the A phase and B phase of the waveform is determined by the electrical angle position (time), and the movable body 4 is moved by outputting it according to the electrical angle position. Note that when a voltage amplifier is used as a drive amplifier, passive damping can be expected. With this configuration, the movable body 4 can move smoothly and can be positioned over a minute distance.

By the way, since this non-contact double-acting transfer device drives the movable body in a non-contact state, the mechanical damping against the movement of the movable body is very small.

Therefore, even if microstep driving is performed, some vibrations occur. In order to suppress this vibration, the following configuration is adopted.

As shown in Fig. 2, a total of four second motor magnetic poles 3 are arranged at 90 degree intervals with the centers of each motor magnetic pole concentrically arranged.
will be explained using an example.

Here, the phases with respect to the teeth of the movable body 4 between a plurality of motor magnetic poles arranged in the rotation direction are shifted by π/4 from each other. In other words, at a certain point in time, the rotation drive coils of the motor magnetic poles 3a and 3C generate a magnetomotive force as shown in FIG.
, 3d, the respective motor magnetic poles are arranged so as to generate a magnetomotive force as shown in FIG. 10(b).

When the position of the motor magnetic poles is shifted by π/4 in electrical angle in this way, the rotational torque characteristics are made uniform, and compared to when they are arranged in the same phase, damping becomes larger and smoother driving becomes possible. Become. In other words, it is possible to improve resolution and reduce vibration.

Note that although the case of microstep drive has been described above, in the case of a normal step motor, the pattern is as shown in FIG. 11. In other words, when the motor magnetic pole ■ (motor magnetic pole 3a or 3C) is 1-phase excitation, the motor magnetic pole ■
(Motor magnetic pole 3b or 3d) becomes two-phase excitation, and vice versa.

Here, the plus/minus in the table is the polarity of the coil voltage (or current) during bipolar drive of the step motor.

In this way, damping can be performed by shifting the excitation phase not only during microstep driving but also when using a normal step motor.

In addition, according to the above embodiment, the case where the motor magnetic poles 3b and 3d lead the motor magnetic poles 3a and 3c by π/4 in phase has been described, but conversely, the motor magnetic poles 3a and 3C
For motor magnetic 8i3 b.

3d may be delayed by π/4. In this case, it is the same as changing the direction of rotation of the movable body.

Furthermore, the above effects can be achieved even if the speed is advanced or delayed by n×π/4 (n=1.3, 5.7). In other words, if one side is 2-phase excitation, the other side is 1-phase excitation.
It is better to use phase excitation.

Next, an application example of the non-contact double-acting transfer device of the present invention will be explained using FIGS. 12 and 13.

As shown in FIG. 12, an object 52 is conveyed by the endless belt 51 and positioned at a location A.

Then, the hawk-like arm 4C waiting at the bottom rises due to the excitation of the driving coil of the first motor magnetic pole 2, scoops up the conveyed object 52 and rises, and then starts driving the second motor magnetic pole 3. The hawk-shaped arm 4 is activated by excitation of the coil for
C rotates and is positioned on the mounting table 53 at the 0th order,
By excitation of the drive coil of the first motor magnetic pole 2 in the opposite direction, the hawk-shaped arm 4C is lowered, and the object 52 can be transferred onto the mounting table 53.

Since this transfer device is non-contact, it is clearly suitable for use in semiconductor factories and biotechnology-related factories where dust is a concern.

In addition, it is a compact direct-acting type, which can reduce the occupied area.

Further, the non-contact double-acting transfer device of the present invention has a first motor magnetic pole 6 at the lower part of the fixed part 61, as shown in FIG.
2, a stator with a second motor magnetic pole 63 arranged thereon, a cup-shaped movable body 64 covering the stator, and a hawk-shaped arm 64c on the top of the movable body. You may also attach it. With this configuration, the drive mechanism becomes simple, and dustproof and
It can enhance the waterproof effect.

The structure of the non-contact double-acting transfer device of the present invention can be modified in various ways depending on the weight and shape of the intended movable body, the weight of objects to be placed on the hawk-shaped arm, etc.

Note that the present invention is not limited to the above embodiments,
Various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

(Effects of the Invention) As described in detail above, according to the present invention, (a) a driving magnetic pole excited by a driving coil wound on the pole pieces of a core member having a plurality of pole pieces; , first and second motor magnetic poles are provided, which are integrated with an attraction magnetic pole excited by an attraction coil wound on the core member adjacent to the drive magnetic pole; A stator arranged so that the directions of the motor magnetic pole pieces are perpendicular to each other,
b) a first row of teeth facing each pole piece of the first motor magnetic pole and aligned with a constant pitch perpendicular to the rotation axis and facing each pole piece of the second motor magnetic pole; a movable body having a second row of teeth aligned at a constant pitch parallel to the rotation axis and having an arm above the movable body; (c) detecting relative displacement between the stator and the movable body; (d) adjusting the gap between the stator and the movable body based on the detected value from the 8g displacement detection means, and adjusting the rotation axis direction and/or the rotation direction when the movable body is in a magnetically held state; (1) The movable body can be rotated in the direction of the rotation axis and/or in a non-contact state, and the movable body can be positioned with high precision. It is possible to provide an extremely compact direct drive type transfer device that can accurately transfer objects using the arm provided on the upper part.

