JPS62134016U - - Google Patents

Info

Publication number
JPS62134016U
JPS62134016U JP2162386U JP2162386U JPS62134016U JP S62134016 U JPS62134016 U JP S62134016U JP 2162386 U JP2162386 U JP 2162386U JP 2162386 U JP2162386 U JP 2162386U JP S62134016 U JPS62134016 U JP S62134016U
Authority
JP
Japan
Prior art keywords
observation
optical system
light
contact detection
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2162386U
Other languages
English (en)
Japanese (ja)
Other versions
JP2512050Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021623U priority Critical patent/JP2512050Y2/ja
Publication of JPS62134016U publication Critical patent/JPS62134016U/ja
Application granted granted Critical
Publication of JP2512050Y2 publication Critical patent/JP2512050Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1986021623U 1986-02-18 1986-02-18 非接触検出装置における観察装置 Expired - Lifetime JP2512050Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021623U JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021623U JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Publications (2)

Publication Number Publication Date
JPS62134016U true JPS62134016U (cs) 1987-08-24
JP2512050Y2 JP2512050Y2 (ja) 1996-09-25

Family

ID=30818231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021623U Expired - Lifetime JP2512050Y2 (ja) 1986-02-18 1986-02-18 非接触検出装置における観察装置

Country Status (1)

Country Link
JP (1) JP2512050Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01182704A (ja) * 1988-01-14 1989-07-20 Matsushita Electric Ind Co Ltd 溶接線検出装置
JPWO2004040281A1 (ja) * 2002-10-30 2006-03-02 凸版印刷株式会社 配線パターンの検査装置、検査方法、検出装置および検出方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS57135306A (en) * 1981-02-16 1982-08-20 Toyo Kogaku Kogyo Kk Measuring method of microsubstance
JPS59100805A (ja) * 1982-12-01 1984-06-11 Canon Inc 物体観察装置
JPS60186705A (ja) * 1984-03-06 1985-09-24 Agency Of Ind Science & Technol 光学式粗さ計

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767844A (en) * 1980-10-15 1982-04-24 Nippon Kogaku Kk <Nikon> Surface inspecting device
JPS57135306A (en) * 1981-02-16 1982-08-20 Toyo Kogaku Kogyo Kk Measuring method of microsubstance
JPS59100805A (ja) * 1982-12-01 1984-06-11 Canon Inc 物体観察装置
JPS60186705A (ja) * 1984-03-06 1985-09-24 Agency Of Ind Science & Technol 光学式粗さ計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01182704A (ja) * 1988-01-14 1989-07-20 Matsushita Electric Ind Co Ltd 溶接線検出装置
JPWO2004040281A1 (ja) * 2002-10-30 2006-03-02 凸版印刷株式会社 配線パターンの検査装置、検査方法、検出装置および検出方法

Also Published As

Publication number Publication date
JP2512050Y2 (ja) 1996-09-25

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