JPS62136744A - 電子顕微鏡等の試料傾斜装置 - Google Patents

電子顕微鏡等の試料傾斜装置

Info

Publication number
JPS62136744A
JPS62136744A JP60277686A JP27768685A JPS62136744A JP S62136744 A JPS62136744 A JP S62136744A JP 60277686 A JP60277686 A JP 60277686A JP 27768685 A JP27768685 A JP 27768685A JP S62136744 A JPS62136744 A JP S62136744A
Authority
JP
Japan
Prior art keywords
sample
sample holder
axis
drive arm
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60277686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317345B2 (enExample
Inventor
Koro Oi
公郎 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60277686A priority Critical patent/JPS62136744A/ja
Publication of JPS62136744A publication Critical patent/JPS62136744A/ja
Publication of JPH0317345B2 publication Critical patent/JPH0317345B2/ja
Granted legal-status Critical Current

Links

JP60277686A 1985-12-10 1985-12-10 電子顕微鏡等の試料傾斜装置 Granted JPS62136744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60277686A JPS62136744A (ja) 1985-12-10 1985-12-10 電子顕微鏡等の試料傾斜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60277686A JPS62136744A (ja) 1985-12-10 1985-12-10 電子顕微鏡等の試料傾斜装置

Publications (2)

Publication Number Publication Date
JPS62136744A true JPS62136744A (ja) 1987-06-19
JPH0317345B2 JPH0317345B2 (enExample) 1991-03-07

Family

ID=17586889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60277686A Granted JPS62136744A (ja) 1985-12-10 1985-12-10 電子顕微鏡等の試料傾斜装置

Country Status (1)

Country Link
JP (1) JPS62136744A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515952A (enExample) * 1974-07-03 1976-01-19 Hitachi Ltd
JPS5158062A (en) * 1974-11-15 1976-05-21 Hitachi Ltd Denshikenbikyo niokeru shiryokeishasochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515952A (enExample) * 1974-07-03 1976-01-19 Hitachi Ltd
JPS5158062A (en) * 1974-11-15 1976-05-21 Hitachi Ltd Denshikenbikyo niokeru shiryokeishasochi

Also Published As

Publication number Publication date
JPH0317345B2 (enExample) 1991-03-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term