JPH0667169B2 - Non-contact double acting transfer device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a non-contact double-acting type transfer device suitable for use in semiconductors that are resistant to dust, biotechnology-related factories, and the like.

(Prior Art) Conventionally, a magnetic bearing has been used as a method of supporting a rotating body in a non-contact state. This magnetic bearing uses a magnetic attraction or repulsive force to obtain a supporting force for the shaft.

FIG. 15 is a sectional view of such a magnetic bearing type motor. As shown in this figure, a high frequency motor 103 having a magnetic bearing is installed on a base 101 via a buffer 102 that absorbs vibrations. The magnetic bearings include radial bearing units 104, 10 on both sides of the high frequency motor 103.
4, the thrust bearing unit 105 is arranged at one end of the rotor 106, and these units magnetically levitate the rotor 106 by electromagnetic force.
An emergency bearing 110 is provided between the outer frame 109 and the rotor 106.

Further, the radial displacement of the rotor 106 is the radial sensor 107, and the displacement in the thrust direction is the thrust sensor 10.
8, the position of the rotor 106 is controlled to a predetermined position by adjusting the attraction force of the electromagnet of the magnetic bearing.

As a prior art relating to this type of magnetic bearing, for example, there is JP-A-59-89820.

On the other hand, a direct drive type conveyance device using a linear pulse motor (hereinafter referred to as LPM) has been developed.
This type of prior art is described, for example, in Editors and Publishers "The Institute of Electrical Engineers", "Linear Motors and Their Applications," pages 124-127.

However, in this transfer device, the transfer part including the work is separated from the LPM and supported by a mechanical linear bearing. That is, the LPM employs a mechanical structure that gives only the thrust required to move the transport unit.

(Problems to be Solved by the Invention) As described above, in the conventional magnetic bearing, in order to support the rotor in a completely non-contact state, at least one degree of freedom of displacement or inclination is actively controlled. There is a need to do.
That is, it is necessary to detect the gap between the rotor and the stator and control the attraction force of the electromagnet so as to keep it constant.

On the other hand, the control of the rotary motion of the rotor is performed completely independently of the non-contact supported magnetic bearing mechanism. For example, the fifteenth
As shown in the figure, it is often driven by a motor 103, and a high frequency induction type motor 103 is usually used as a motor. In addition, external rotation may be transmitted through a coupling through a coupling or the like to obtain rotational power, but in any case, the magnetic bearing mechanism and the rotary drive mechanism can be separated and are mechanically integrated. It ’s just that. In other words, the magnetic bearing unit and the rotary drive unit can be clearly separated although they are integrated as a machine.

In addition, the pair of radial magnetic bearing units 104, 104
In most cases, the induction type motor 103 is used to drive the rotor 106 supported by, and this motor is used to rotate at a high speed or at a constant speed. That is, the control of the rotor exclusively controls the rotational speed and has not been used for the rotational angle positioning control.

As described above, the magnetic bearing type motor is not used for rotational positioning.However, if rotational induction positioning is attempted by this induction type motor, it does not have a rotational positioning function by itself. There is no choice but to perform some kind of complicated control by adding some kind of sensor that detects the corners.

On the other hand, the transport apparatus using the LPM has the following problems since it has a mechanical bearing.

(1) Mechanical frictional contact cannot be avoided, and dust is generated from this frictional contact portion.

(2) In a vacuum state, the lubricating oil evaporates, polluting the atmosphere and burning the bearing.

(3) Noise and vibration are generated from the friction contact portion.

(4) Since it has a mechanical contact portion, high-precision positioning is difficult.

In recent years, in semiconductors and biotechnology-related factories that are resistant to dust, a compact transfer device for transported goods that does not generate dust is desired, but a device that can sufficiently respond to this has not yet been developed. is the current situation.

In view of the above situation, the present invention performs magnetic holding between movable bodies and driving in a rotation axis direction and a rotation direction by a magnetic force between a compact stator and a movable body, and An object of the present invention is to provide a non-contact double-acting type transfer device that includes an arm that transfers a conveyed object in the rotational direction and that is directly driven with high accuracy.

