JPS621257Y2 - - Google Patents

Info

Publication number
JPS621257Y2
JPS621257Y2 JP1981169954U JP16995481U JPS621257Y2 JP S621257 Y2 JPS621257 Y2 JP S621257Y2 JP 1981169954 U JP1981169954 U JP 1981169954U JP 16995481 U JP16995481 U JP 16995481U JP S621257 Y2 JPS621257 Y2 JP S621257Y2
Authority
JP
Japan
Prior art keywords
melt
slider
boat
recess
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981169954U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5875771U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16995481U priority Critical patent/JPS5875771U/ja
Publication of JPS5875771U publication Critical patent/JPS5875771U/ja
Application granted granted Critical
Publication of JPS621257Y2 publication Critical patent/JPS621257Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16995481U 1981-11-13 1981-11-13 液相成長装置 Granted JPS5875771U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16995481U JPS5875771U (ja) 1981-11-13 1981-11-13 液相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16995481U JPS5875771U (ja) 1981-11-13 1981-11-13 液相成長装置

Publications (2)

Publication Number Publication Date
JPS5875771U JPS5875771U (ja) 1983-05-21
JPS621257Y2 true JPS621257Y2 (OSRAM) 1987-01-13

Family

ID=29961920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16995481U Granted JPS5875771U (ja) 1981-11-13 1981-11-13 液相成長装置

Country Status (1)

Country Link
JP (1) JPS5875771U (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5268167U (OSRAM) * 1975-11-17 1977-05-20

Also Published As

Publication number Publication date
JPS5875771U (ja) 1983-05-21

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