JPS62167157U - - Google Patents
Info
- Publication number
- JPS62167157U JPS62167157U JP5571686U JP5571686U JPS62167157U JP S62167157 U JPS62167157 U JP S62167157U JP 5571686 U JP5571686 U JP 5571686U JP 5571686 U JP5571686 U JP 5571686U JP S62167157 U JPS62167157 U JP S62167157U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- defect
- light
- electrical signal
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5571686U JPS62167157U (de) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5571686U JPS62167157U (de) | 1986-04-14 | 1986-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167157U true JPS62167157U (de) | 1987-10-23 |
Family
ID=30883873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5571686U Pending JPS62167157U (de) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167157U (de) |
-
1986
- 1986-04-14 JP JP5571686U patent/JPS62167157U/ja active Pending
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