(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention is a non-contact double-acting type transfer apparatus, which has a core member having a plurality of pole pieces, and is provided on the pole pieces. A first magnetic pole integrated with a drive magnetic pole excited by a wound drive coil and an attraction magnetic pole excited by a suction coil wound on the core member adjacent to the drive magnetic pole. And a stator provided with a second motor magnetic pole and arranged so that the arrangement directions of the pole pieces of the first and second motor magnetic poles are orthogonal to each other, and facing the respective pole pieces of the first motor magnetic pole, Opposed to the first tooth row and the pole pieces of the second motor magnetic pole aligned with a unitary pitch in a direction parallel to the rotation axis, and having a constant pitch in the circumferential direction of the rotation axis. A movable body having a second row of teeth aligned with each other and having an arm on an upper portion thereof, the stator and the movable body. Displacement detecting means for detecting relative displacement between bodies, adjusting a gap between the stator and the movable body based on a detection value from the displacement detecting means, and rotating the movable body in a magnetically held state. A control means for performing step driving in the axial direction and / or the rotation direction is provided.

(Operation) According to the present invention, the movable body is held in a non-contact state by the magnetic force of the attraction magnetic poles in the first and second motor magnetic poles, and is provided close to the attraction magnetic pole. By the magnetic force of the driving magnetic pole in the first motor magnetic pole, the movable body having the arm for transferring the transported object is axially driven,
The movable body is step-driven in the rotational direction by the magnetic force of the driving magnetic pole in the second motor magnetic pole, which is also provided close to the attraction magnetic pole.

Therefore, since it is possible to perform a complicated operation and does not generate dust from the driving source, it is particularly suitable for transferring a transported object in a semiconductor or a biotechnology-related factory that rejects dust. .

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

In FIGS. 1 to 3, reference numeral 1 denotes a cylindrical fixing portion, which has a first motor magnetic pole 2 and a second motor magnetic pole 3 which are provided inward at a lower portion of the fixing portion. The first motor magnetic poles 2 are provided in four concentric circles, that is, at intervals of 90 degrees on the circumference. However, it is sufficient to provide it in three places as the minimum configuration. The pole piece at the tip of the motor magnetic pole is provided so as to have a constant pitch perpendicular to the rotation axis. Further, the second motor magnetic poles 3 are provided on the first motor magnetic poles 2 in four concentric circles like the first motor magnetic poles 2. The pole piece at the tip of the second motor magnetic pole 3 is provided so as to have a constant pitch in parallel with the rotation axis. However, it is sufficient to provide it in three places as the minimum configuration.

On the other hand, the movable body 4 is arranged so as to face the pole piece at the tip of the second motor magnetic pole 3. A first tooth row 4a is provided at a portion where the movable body faces the first motor magnetic pole 2. The tooth row is provided so as to have a constant pitch perpendicular to the rotation axis. In addition, the movable body 4 is connected to the second motor magnetic pole 3
A second tooth row 4b is provided in a portion facing to. The tooth row is provided so as to have a constant pitch in parallel with the rotation axis.
Further, a hawk-shaped arm 4c is attached to the upper part of the movable body 4. Then, due to the excitation of the pole pieces of the first motor magnetic pole 2, the movable body 4 receives a magnetic attraction force and is driven in the rotation axis (Z axis) direction. On the other hand, the second
By the excitation of the pole piece of the motor magnetic pole 3, the movable body 4 receives a magnetic attraction force and is driven in the rotation direction. That is, the above-mentioned movable body 4 is driven in the rotation axis direction and the rotation direction while being held by the first motor magnetic pole 2 and the second motor magnetic pole 3. Normally, it is driven in the vertical direction and the rotation direction, but it can be driven in the horizontal direction and the rotation direction depending on the installation direction of the rotary shaft.

Here, the structure and operation of the motor magnetic pole will be described in detail by taking the first motor magnetic pole as an example.

