JPS6212946U - - Google Patents
Info
- Publication number
- JPS6212946U JPS6212946U JP10436685U JP10436685U JPS6212946U JP S6212946 U JPS6212946 U JP S6212946U JP 10436685 U JP10436685 U JP 10436685U JP 10436685 U JP10436685 U JP 10436685U JP S6212946 U JPS6212946 U JP S6212946U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- utility
- semiconductor manufacturing
- model registration
- heat source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 5
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10436685U JPS6212946U (zh) | 1985-07-08 | 1985-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10436685U JPS6212946U (zh) | 1985-07-08 | 1985-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6212946U true JPS6212946U (zh) | 1987-01-26 |
Family
ID=30977797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10436685U Pending JPS6212946U (zh) | 1985-07-08 | 1985-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212946U (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178718A (ja) * | 1983-03-29 | 1984-10-11 | Sony Corp | 半導体基体の処理装置 |
| JPS60104367A (ja) * | 1984-08-17 | 1985-06-08 | Nec Corp | 媒体判定装置 |
-
1985
- 1985-07-08 JP JP10436685U patent/JPS6212946U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178718A (ja) * | 1983-03-29 | 1984-10-11 | Sony Corp | 半導体基体の処理装置 |
| JPS60104367A (ja) * | 1984-08-17 | 1985-06-08 | Nec Corp | 媒体判定装置 |