JPS62130331U - - Google Patents
Info
- Publication number
- JPS62130331U JPS62130331U JP1716986U JP1716986U JPS62130331U JP S62130331 U JPS62130331 U JP S62130331U JP 1716986 U JP1716986 U JP 1716986U JP 1716986 U JP1716986 U JP 1716986U JP S62130331 U JPS62130331 U JP S62130331U
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- air conditioner
- clean room
- hepa filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986017169U JPH0410504Y2 (https=) | 1986-02-08 | 1986-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986017169U JPH0410504Y2 (https=) | 1986-02-08 | 1986-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130331U true JPS62130331U (https=) | 1987-08-18 |
| JPH0410504Y2 JPH0410504Y2 (https=) | 1992-03-16 |
Family
ID=30809681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986017169U Expired JPH0410504Y2 (https=) | 1986-02-08 | 1986-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410504Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62100439U (https=) * | 1985-08-20 | 1987-06-26 | ||
| JPH0225651A (ja) * | 1988-07-14 | 1990-01-29 | Hitachi Plant Eng & Constr Co Ltd | クリーンルーム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148525U (ja) * | 1982-03-30 | 1983-10-05 | 株式会社大林組 | 超清浄空気室構造 |
| JPS59185923A (ja) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | クリーンルームの形成方法 |
-
1986
- 1986-02-08 JP JP1986017169U patent/JPH0410504Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148525U (ja) * | 1982-03-30 | 1983-10-05 | 株式会社大林組 | 超清浄空気室構造 |
| JPS59185923A (ja) * | 1983-04-07 | 1984-10-22 | Sanki Eng Co Ltd | クリーンルームの形成方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62100439U (https=) * | 1985-08-20 | 1987-06-26 | ||
| JPH0225651A (ja) * | 1988-07-14 | 1990-01-29 | Hitachi Plant Eng & Constr Co Ltd | クリーンルーム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410504Y2 (https=) | 1992-03-16 |