As shown in FIG. 5, the motor magnetic pole 2 shown in FIG. 1 is wound with a suction coil of the movable body 4 at the base of the core member 21 and a driving (driving in the rotational axis direction) coil at the tip. . That is,
An attraction magnetic pole for magnetically attracting the movable body 4 for non-contact support and a driving magnetic pole for magnetically driving the movable body 4 in the rotation axis direction are integrated. That is, it is constructed by stacking ferromagnetic materials such as electromagnetic steel plates punched into a concatenated shape having a concave shape, and suction coils 26 and 27 are provided on the outer periphery of each concave portion of the core member 21 with opposite polarities [fifth]. (See Figure (a))
It is wrapped so that it becomes. Each tip of the core member 21 is composed of a first pole piece, a second pole piece, a third pole piece, and a fourth pole piece,
Each pole piece has a drive coil 28, 29, 30, 3 respectively.
1 is wound to form a first magnetic pole 22, a second magnetic pole 23, a third magnetic pole 24, and a fourth magnetic pole 25 [see FIG. 5 (a)].

The pitch of the teeth provided on these magnetic poles 22, 23, 24, 25 is the same as the pitch of the teeth of the movable body 4, but the pitch of the teeth of the magnetic poles is deviated, and when the first magnetic pole 22 is used as a reference, On the other hand, the second magnetic pole 23 is displaced by 1/2 pitch, the third magnetic pole 24 is displaced by 1/4 pitch, and the fourth magnetic pole 25 is displaced by 3/4 pitch relative to the tooth pitch of the movable body 4. It is arranged as follows.

Next, the operation of this motor magnetic pole will be described with reference to FIG.

(1) When an electric current in the direction of the arrow shown in the drawing (which is the positive direction) is passed only through the suction coils 26 and 27, a magnetomotive force is generated and
Magnetic flux flows as shown in FIG.

(2) Drive coil 2 for exciting the first magnetic pole and the second magnetic pole
When a current is passed through only 8 and 29, a magnetomotive force is generated and a magnetic flux flows as shown in FIG. 5 (b). When a current is passed in the negative direction, the direction of magnetomotive force is reversed, and the magnetic flux also flows in the opposite direction. The same applies to the drive coils 30 and 31 that excite the third magnetic pole and the fourth magnetic pole.

Here, a certain constant current Ic is applied to the suction coils 26 and 27.
Discharge. That is, the magnetomotive force shown in FIG. 5 (a) is generated to flow the magnetic flux, and at the same time, the driving coil 2
When a positive current Ia is flown to Nos. 8 and 29, the magnetomotive forces of the current Ic and the current Ia are strengthened in the first magnetic pole 22, while the magnetomotive forces of the current Ic and the current Ia are canceled in the second magnetic pole 23.
The movable body 4 generates a restoring force that stabilizes at the position shown in FIG. 5 (b). That is, the protrusions of the teeth of the first magnetic pole 22 and the protrusions of the teeth of the movable body 4 try to stabilize at a position where they coincide with each other.

Next, when the current Ia is set to zero and the current Ib is set to positive, the magnetic flux tends to flow in the third magnetic pole 24, and a propulsive force is generated in the movable body 4 so as to stabilize at the position shown in FIG. 5 (c), Movable body 4
Promotes only 1/4 pitch.

Next, when the current Ib is set to zero and the current Ia is set to negative, the magnetomotive force with respect to the second magnetic pole 23 is strengthened and a magnetic flux flows, so that a further 1/4 pitch is propelled. In this way, Ia
By switching the currents of the drive coils 28, 29 and 30, 31 in the order of (positive) → Ib (positive) → Ia (negative) → Ib (negative), the movable body 4 rotates at every ¼ pitch. It will be.

With this configuration, non-contact support of the movable body and driving of the movable body can be achieved by a compact motor magnetic pole.

Also, the second motor pole is similar to the first motor pole,
It has a magnetic pole for attraction and a magnetic pole for driving, and the direction of the tooth row of the pole piece is perpendicular to the direction of the tooth row of the pole piece of the first motor magnetic pole, and the attraction magnetic pole is excited by the excitation of the attraction coil. Attracts the movable body to the outside, and the driving magnetic pole rotates the movable body by exciting the driving coil.

