JPS62130517A - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS62130517A
JPS62130517A JP26275785A JP26275785A JPS62130517A JP S62130517 A JPS62130517 A JP S62130517A JP 26275785 A JP26275785 A JP 26275785A JP 26275785 A JP26275785 A JP 26275785A JP S62130517 A JPS62130517 A JP S62130517A
Authority
JP
Japan
Prior art keywords
slider
chamber
crystal growth
liquid phase
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26275785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043101B2 (enrdf_load_stackoverflow
Inventor
Katsumi Sato
克己 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26275785A priority Critical patent/JPS62130517A/ja
Publication of JPS62130517A publication Critical patent/JPS62130517A/ja
Publication of JPH043101B2 publication Critical patent/JPH043101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP26275785A 1985-11-22 1985-11-22 液相エピタキシヤル成長装置 Granted JPS62130517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26275785A JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26275785A JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS62130517A true JPS62130517A (ja) 1987-06-12
JPH043101B2 JPH043101B2 (enrdf_load_stackoverflow) 1992-01-22

Family

ID=17380165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26275785A Granted JPS62130517A (ja) 1985-11-22 1985-11-22 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS62130517A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037680B1 (ko) * 2011-10-27 2019-10-29 웅진코웨이 주식회사 제습장치의 열교환기 건조방법 및 이를 이용하는 제습장치

Also Published As

Publication number Publication date
JPH043101B2 (enrdf_load_stackoverflow) 1992-01-22

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