JPS62130086U - - Google Patents

Info

Publication number
JPS62130086U
JPS62130086U JP1779586U JP1779586U JPS62130086U JP S62130086 U JPS62130086 U JP S62130086U JP 1779586 U JP1779586 U JP 1779586U JP 1779586 U JP1779586 U JP 1779586U JP S62130086 U JPS62130086 U JP S62130086U
Authority
JP
Japan
Prior art keywords
tray case
partition wall
electronic component
component mounting
storage recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1779586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539104Y2 (sk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986017795U priority Critical patent/JPH0539104Y2/ja
Publication of JPS62130086U publication Critical patent/JPS62130086U/ja
Application granted granted Critical
Publication of JPH0539104Y2 publication Critical patent/JPH0539104Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1986017795U 1986-02-10 1986-02-10 Expired - Lifetime JPH0539104Y2 (sk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986017795U JPH0539104Y2 (sk) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986017795U JPH0539104Y2 (sk) 1986-02-10 1986-02-10

Publications (2)

Publication Number Publication Date
JPS62130086U true JPS62130086U (sk) 1987-08-17
JPH0539104Y2 JPH0539104Y2 (sk) 1993-10-04

Family

ID=30810876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986017795U Expired - Lifetime JPH0539104Y2 (sk) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPH0539104Y2 (sk)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203386A (ja) * 1985-03-04 1986-09-09 松下電器産業株式会社 電子部品用搬送パレットの識別方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296587B2 (ja) * 1998-02-09 2009-07-15 株式会社ニコン 基板支持装置、基板搬送装置及びその方法、基板保持方法、並びに露光装置及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6099881A (ja) * 1983-11-07 1985-06-03 松下電器産業株式会社 フラツト形ｉｃパツケ−ジのキヤリア
JPS60169900U (ja) * 1984-04-20 1985-11-11 株式会社東芝 半導体装置輸送用トレイ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6099881A (ja) * 1983-11-07 1985-06-03 松下電器産業株式会社 フラツト形ｉｃパツケ−ジのキヤリア
JPS60169900U (ja) * 1984-04-20 1985-11-11 株式会社東芝 半導体装置輸送用トレイ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203386A (ja) * 1985-03-04 1986-09-09 松下電器産業株式会社 電子部品用搬送パレットの識別方法

Also Published As

Publication number Publication date
JPH0539104Y2 (sk) 1993-10-04

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