Next, the overall configuration of this non-contact double-acting type transfer device will be described with reference to FIG.

First motor magnetic poles 2a to 2d and second motor magnetic pole 3a
3d, that is, the supply of electric power to the suction coil and the driving coil is performed from the power source 10 via the driving circuit 9, and the movable body 4 is driven. The state of the movable body 4 is monitored by taking the output signals from the gap detectors 5a to 5d (described later with reference to FIG. 6) into the control device 8, and the drive circuit 9 is driven by the output signal from the control device 8. The movable body 4 is controlled to a desired state.

Next, the attitude control of the movable body will be described.

In order to detect independent displacements with 4 degrees of freedom, the minimum required contactless gap detector is required unless the detection directions of at least 3 of the 4 gap detectors are on one plane. There are four components. Even if the four gap detection values interfere with each other, it is possible to obtain mutually independent displacements of four degrees of freedom by the exchange matrix obtained from the arrangement relationship.

In addition, when there are more than the minimum configuration when obtaining the displacement of 4 degrees of freedom, the output of each gap detector is weighted,
By averaging, position accuracy and position linearity can be improved.

Usually, the arrangement of the four gap detectors should be made so as not to interfere with each other, paying attention to the above-mentioned independent conditions.

Therefore, as shown in FIG. 6, a case where the number of the gap detectors attached is at least 4 will be described.

The movable body M can be moved in the Z-axis direction and the ψ-axis direction of the coordinate axes.
Reference numerals 5a to 5d denote gap detectors, which include, for example, an overcurrent type, a capacitance type, and a photoelectric type.

The displacement of the four degrees of freedom X, Y, θ, and φ is detected by setting the rotation center of a plane perpendicular to the rotation axis passing through the midpoints of the gap detectors 5a and 5b and the midpoints of the gap detectors 5c and 5d. Assuming the origin of the coordinate axis, the displacement of Y is the average of the detected values of 5a and 5b. The displacement of X is the average of the detected values of 5c and 5d. The angular displacement of θ is the difference of the detected values of 5a and 5b. Value divided by distance Angular displacement of .theta .... Calculated by the difference between the detected values of 5c and 5d divided by the distance of 5c and 5d.

The attraction force acting on the movable body by each motor pole is separated for each coordinate axis, and the displacement of each coordinate axis obtained from the detection value from the gap detector is excited by the drive amplifier of each motor pole through the control circuit for each coordinate axis. To do.

Next, this attitude control system for the movable body will be described with reference to FIG.

In the figure, 6 is a target (gap detection reference plane) detected by each gap detector, 11 is a coordinate axis displacement separating unit, 12 is each coordinate axis control unit, 13 is a distributing unit, 14 is an exciting coil driving unit, and 15 is It is a coil for attracting the motor magnetic pole.

Here, the output signal from each gap detector is converted into X, Y, θ, and φ signals by the coordinate axis displacement separation unit 11, and the coordinate axis control unit 12 for each coordinate axis, that is, the X coordinate axis control unit 1
2-1, Y coordinate axis control unit 12-2, θ coordinate axis control unit 12
-3, through the θ coordinate axis control unit 12-4, the distribution unit 13 provides a coil current command value for each magnetic pole, and the excitation coil driving unit 14 controls the coil current to match the coil current command value.

Although the gap detector is provided with a target on the outer surface of the movable body M for detection here, the movable body M is a hollow cylinder, and the target is provided on the inner surface of the movable body M, and the gap detector provided on the inner surface of the hollow body is detected. When the detection is performed by (1), it is not necessary to increase the height of the movable body M with respect to the slot talk, as shown in FIG.

Further, the driving coil applies a microstep voltage (which will be described later). The position of the movable body 4 is stored in advance as the origin position, and the displacement amount, for example, in the case of the second motor magnetic pole, the rotation angle is determined by the number of pulses applied to the drive coil of the motor magnetic pole from this position. Therefore, the position of the movable body 4 can be controlled.

Here, when the number of divisions of the micro step is m, the movable body can be positioned at a minute angle of 2π / N · m (rad).

Furthermore, the control of the movable body can be performed as follows.

