JPS62140442U - - Google Patents
Info
- Publication number
- JPS62140442U JPS62140442U JP2672586U JP2672586U JPS62140442U JP S62140442 U JPS62140442 U JP S62140442U JP 2672586 U JP2672586 U JP 2672586U JP 2672586 U JP2672586 U JP 2672586U JP S62140442 U JPS62140442 U JP S62140442U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- inspected
- detection device
- light
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2672586U JPS62140442U (de) | 1986-02-26 | 1986-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2672586U JPS62140442U (de) | 1986-02-26 | 1986-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62140442U true JPS62140442U (de) | 1987-09-04 |
Family
ID=30828073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2672586U Pending JPS62140442U (de) | 1986-02-26 | 1986-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140442U (de) |
-
1986
- 1986-02-26 JP JP2672586U patent/JPS62140442U/ja active Pending
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