JPS6212943U - - Google Patents
Info
- Publication number
- JPS6212943U JPS6212943U JP10329485U JP10329485U JPS6212943U JP S6212943 U JPS6212943 U JP S6212943U JP 10329485 U JP10329485 U JP 10329485U JP 10329485 U JP10329485 U JP 10329485U JP S6212943 U JPS6212943 U JP S6212943U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inert gas
- ray
- lithography apparatus
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001015 X-ray lithography Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329485U JPS6212943U (zh) | 1985-07-05 | 1985-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329485U JPS6212943U (zh) | 1985-07-05 | 1985-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6212943U true JPS6212943U (zh) | 1987-01-26 |
Family
ID=30975716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10329485U Pending JPS6212943U (zh) | 1985-07-05 | 1985-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212943U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63312639A (ja) * | 1987-06-15 | 1988-12-21 | Canon Inc | 露光装置 |
| JPH0298120A (ja) * | 1988-10-05 | 1990-04-10 | Canon Inc | Ｘ線露光装置 |
-
1985
- 1985-07-05 JP JP10329485U patent/JPS6212943U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63312639A (ja) * | 1987-06-15 | 1988-12-21 | Canon Inc | 露光装置 |
| JPH0298120A (ja) * | 1988-10-05 | 1990-04-10 | Canon Inc | Ｘ線露光装置 |