First, the origin position of the movable body 4 is determined by a photo sensor, a dog switch, etc., and the movable body 4 is supported in a non-contact manner at this position. That is, as shown in FIG. 4, an exciting current is supplied to the magnetic poles of the motor in advance through the drive circuit 9 to bring the movable body 4 into a non-contact state.

Next, in the non-contact state, the detection value from each gap detector is taken into the control device 8, and the taken value is compared with the reference value (reference air gap value) of each gap detector to obtain the deviation. Drive circuit 9 outputs an output signal
The drive circuit 9 adjusts the exciting current value of the suction coil in each motor magnetic pole.

Thus, by performing the feedback control, it is possible to smoothly perform the attitude control of the movable body.

Next, the micro step drive of the movable body will be described.

Here, the micro-step drive is a method in which a two-phase current having a phase difference of 90 degrees is applied to two windings of a motor magnetic pole to drive the motor as a synchronous motor. For example, the drive currents Ia and Ib for the movable body are A waveform as shown in FIG. 8 is provided.

FIG. 9 is a block diagram of a micro-step drive system, in which 41 is a ring counter and 42 and 43 are ROs.
M, 44 and 45 are D / A converters, and 46 and 47 are drive amplifiers.
Motor pole 3 is connected. The drive circuit for the suction coils 26 and 27 is omitted here.

As shown in this figure, when the movement command value is input to the ring counter 41, the waveform data stored in the ROMs 42 and 43, that is, the sine and cosine values are read out, and D
The analog amount is input to the drive amplifiers 46, 47 via the / A converters 44, 45, amplified, and added to the drive coils 28, 29, 30, 31.

In the waveform, the ratio of the A phase and the B phase is determined by the electrical angle position (time), which is output according to the electrical angle position to move the movable body 4. If a voltage amplifier is used as the drive amplifier, passive damping can be expected.
With this configuration, the movable body 4 can move smoothly and can be positioned at a minute distance.

By the way, in this non-contact double-acting type transfer device, since the movable body is driven in a non-contact state, the mechanical damping against the movement of the movable body is very small. Therefore, even if the micro step drive is performed, some vibration is accompanied. In order to suppress this vibration, it is configured as follows.

As shown in FIG. 2, the second motor magnetic poles 3 are arranged such that the center of each motor magnetic pole is concentrically arranged at 90 ° intervals and a total of four motor magnetic poles are arranged.
Will be described as an example.

Here, the phases of the plurality of motor magnetic poles arranged in the rotation direction with respect to the teeth of the movable body 4 are shifted from each other by π / 4. That is, at a certain point, the second motor magnetic pole 3
In the rotational driving coils a, 3c, in order to generate a magnetomotive force as shown in FIG.
In the rotation driving coils of the second motor magnetic poles 3b and 3d, the respective motor magnetic poles are arranged so as to generate a magnetomotive force as shown in FIG. 10 (b).

In this way, when the position of the motor magnetic pole is shifted by π / 4 in electrical angle, the rotational torque characteristics are made uniform, and damping is greater than in the case of the in-phase arrangement, enabling smooth driving. Becomes That is, it is possible to improve the resolution and reduce the vibration.

In the above, the case of the micro step drive has been described, but in the case of a normal step motor, the pattern is as shown in FIG. That is, when the motor magnetic pole I (second motor magnetic pole 3a or 3c) is one-phase excited, the motor magnetic pole II (second motor magnetic pole 3b or 3d) is two-phase excited, and vice versa. Here, plus and minus in the table are polarities of the coil voltage (or current) at the time of bipolar driving of the step motor.

As described above, damping can be performed by shifting the excitation phase not only in the micro step drive but also in the case of a normal step motor.

According to the above embodiment, the second motor magnetic poles 3b, 3
The phase of d is π with respect to the second motor magnetic poles 3a and 3c.
/ 4 has been described, but conversely, for the second motor magnetic poles 3a, 3c, the second motor magnetic pole 3b,
3d may be delayed by π / 4. In this case, it is the same as when the rotating direction of the movable body is changed. Furthermore, n ×
Even if it is advanced by π / 4 (n = 1, 3, 5, 7) or delayed, the above-described effects can be obtained. That is, when one of the two is two-phase excitation, the other one is preferably one-phase excitation.

