JPS62135880A - Electrooptic apparatus - Google Patents
Electrooptic apparatusInfo
- Publication number
- JPS62135880A JPS62135880A JP60277272A JP27727285A JPS62135880A JP S62135880 A JPS62135880 A JP S62135880A JP 60277272 A JP60277272 A JP 60277272A JP 27727285 A JP27727285 A JP 27727285A JP S62135880 A JPS62135880 A JP S62135880A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electro
- optical device
- electrodes
- row
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
液晶と組み会わせアクティブマトリックスとして用いら
れるＭＩＭ素子と結合する電極のパターン形状に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] This invention relates to the pattern shape of an electrode that is coupled to an MIM element that is used as an active matrix in combination with a liquid crystal.
従来のＭＩＭ累子を結合した電気光学装置のパターン形
状ｔ−第３図に示す、基板上にＭＩＭ素子と結合する＠
１の電極１を形成し、フォトリン法を用−所定の形状に
加工した陵、ＭＩＭ素子嘉２の電匝２ｆｔ形成していた
。Pattern shape of an electro-optical device combining conventional MIM elements - Figure 3 shows the pattern shape of an electro-optical device combined with an MIM element on a substrate@
An electrode 1 of 1 was formed, and a 2 ft. electrode 1 of the MIM element 2 was formed using the photorin method and processed into a predetermined shape.
しかしながら従来の亀匝１のパターン形状ではフォトリ
ソ工程でゴミが付着し、レジストにクラックがはいり、
電極が断線し、歩留りを低下させるため、表示品質の低
下及びコストの上昇比という問題点を有する。However, in the conventional Kamiso 1 pattern shape, dust adhered during the photolithography process and cracks appeared in the resist.
Since the electrodes are disconnected and the yield is reduced, there are problems in that the display quality deteriorates and the cost increases.
そこで本発明はこのような問題点金解失するもので、そ
の目的は断線の無い亀甑金形成し、表示品質の高い電気
光学ｖｃ置を提供することにある。SUMMARY OF THE INVENTION The present invention aims to solve these problems, and its object is to provide an electro-optical VC device that has a wire-cutting structure that is free from disconnections and has a high display quality.
本発明の電気光学装置のパターン形状は、ＭＩＭ素子を
結合させた行、或１ｆｈは列電極に並列に電極？形我し
、前記２本の１！血を短絡し、はしご状となるパターン
を有すること？待畝とする。The pattern shape of the electro-optical device of the present invention is a row in which MIM elements are combined, or 1fh is an electrode parallel to a column electrode. I am the first of the two above! Having a ladder-like pattern that short-circuits blood? Make it a waiting ridge.
又、ＭＩＭ素子を結合させた行、或＾は列電玉にコの字
形の重臣を前記電極の両側に結合させたパターンｆ！：
有することを％微とする。In addition, there is a pattern f where MIM elements are combined in rows, or rows, and U-shaped senior ministers are connected to both sides of the electrodes. :
It is assumed that it has a small percentage.
本発明の上記のパターン形状によれば、ＭＩＭ素子と結
合され九電極が断線しても、電匝に並列に形成され、短
終された直販或いはコの字形の１應が結合していること
によって駆動信号がＭＩＭ素子に印加され表示可能とな
る。According to the above pattern shape of the present invention, even if the nine electrodes connected to the MIM element are disconnected, the short-terminated direct sales or U-shaped one electrode formed in parallel to the electric box will still be connected. A drive signal is applied to the MIM element to enable display.
５〜【施８２リ １
以下、本発明の拝細を実施列に基ず＾て説明する。棺１
図を本発明に基づく電気光学装置のパターン形状を示す
、基板上にＭＩＭ素子と結合する君ｌの電極１とはしご
伏Ｉ！匝２七７オトリソ法を用いて形成する。前記ＷＬ
飄１，２は一般にＡ７゜Ｔａ金用いる１次に亀甑１とは
しご状電鷺２との間に透明な工Ｔｏ等の画素電匝３を形
成する。電極１とはしご状逝匝２の７オトリソエ程でど
ちらか一方が断線しても、他方の亀甑でコンタクトがと
れる。5~[Se82li 1] Hereinafter, the details of the present invention will be explained based on the implementation sequence. Coffin 1
The figure shows the pattern shape of the electro-optical device according to the present invention, with the electrode 1 and the ladder I! connected to the MIM element on the substrate. It is formed using the 277 otolithography method. Said WL
The glasses 1 and 2 are generally made of A7° Ta gold, and a pixel cell 3 such as a transparent metal plate 3 is formed between a primary pot 1 and a ladder-like cell 2. Even if either one of the electrode 1 and the ladder-like droplet 2 is disconnected after about 7 steps, contact can be made with the other hook.
