JPS62130331U - - Google Patents

Info

Publication number
JPS62130331U
JPS62130331U JP1716986U JP1716986U JPS62130331U JP S62130331 U JPS62130331 U JP S62130331U JP 1716986 U JP1716986 U JP 1716986U JP 1716986 U JP1716986 U JP 1716986U JP S62130331 U JPS62130331 U JP S62130331U
Authority
JP
Japan
Prior art keywords
air
room
air conditioner
clean room
hepa filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1716986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410504Y2 (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986017169U priority Critical patent/JPH0410504Y2/ja
Publication of JPS62130331U publication Critical patent/JPS62130331U/ja
Application granted granted Critical
Publication of JPH0410504Y2 publication Critical patent/JPH0410504Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1986017169U 1986-02-08 1986-02-08 Expired JPH0410504Y2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (ru) 1986-02-08 1986-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (ru) 1986-02-08 1986-02-08

Publications (2)

Publication Number Publication Date
JPS62130331U true JPS62130331U (ru) 1987-08-18
JPH0410504Y2 JPH0410504Y2 (ru) 1992-03-16

Family

ID=30809681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986017169U Expired JPH0410504Y2 (ru) 1986-02-08 1986-02-08

Country Status (1)

Country Link
JP (1) JPH0410504Y2 (ru)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100439U (ru) * 1985-08-20 1987-06-26
JPH0225651A (ja) * 1988-07-14 1990-01-29 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148525U (ja) * 1982-03-30 1983-10-05 株式会社大林組 超清浄空気室構造
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148525U (ja) * 1982-03-30 1983-10-05 株式会社大林組 超清浄空気室構造
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100439U (ru) * 1985-08-20 1987-06-26
JPH0225651A (ja) * 1988-07-14 1990-01-29 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

Also Published As

Publication number Publication date
JPH0410504Y2 (ru) 1992-03-16

Similar Documents

Publication Publication Date Title
JPS62130331U (ru)
JPH08285324A (ja) 空調システム
JPS6238533U (ru)
JPS62100439U (ru)
JPH02120147U (ru)
JPS63116824U (ru)
JPH0453138U (ru)
JPH02144334U (ru)
JPS63178733U (ru)
JPS63190838U (ru)
JPS602745U (ja) 非層流式クリ−ンル−ム
JPS635323U (ru)
JPS6445221U (ru)
JPS63162241U (ru)
JPH0439618U (ru)
JPS6445222U (ru)
JPH0281335U (ru)
JPH0188322U (ru)
JPH02535U (ru)
JPH02106536U (ru)
JPS635311U (ru)
JPS6176238U (ru)
JPS635309U (ru)
JPH026916U (ru)
JPS61149030U (ru)