Next, an application example of the non-contact double-acting type transfer device of the present invention will be described with reference to FIGS. 12 and 13.

As shown in FIG. 12, the conveyed product 52 is conveyed by the endless belt 51 and positioned at the position A.
Then, the hawk-shaped arm 4c waiting at the bottom
Rises due to the excitation of the drive coil of the first motor magnetic pole 2 and scoops up the conveyed object 52 to rise, and then the excitation of the drive coil of the second motor magnetic pole 3 causes the hawk-shaped arm 4c to rotate. , And is positioned on the mounting table 53. Next, by exciting the driving coil of the first motor magnetic pole 2 in the opposite direction, the hawk-shaped arm 4c descends, and the transported object 52 can be transferred onto the mounting table 53. Since this transfer device is a non-contact type, it is obvious that it is suitable for use in a dust-proof semiconductor factory or a biotechnology-related factory.

Further, since it is a compact direct-acting type, the occupied area can be reduced.

Further, in the non-contact double-acting type transfer device of the present invention, as shown in FIG. 14, the first motor magnetic pole 6 is provided below the fixed portion 61.
2 is provided, a stator having the second motor magnetic pole 63 disposed thereon is provided, a cup-shaped movable body 64 is provided so as to cover the stator, and a hawk-shaped arm 64c is provided above the movable body. May be attached. With this configuration, the drive mechanism section becomes simple and dustproof,
The waterproof effect can be enhanced.

The structure of the non-contact double-acting type transfer device of the present invention can be modified in various ways depending on the weight and shape of the movable body, the weight of the object placed on the hawk-shaped arm, and the like.

The present invention is not limited to the above embodiment,
Various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

(Effects of the Invention) As described in detail above, according to the present invention, a non-contact double-acting type transfer device, which has a core member having a plurality of pole pieces and is wound on the pole pieces. Driving magnetic poles that are excited by a driving coil and a suction magnetic pole that is excited by a suction coil that is wound on the core member adjacent to the driving magnetic poles are integrated. A magnetic pole of the first and second motor magnetic poles, the stator arranged so that the arrangement directions of the pole pieces of the first and second motor magnetic poles are orthogonal to each other; The first tooth row and the pole pieces of the second motor magnetic pole, which are aligned at a constant pitch in a parallel direction, face each other and are aligned at a constant pitch in the circumferential direction of the rotation shaft. A movable body having a second tooth row and having an arm on an upper portion thereof, and a relative position between the stator and the movable body. Displacement detecting means for detecting displacement, adjusting a gap between the stator and the movable body on the basis of a detection value from the displacement detecting means, and a rotation axis direction in a magnetically held state of the movable body and / or Since the control means for performing step driving in the rotation direction is provided, (1) the movable body can be driven in the rotation axis direction and / or the rotation direction in a non-contact state, and the movable body can be positioned with high accuracy. Therefore, it is possible to provide an extremely compact direct drive type transfer device capable of accurately transferring the transferred object by the arm provided on the upper part of the movable body.

(2) Since it is not necessary to connect a wire for supplying electricity to the movable body, the movable body moves quickly, has high responsiveness, and can perform highly accurate positioning.

(3) For driving, it is only necessary to provide the movable member with a tooth row, and since the driving coil and the suction coil are provided on the stator side, heat generation of the coil is effectively performed by heat conduction of the stator. It can be absorbed, and the temperature rise of the movable body is less likely to occur.

(4) No dust is generated because no mechanical bearing is required.

It can also be used in vacuum.

Noise and vibration from the drive source are not transmitted to the movable body.

Since there is no friction loss, highly accurate positioning is possible.

No maintenance such as refueling is required.

As described above, according to the present invention, there are various advantages, and in particular, non-contact double-action which can be used in a harsh environment such as a high vacuum atmosphere such as a dust-proof semiconductor factory, a biotechnology-related factory, or a space factory. A mold transfer device can be obtained.

