JPS62133957U - - Google Patents

Info

Publication number
JPS62133957U
JPS62133957U JP2261786U JP2261786U JPS62133957U JP S62133957 U JPS62133957 U JP S62133957U JP 2261786 U JP2261786 U JP 2261786U JP 2261786 U JP2261786 U JP 2261786U JP S62133957 U JPS62133957 U JP S62133957U
Authority
JP
Japan
Prior art keywords
air cleaner
engine
collects dust
registration request
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2261786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232861Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986022617U priority Critical patent/JPH0232861Y2/ja
Publication of JPS62133957U publication Critical patent/JPS62133957U/ja
Application granted granted Critical
Publication of JPH0232861Y2 publication Critical patent/JPH0232861Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1986022617U 1986-02-19 1986-02-19 Expired JPH0232861Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986022617U JPH0232861Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986022617U JPH0232861Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Publications (2)

Publication Number Publication Date
JPS62133957U true JPS62133957U (enrdf_load_stackoverflow) 1987-08-24
JPH0232861Y2 JPH0232861Y2 (enrdf_load_stackoverflow) 1990-09-05

Family

ID=30820170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986022617U Expired JPH0232861Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Country Status (1)

Country Link
JP (1) JPH0232861Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119648A1 (ja) * 2006-04-07 2007-10-25 Tokyo Electron Limited 気体清浄装置および半導体製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147483U (ja) * 1984-08-31 1986-03-29 株式会社 土屋製作所 プレフイルタ付エアクリ−ナ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147483U (ja) * 1984-08-31 1986-03-29 株式会社 土屋製作所 プレフイルタ付エアクリ−ナ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119648A1 (ja) * 2006-04-07 2007-10-25 Tokyo Electron Limited 気体清浄装置および半導体製造装置
JPWO2007119648A1 (ja) * 2006-04-07 2009-08-27 東京エレクトロン株式会社 気体清浄装置および半導体製造装置

Also Published As

Publication number Publication date
JPH0232861Y2 (enrdf_load_stackoverflow) 1990-09-05

Similar Documents

Publication Publication Date Title
JPS62133957U (enrdf_load_stackoverflow)
JPH0313457U (enrdf_load_stackoverflow)
JPS63174566U (enrdf_load_stackoverflow)
JPS61100479U (enrdf_load_stackoverflow)
JPH04915U (enrdf_load_stackoverflow)
JPS6336446U (enrdf_load_stackoverflow)
JPH02150018U (enrdf_load_stackoverflow)
JPS63196465U (enrdf_load_stackoverflow)
JPS61163024U (enrdf_load_stackoverflow)
JPS6157159U (enrdf_load_stackoverflow)
JPS6394526U (enrdf_load_stackoverflow)
JPS6167424U (enrdf_load_stackoverflow)
JPS61115122U (enrdf_load_stackoverflow)
JPH0222620U (enrdf_load_stackoverflow)
JPS62146081U (enrdf_load_stackoverflow)
JPH01162074U (enrdf_load_stackoverflow)
JPH02132838U (enrdf_load_stackoverflow)
JPH0248118U (enrdf_load_stackoverflow)
JPS6371498U (enrdf_load_stackoverflow)
JPS62109730U (enrdf_load_stackoverflow)
JPS62170151U (enrdf_load_stackoverflow)
JPS6224058U (enrdf_load_stackoverflow)
JPS6191061U (enrdf_load_stackoverflow)
JPS61110027U (enrdf_load_stackoverflow)
JPS6297260U (enrdf_load_stackoverflow)