(2) There is no need to connect a wire for supplying electricity to the movable body, and the movable body moves quickly, has high responsiveness, and can be positioned with high precision.

(3) For driving, it is only necessary to provide a tooth row on the movable body, and since the driving coil and suction coil are provided on the stator side, the heat generated by the coil is effectively transferred through heat conduction on the stator side. It can be absorbed and rarely causes a rise in the temperature of the movable body.

(4) No mechanical bearings are required, so no dust is generated.

■Can be used even in vacuum.

■Noise and vibration from the drive source are not transmitted to the movable body.

■Highly accurate positioning is possible because there is no friction loss.

■No maintenance such as refueling is required.

As described above, the present invention has various advantages, and in particular, it is a non-contact system that can be used in harsh environments such as semiconductor factories where dust is averse, biotinology-related factories, and high vacuum atmospheres such as space factories. A double-acting transfer device can be obtained.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway perspective view of a non-contact double-acting transfer device showing an embodiment of the present invention, FIG. 2 is a partially cut-away plan view of the same non-contact double-acting transfer device, and FIG. 3 is a partially cutaway side view of the non-contact double-acting transfer device, FIG. 4 is an overall configuration diagram of the non-contact double-acting transfer device, FIG. 5 is an explanatory diagram of the operation of the motor magnetic poles, and FIG. 6 is a diagram illustrating the operation of the motor magnetic poles. Figure 7 is a configuration diagram of the attitude control system for the movable body, Figures 8 and 10 are microstep drive current waveform diagrams, Figure 9 is a configuration diagram of the microstep drive system, and Figure 11. is an excitation sequence diagram, FIGS. 12 and 13 are partially cutaway perspective views showing an application example of the non-contact double-acting transfer device of the present invention, and FIG. 14 is a non-contact diagram showing another embodiment of the present invention. FIG. 15 is a partially cutaway perspective view of a double-acting transfer device, and a cross-sectional view of a conventional magnetic bearing type upper transfer device. 1.61... Fixed parts 2.2a to 2d, 62... First motor magnetic pole, 3.3
a to 3d, 63... second motor magnetic pole, 4, 64.
M...Movable body 4a...First tooth row 4b...Second tooth row 5.5a to 5d...Gap detector 6...Gap detection reference surface 8...Control device 9... Drive circuit 10... Power supply 21... Core member 22... First magnetic pole 23... Second magnetic pole 24... Third magnetic pole 25... Fourth magnetic pole 26, 27...・・Suction coils 28 to 31 ・・Drive coils

Claims (8)

[Claims] (1) (a) A driving magnetic pole that is excited by a driving coil wound on the pole piece of a core member having a plurality of pole pieces, and a driving magnetic pole that is wound on the core member adjacent to the driving magnetic pole. first and second motor magnetic poles are integrated with an attraction magnetic pole excited by an attraction coil, and the pole pieces of the first and second motor magnetic poles are arranged so that the directions of the pole pieces are perpendicular to each other. a stator; (b) opposing each pole piece of the first motor magnetic pole;
A first row of teeth aligned at a constant pitch perpendicular to the rotation axis, and a second row of teeth facing each pole piece of the second motor magnetic pole and aligned at a constant pitch parallel to the rotation axis. (c) displacement detection means for detecting relative displacement between the stator and the movable body; (d) detection from the displacement detection means; A control means for adjusting a gap between the stator and the movable body based on the value and driving the movable body in the rotational axis direction and/or rotational direction in a magnetically held state. Contact double-acting transfer device. (2) gap control means for adjusting the gap between the stator and the movable body by changing the excitation current of the attraction coil based on the detected value from the displacement detection means;
Claim 1, further comprising a drive control means for changing the current of the drive coil to drive the movable body in the rotational axis direction and/or rotational direction while the movable body is in a magnetically held state. Non-contact double-acting transfer device. (3) The non-contact double-action type transfer device according to claim 1, wherein the arm is in the shape of a fork. (4) The non-contact double-acting transfer device according to claim 1, wherein at least three of the first and second motor magnetic poles are each provided. (5) The first motor magnetic pole and the second motor magnetic pole are disposed concentrically inside a cylindrical fixed part above and below the fixed part, and the cylindrical movable body is provided at the center of the first motor magnetic pole and the second motor magnetic pole. A non-contact double-action transfer device according to claim 1, characterized in that: (6) The non-contact according to claim 1, characterized in that the first motor magnetic pole and the second motor magnetic pole are disposed inside, and a movable body having a shape that covers the motor magnetic pole is disposed. Double-acting transfer device. (7) A patent characterized in that the drive control means includes means for supplying sine wave and cosine wave currents to the drive coils and performing microstep drive using the currents flowing through each phase of these drive coils. A non-contact double-acting transfer device according to claim 2. (8) A plurality of motor magnetic poles arranged in the driving direction of the movable body are arranged so that excitation phases between the respective magnetic poles are shifted by π/4. Contact double-acting transfer device.