JPS6212944U - - Google Patents
Info
- Publication number
- JPS6212944U JPS6212944U JP10435085U JP10435085U JPS6212944U JP S6212944 U JPS6212944 U JP S6212944U JP 10435085 U JP10435085 U JP 10435085U JP 10435085 U JP10435085 U JP 10435085U JP S6212944 U JPS6212944 U JP S6212944U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reactor
- processed
- heat treatment
- ultraviolet lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10435085U JPS6212944U (OSRAM) | 1985-07-09 | 1985-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10435085U JPS6212944U (OSRAM) | 1985-07-09 | 1985-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6212944U true JPS6212944U (OSRAM) | 1987-01-26 |
Family
ID=30977765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10435085U Pending JPS6212944U (OSRAM) | 1985-07-09 | 1985-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212944U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5753942A (en) * | 1980-09-17 | 1982-03-31 | Semiconductor Res Found | Method of oxidation and diffusion |
| JPS6053032A (ja) * | 1983-09-02 | 1985-03-26 | Hitachi Ltd | 処理装置 |
-
1985
- 1985-07-09 JP JP10435085U patent/JPS6212944U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5753942A (en) * | 1980-09-17 | 1982-03-31 | Semiconductor Res Found | Method of oxidation and diffusion |
| JPS6053032A (ja) * | 1983-09-02 | 1985-03-26 | Hitachi Ltd | 処理装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AR240989A2 (es) | Dispositivo para el tratamiento con amoniaco de un gas | |
| JPS6212944U (OSRAM) | ||
| JPS6322733U (OSRAM) | ||
| JPH0171436U (OSRAM) | ||
| JPS6212943U (OSRAM) | ||
| JPS6339930U (OSRAM) | ||
| JPS61158947U (OSRAM) | ||
| JPS6212946U (OSRAM) | ||
| JPS61202444U (OSRAM) | ||
| JPH0434733U (OSRAM) | ||
| JPS62145328U (OSRAM) | ||
| JPS5954924U (ja) | 乾燥装置 | |
| JPS60111042U (ja) | 熱処理装置 | |
| JPS6292637U (OSRAM) | ||
| JPS63127121U (OSRAM) | ||
| JPS61149327U (OSRAM) | ||
| JPH01171028U (OSRAM) | ||
| JPS6418729U (OSRAM) | ||
| JPS6447036U (OSRAM) | ||
| JPS59177937U (ja) | 赤外線熱処理装置 | |
| JPH01160400U (OSRAM) | ||
| JPS6397231U (OSRAM) | ||
| JPS6287431U (OSRAM) | ||
| JPS61198263U (OSRAM) | ||
| JPS63127122U (OSRAM) |