JPS62133957U - - Google Patents

Info

Publication number
JPS62133957U
JPS62133957U JP2261786U JP2261786U JPS62133957U JP S62133957 U JPS62133957 U JP S62133957U JP 2261786 U JP2261786 U JP 2261786U JP 2261786 U JP2261786 U JP 2261786U JP S62133957 U JPS62133957 U JP S62133957U
Authority
JP
Japan
Prior art keywords
air cleaner
engine
collects dust
registration request
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2261786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232861Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986022617U priority Critical patent/JPH0232861Y2/ja
Publication of JPS62133957U publication Critical patent/JPS62133957U/ja
Application granted granted Critical
Publication of JPH0232861Y2 publication Critical patent/JPH0232861Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1986022617U 1986-02-19 1986-02-19 Expired JPH0232861Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986022617U JPH0232861Y2 (zh) 1986-02-19 1986-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986022617U JPH0232861Y2 (zh) 1986-02-19 1986-02-19

Publications (2)

Publication Number Publication Date
JPS62133957U true JPS62133957U (zh) 1987-08-24
JPH0232861Y2 JPH0232861Y2 (zh) 1990-09-05

Family

ID=30820170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986022617U Expired JPH0232861Y2 (zh) 1986-02-19 1986-02-19

Country Status (1)

Country Link
JP (1) JPH0232861Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119648A1 (ja) * 2006-04-07 2007-10-25 Tokyo Electron Limited 気体清浄装置および半導体製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147483U (ja) * 1984-08-31 1986-03-29 株式会社 土屋製作所 プレフイルタ付エアクリ−ナ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56127011A (en) * 1980-03-11 1981-10-05 Kubota Ltd Combined harvester

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147483U (ja) * 1984-08-31 1986-03-29 株式会社 土屋製作所 プレフイルタ付エアクリ−ナ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119648A1 (ja) * 2006-04-07 2007-10-25 Tokyo Electron Limited 気体清浄装置および半導体製造装置
JPWO2007119648A1 (ja) * 2006-04-07 2009-08-27 東京エレクトロン株式会社 気体清浄装置および半導体製造装置

Also Published As

Publication number Publication date
JPH0232861Y2 (zh) 1990-09-05

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