JPS62136432U - - Google Patents
Info
- Publication number
- JPS62136432U JPS62136432U JP15057986U JP15057986U JPS62136432U JP S62136432 U JPS62136432 U JP S62136432U JP 15057986 U JP15057986 U JP 15057986U JP 15057986 U JP15057986 U JP 15057986U JP S62136432 U JPS62136432 U JP S62136432U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- cassette
- grooves
- held
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057986U JPS62136432U (ko) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057986U JPS62136432U (ko) | 1986-09-30 | 1986-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62136432U true JPS62136432U (ko) | 1987-08-27 |
Family
ID=31066849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15057986U Pending JPS62136432U (ko) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136432U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50125462A (ko) * | 1974-03-20 | 1975-10-02 |
-
1986
- 1986-09-30 JP JP15057986U patent/JPS62136432U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50125462A (ko) * | 1974-03-20 | 1975-10-02 |
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