JPS62133957U - - Google Patents
Info
- Publication number
- JPS62133957U JPS62133957U JP2261786U JP2261786U JPS62133957U JP S62133957 U JPS62133957 U JP S62133957U JP 2261786 U JP2261786 U JP 2261786U JP 2261786 U JP2261786 U JP 2261786U JP S62133957 U JPS62133957 U JP S62133957U
- Authority
- JP
- Japan
- Prior art keywords
- air cleaner
- engine
- collects dust
- registration request
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986022617U JPH0232861Y2 (pt-PT) | 1986-02-19 | 1986-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986022617U JPH0232861Y2 (pt-PT) | 1986-02-19 | 1986-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62133957U true JPS62133957U (pt-PT) | 1987-08-24 |
| JPH0232861Y2 JPH0232861Y2 (pt-PT) | 1990-09-05 |
Family
ID=30820170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986022617U Expired JPH0232861Y2 (pt-PT) | 1986-02-19 | 1986-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0232861Y2 (pt-PT) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007119648A1 (ja) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Limited | 気体清浄装置および半導体製造装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147483U (ja) * | 1984-08-31 | 1986-03-29 | 株式会社 土屋製作所 | プレフイルタ付エアクリ−ナ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127011A (en) * | 1980-03-11 | 1981-10-05 | Kubota Ltd | Combined harvester |
-
1986
- 1986-02-19 JP JP1986022617U patent/JPH0232861Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147483U (ja) * | 1984-08-31 | 1986-03-29 | 株式会社 土屋製作所 | プレフイルタ付エアクリ−ナ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007119648A1 (ja) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Limited | 気体清浄装置および半導体製造装置 |
| JPWO2007119648A1 (ja) * | 2006-04-07 | 2009-08-27 | 東京エレクトロン株式会社 | 気体清浄装置および半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0232861Y2 (pt-PT) | 1990-09-05 |