実施列２
飢２図は、基板上ＩＣＭＩＭ素子と結合する混血１と、
その一方の側にコの字形亀甑４、他方の側にコの字形電
極５を実施列１と同様の金属を用い７オトリン法で形成
する５次にコの字電飄５測に画素電極３を形成する。こ
のパターンも実施列１ト同様にコンタクトがとれる。Implementation row 2 Figure 2 shows a hybrid 1 coupled to an ICMIM element on a substrate,
A U-shaped turtle shell 4 is formed on one side, and a U-shaped electrode 5 is formed on the other side using the same metal as in the first row using the 7-otolin method. form 3. Contact can also be made with this pattern in the same way as in the first embodiment.
以上の様（本発明によれば、ＭＩＭ素子と結合する亀甑
ＩＣはしご状、或ｌＡはコの字形電極を結合するだけで
、断線の無い基板とつくることができる。従来、フォト
リソ工程でのレジストのクランクは最大４０ ｍｓ程度
であり、はしご状ｔ１Ｍ、コの字形電極を、ＢＩ工Ｍ素
子と結合する１甑から４０１ｉＪ以上離して形成すれば
、第１図Ａ、Ｂが同時に断線する確率は非常に小さくな
り断線は皆無となり、欠陥の無い表示品質の高い亀気光
学装＃を得ることができる。As described above (according to the present invention), an IC ladder-like or 1A coupled to an MIM element can be made with a substrate without disconnection by simply coupling a U-shaped electrode. The resist crank time is about 40 ms at maximum, and if the ladder-like t1M and U-shaped electrodes are formed at a distance of 401 iJ or more from the 1-hole connected to the BI engineering M element, the probability that A and B in Figure 1 will break at the same time will increase. is extremely small, there is no disconnection, and it is possible to obtain a defect-free optical device with high display quality.
汎１，２図は本発明に基づく電気光学装置のパターン形
状を示す図、嬶３図は従来の電気光学装置のパターン図
を示す。
ｌ・・・ＭＩＭと結合する亀甑
２・・＋１はしご状電極
３・・・画素電極
４・・・コの字形電極
５・・・コの字形電匝
以 と
出該人 セイコーエプソン沫式会社
代理人 弁理士 最 上 務ｆｌ！！ｉ名第２図Figures 1 and 2 show the pattern shape of an electro-optical device according to the present invention, and Figure 3 shows a pattern diagram of a conventional electro-optical device. l...Turtle-shaped electrode coupled with MIM 2...+1 Ladder-shaped electrode 3...Pixel electrode 4...U-shaped electrode 5...U-shaped electric spoon Seiko Epson Shishiki Company Agent Patent Attorney Mogami Fl! ! i name figure 2
Claims (2)
、他方に列電極を形成し、少なくとも一方の前記基板に
、金属−絶縁体−金属構造を有する非線形素子（以下、
ＭＩＭ素子と呼ぶ）を結合させた電気光学装置に於いて
、ＭＩＭ素子を結合させた行、或いは列電極に並列に電
極を形成し、前記２本の電極を短絡し、はしご状となる
パターンを有することを特徴とする電気光学装置。(1) A row electrode is formed on one of two substrates facing each other via a liquid crystal, and a column electrode is formed on the other, and a nonlinear element (hereinafter referred to as
In an electro-optical device that combines MIM elements (called MIM elements), an electrode is formed in parallel to the row or column electrode where the MIM elements are combined, and the two electrodes are short-circuited to form a ladder-like pattern. An electro-optical device comprising:
字形の電極を前記電極の両側に結合させたパターンを有
することを特徴とする特許請求の範囲第一項記載の電気
光学装置。(2) The electro-optical device according to claim 1, characterized in that the electro-optical device has a pattern in which row or column electrodes in which MIM elements are coupled are coupled with U-shaped electrodes on both sides of the electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60277272A JPS62135880A (en) | 1985-12-10 | 1985-12-10 | Electrooptic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60277272A JPS62135880A (en) | 1985-12-10 | 1985-12-10 | Electrooptic apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62135880A true JPS62135880A (en) | 1987-06-18 |
Family
ID=17581211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60277272A Pending JPS62135880A (en) | 1985-12-10 | 1985-12-10 | Electrooptic apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62135880A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63250684A (en) * | 1987-04-07 | 1988-10-18 | セイコーインスツルメンツ株式会社 | Lateral double-terminal element |
-
1985
- 1985-12-10 JP JP60277272A patent/JPS62135880A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63250684A (en) * | 1987-04-07 | 1988-10-18 | セイコーインスツルメンツ株式会社 | Lateral double-terminal element |
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