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view of a non-contact double-action transfer device showing an embodiment of the present invention, FIG. 2 is a partially cut-away plan view of the same non-contact double-action transfer device, and FIG. Is a partially cutaway side view of the non-contact double-acting type transfer device, FIG. 4 is an overall configuration diagram of the non-contact double-acting type transfer device, FIG. 5 is an operation explanatory diagram of a motor magnetic pole, and FIG. Posture control explanatory diagram of the movable body, FIG. 7 is a posture control system configuration diagram of the movable body, FIGS. 8 and 10 are microstep drive current waveform diagrams, FIG. 9 is a microstep drive system configuration diagram, and FIG. Is an excitation sequence diagram, FIGS. 12 and 13 are partially cutaway perspective views showing an application example of the non-contact double-acting type transfer device of the present invention, and FIG. 14 is a non-contact view of another embodiment of the present invention. FIG. 15 is a partially broken perspective view of the double-acting type transfer device, and FIG. 15 is a sectional view of a conventional magnetic bearing type motor. 1, 61 ... Fixed part 2, 2a-2d, 62 ... 1st motor magnetic pole, 3, 3a-3d, 63 ... 2nd motor magnetic pole, 4, 64c, M ... Movable body 4a ... 1st tooth row 4b ... 2nd tooth row 4c, 64c ... Hawk-shaped arm 5a-5d ... Gap detector 6 ... Gap detection reference plane 8 ... Control device 9 ... Drive circuit 10 ... Power supply 21 ... Core member 22 ... 1st magnetic pole 23 ... 2 magnetic pole 24 ... 3rd magnetic pole 25 ... 4th magnetic pole 26, 27 ... Suction coil 28-31 ... Driving coil

Claims (8)

[Claims] 1. A core member having a plurality of pole pieces,
A drive magnetic pole excited by a drive coil wound on the pole piece and an attraction magnetic pole excited by an attraction coil wound on the core member adjacent to the drive magnetic pole are integrated. The first and second motor magnetic poles are provided.
And a stator arranged so that the arrangement directions of the pole pieces of the second motor magnetic pole are orthogonal to each other; A first tooth row aligned with a constant pitch and a second tooth row facing each pole piece of the second motor magnetic pole and aligned with a constant pitch in the circumferential direction of the rotating shaft. A movable body having an arm on the top thereof, (c) a displacement detecting means for detecting relative displacement between the stator and the movable body, and (d) based on a detection value from the displacement detecting means. Control means for adjusting a gap between the stator and the movable body and performing step driving in the rotation axis direction and / or the rotation direction in the magnetically held state of the movable body. Contact double-acting transfer device. 2. The gap control means for adjusting the gap between the stator and the movable body by changing the exciting current of the suction coil based on the detection value from the displacement detection means, and the drive coil. 3. The non-contact compound according to claim 1, further comprising: drive control means for changing the current of the movable body to drive the movable body in a rotation axis direction and / or a rotation direction in a magnetically held state. Dynamic transfer device. 3. The non-contact double-acting type transfer device according to claim 1, wherein the arm has a hawk shape. 4. The non-contact double-acting type transfer device according to claim 1, wherein at least three magnetic poles for each of the first and second motors are provided. 5. A cylindrical fixed portion is concentrically formed inside, and the first motor magnetic pole and the second motor magnetic pole are arranged above and below the fixed portion, and the cylindrical movable portion is provided at the center thereof. The non-contact double-acting type transfer device according to claim 1, further comprising a body. 6. The first magnetic pole and the second motor magnetic pole are arranged inside, and a movable body having a shape covering the motor magnetic pole is arranged. Non-contact double-acting transfer device. 7. The drive control means comprises means for supplying sine-wave and cosine-wave currents to the drive coil, and performing microstep drive by the currents flowing in the respective phases of these drive coils. The non-contact double-acting type transfer device according to claim 2. 8. A plurality of motor magnetic poles arranged in the drive direction of the movable body are arranged such that the excitation phases of the magnetic poles are deviated from each other by π / 4. Non-contact double-acting type transfer device.